Monte Carlo Collision Simulation of Positive-Negative Ion Recombination for a Given Rate Constant

Journal of the Physical Society of Japan

Volumn 67, Issue 4, 1998, Pages 1288-1290

  Nanbu, Kenichi ^a   Denpoh, Kazuki ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

Author keywords

Electric discharge; Ion recombination; Monte Carlo method; Plasma simulation

Indexed keywords

EID: 0032366853     PISSN: 00319015     EISSN: None     Source Type: Journal    
DOI: 10.1143/JPSJ.67.1288     Document Type: Article

References (6)

1. M. A. Lieberman and A. J. Lichtenberg: Principles of Plasma Discharges and Materials Processing (John Wiley & Sons, New York, 1994) p. 238.
2. D. P. Lymberopoulos and D. J. Economou: J. Vac. Sci. Technol. A 12 (1994) 1229.
3. H. R. Skullerud: J. Phys. D 1 (1968) 1567.
4. K. Koura: Phys. Fluids 29 (1986) 3509.
5. K. Nanbu: Rep. Inst. Fluid Science, Tohoku Univ., 8 (1996) 77.
6. A. Erdélyi: Tables of Integral Transforms (McGraw-Hill, New York, 1954) Vol. 1, p. 165.