Electrical characterisation of diamond resistors etched by RIE

Diamond and Related Materials

Volumn 5, Issue 6-8, 1996, Pages 747-751

  Vescan, A ^a   Ebert, W ^a   Borst, T H ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Conductivity profiling; Diamond resistors; Pulse doping; RIE of diamond

Indexed keywords

EID: 0001325533     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00500-5     Document Type: Article

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