Two-dimensional modelling of CF4 rf plasmas: Periodic steady state, transient response after step change of power source voltage, and comparison with one-dimensional modelling

Journal of Physics D: Applied Physics

Volumn 35, Issue 22, 2002, Pages 2978-2987

  So, Soon Youl ^a   Oda, Akinori ^b   Sugawara, Hirotake ^a   Sakai, Yosuke ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTRODES; FLUOROCARBONS; HARMONIC GENERATION; PLASMA SOURCES; TRANSIENTS;

CARBON TETRAFLUORIDE; POWER SOURCE VOLTAGE; RADIO FREQUENCY PLASMAS; TRANSIENT RESPONSE;

PLASMAS;

EID: 0037153391     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/35/22/312     Document Type: Article

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