Selectively grown ohmic contacts to δ-doped diamond films

Electronics Letters

Volumn 32, Issue 15, 1996, Pages 1419-1421

  Vescan, A ^a   Gluche, P ^a   Ebert, W ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Diamond; Ohmic contacts

Indexed keywords

ACTIVATION ENERGY; CARRIER CONCENTRATION; CHARGE CARRIERS; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ELECTRIC RESISTANCE; EPITAXIAL GROWTH; FILM GROWTH; MATHEMATICAL MODELS; SEMICONDUCTING DIAMONDS; SEMICONDUCTING SILICON; TRANSMISSION LINE THEORY;

CARRIER SHEET CONCENTRATION; SPECIFIC CONTACT RESISTANCE;

OHMIC CONTACTS;

EID: 0030192787     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19960927     Document Type: Article

References (5)

1. SHIOMI, H., NISHIBAYASHI, Y., TODA, N., and SHIKATA, S.: 'Pulse-doped diamond p-channel metal semiconductor field-effect-transistor', IEEE Electron Device Lett., 1995, 16, (1), pp. 36-38
2. KOBAYASHI, T., ARIKI, T., IWABUCHI, M., MAKI, T., SHIKANA, S., and SUZUKI, S.: 'Analytical studies on multiple delta doping in diamond thin films for efficient hole excitation and conductivity enhancement', J. Appl. Phys., 1994, 73, (3), pp. 1977-1979
3. GLUCHE, P., VESCAN, A., EBERT, W., PITTER, M., and KOHN, E.: 'Processing of high temperature stable contacts to single crystal diamond'. TMS, Proc. Mat. Transient Thermal, Anaheim, CA, 3-8 February 1996
4. WERNER, M., DORSCH, O., BAERWIND, H.U., OBERMEIER, E., JOHNSTON, C., CHALKER, P.R., and ROMANI, S.: 'The effect of metallization on the ohmic contact resistivity to heavily B-doped polycrystalline diamond films', IEEE Trans. Electron. Devices, 1995, 42, (7), pp. 1344-1351
5. HEWETT, C.A., and ZEIDLER, J.R.: 'Ohmic contacts to epitaxial and natural diamond', Diamond Rel. Mat., 1993, 2, pp. 1319-1321