Numerical modeling of electron beams accelerated by the radio frequency boundary sheath

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 1404-1405

  Heil, Brian G ^a   Schulze, Julian ^a   Mussenbrock, Thomas ^a   Brinkmann, Ralf Peter ^a   Czarnetzki, Uwe ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Electron beams; Plasma devices; Plasma heating; Plasma sheaths; Plasmas

Indexed keywords

ATOMS; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC FIELDS; ELECTRON BEAMS; ELECTRON GUNS; ELECTRON OPTICS; HEATING; INDUCTIVELY COUPLED PLASMA; MONTE CARLO METHODS; PARTICLE BEAMS; PLASMAS; RADIO WAVES;

CAPACITIVELY COUPLED PLASMAS; ELECTRON DISTRIBUTION FUNCTIONS; ELECTRON HEATING; ENERGETIC ELECTRONS; FLUID MODELING; MONTE CARLO SIMULATION; NUMERICAL MODELLING; PLASMA DEVICES; PLASMA HEATING; PLASMA SCIENCE; PLASMA SHEATHS; RADIO FREQUENCIES; STOCHASTIC HEATING;

ELECTRONS;

EID: 50249112184     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2004.924575     Document Type: Article

References (3)

1. R. P. Brinkmann, "Beyond the step model: Approximate expressions for the field in the plasma boundary sheath," J. Appl. Phys., vol. 102, no. 9, p. 093 303, Nov. 2007.
2. M. Kratzer, R. P. Brinkmann, W. Sabisch, and H. Schmidt, "Hybrid model for the calculation of ion distribution functions behind a direct current or radio frequency driven plasma boundary sheath," J. Appl. Phys., vol. 90, no. 5, pp. 2169-2179, 2001.
3. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, "Measurements of electron energy distribution in low-pressure RF discharges," Plasma Sources Sci. Technol., vol. 1, no. 1, pp. 36-58, Jan. 1992.