Modeling of capacitively coupled RF plasmas in H2

Plasma Processes and Polymers

Volumn 6, Issue 5, 2009, Pages 370-379

  Longo, Savino ^a   Diomede, Paola ^a  

^a UNIVERSITY OF BARI   (Italy)

Author keywords

Computer modeling; Discharges in hydrogen; Electron energy distribution function (EEDF); Ion energy distribution function (IEDF); Radio frequency glow discharges (RFGD)

Indexed keywords

CAPACITIVELY COUPLED; COMPUTER MODELING; DISCHARGES IN HYDROGEN; DOUBLE FREQUENCY; ELECTRON-ENERGY DISTRIBUTION FUNCTION (EEDF); EXCITED MOLECULES; ION HEATING; ION REACTIONS; KINETIC MODELS; MAIN COMPONENT; NEW RESULTS; NON EQUILIBRIUM; OPEN PROBLEMS; PARALLEL PLATES; PLASMA PROCESSING; RADIO FREQUENCY DISCHARGES; RADIO FREQUENCY GLOW DISCHARGES (RFGD); RF PLASMA; STATE OF THE ART; SURFACE-CATALYTIC REACTION;

CATALYSIS; COMPUTER SIMULATION; DISTRIBUTION FUNCTIONS; ELECTRIC POWER DISTRIBUTION; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; GLOW DISCHARGES; HYDROGEN; ION BEAMS; IONS; PLASMAS; RADIO WAVES; SURFACE REACTIONS;

RADIO;

EID: 67749135776     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200800219     Document Type: Article

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