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Journal of Applied Physics

Volumn 80, Issue 3, 1996, Pages 1846-1850

Internal stress and strain in heavily boron-doped diamond films grown by microwave plasma and hot filament chemical vapor deposition

(5) Wang, W L a,b Polo, M C a Sanchez G a Cifre, J a Esteve, J a

a UNIVERSITY OF BARCELONA (Spain)

b LANZHOU UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005839109 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.362996 Document Type: Article

Times cited : (75)

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