Doped Diamond Electron Devices

CVD Diamond for Electronic Devices and Sensors

Volumn , Issue , 2009, Pages 313-377

  Kohn, E ^a   Denisenko, A ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Boron doped diamond (BDD) and boron doped nanocrystalline diamond (NCD); Carrier concentration measured in boron doped homoepitaxial diamond layers; Delta doping concept and technology; Doped diamond electron devices; Electrodes and ion sensitive FETS; Extrinsic dopant full activation in diamond; High performance field effect transistors; Microwave plasma assisted CVD (MPCVD); Schottky diode structures in mesa configuration on single crystal substrate

Indexed keywords

EID: 84948781010     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9780470740392.ch14     Document Type: Chapter

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