-
1
-
-
84882862559
-
-
J. Priestley, Experiments in which rings, consisting of all the prismatic colours, were made by electrical explosions on the surface of metals, in: The History and Present State of Electricity, Vol. II, London (1775) 329-335.
-
J. Priestley, Experiments in which rings, consisting of all the prismatic colours, were made by electrical explosions on the surface of metals, in: The History and Present State of Electricity, Vol. II, London (1775) 329-335.
-
-
-
-
2
-
-
84882873640
-
-
J. Priestley, The History and Present State of Electricity, 3rd ed, London (1775).
-
J. Priestley, The History and Present State of Electricity, 3rd ed, London (1775).
-
-
-
-
5
-
-
84964193347
-
Cathode mode transition in high-pressure discharge lamps at start-up
-
Anders A., Jüttner B. Cathode mode transition in high-pressure discharge lamps at start-up. Lighting Res. Technol. (GB) 1990, 22:111-115.
-
(1990)
Lighting Res. Technol. (GB)
, vol.22
, pp. 111-115
-
-
Anders, A.1
Jüttner, B.2
-
6
-
-
0000016996
-
The anodic vacuum arc and its application to coatings
-
Ehrich H., Hasse B., Mausbach M., Müller K.G. The anodic vacuum arc and its application to coatings. J. Vac. Sci. Technol. A 1990, 8:2160-2164.
-
(1990)
J. Vac. Sci. Technol. A
, vol.8
, pp. 2160-2164
-
-
Ehrich, H.1
Hasse, B.2
Mausbach, M.3
Müller, K.G.4
-
7
-
-
0006926083
-
Radially expanding plasma parameters in a hot refractory anode vacuum arc
-
Beilis I.I., Boxman R.L., Goldsmith S., Paperny V.L. Radially expanding plasma parameters in a hot refractory anode vacuum arc. J. Appl. Phys. 2000, 88:6224-6231.
-
(2000)
J. Appl. Phys.
, vol.88
, pp. 6224-6231
-
-
Beilis, I.I.1
Boxman, R.L.2
Goldsmith, S.3
Paperny, V.L.4
-
8
-
-
0000928931
-
Electron emission in intense electric fields
-
Fowler R.H., Nordheim L. Electron emission in intense electric fields. Proc. R. Soc. (London) 1928, A119:173-181.
-
(1928)
Proc. R. Soc. (London)
, vol.A119
, pp. 173-181
-
-
Fowler, R.H.1
Nordheim, L.2
-
9
-
-
84985773412
-
The thermo-field emission of electrons in arc discharges
-
Hantzsche E. The thermo-field emission of electrons in arc discharges. Beitr. Plasmaphys. 1982, 22:325-346.
-
(1982)
Beitr. Plasmaphys.
, vol.22
, pp. 325-346
-
-
Hantzsche, E.1
-
11
-
-
36149027910
-
Temperature and field emission of electrons from metals
-
Dolan W.W., Dyke W.P. Temperature and field emission of electrons from metals. Phys. Rev. 1954, 35:327.
-
(1954)
Phys. Rev.
, vol.35
, pp. 327
-
-
Dolan, W.W.1
Dyke, W.P.2
-
12
-
-
36149019114
-
Thermionic emission, field emission, and the transition region
-
Murphy E.L., Good R.H. Thermionic emission, field emission, and the transition region. Phys. Rev. 1956, 102:1446.
-
(1956)
Phys. Rev.
, vol.102
, pp. 1446
-
-
Murphy, E.L.1
Good, R.H.2
-
14
-
-
84939710940
-
Explosive emission of electrons
-
Bugaev S.P., Litvinov E.A., Mesyats G.A., Proskurovskii D.I. Explosive emission of electrons. Sov. Phys. Usp. 1975, 18:51-61.
-
(1975)
Sov. Phys. Usp.
, vol.18
, pp. 51-61
-
-
Bugaev, S.P.1
Litvinov, E.A.2
Mesyats, G.A.3
Proskurovskii, D.I.4
-
15
-
-
84927359943
-
Field emission and explosive emission processes in vacuum discharges
-
Litvinov E.A., Mesyats G.A., Proskurovskii D.I. Field emission and explosive emission processes in vacuum discharges. Sov. Phys. Usp. 1983, 26:138.
-
(1983)
Sov. Phys. Usp.
, vol.26
, pp. 138
-
-
Litvinov, E.A.1
Mesyats, G.A.2
Proskurovskii, D.I.3
-
18
-
-
34250797963
-
The origin of current chopping in vacuum arcs
-
Smeets R.P.P. The origin of current chopping in vacuum arcs. IEEE Trans. Plasma Sci. 1989, 17:303-310.
-
(1989)
IEEE Trans. Plasma Sci.
, vol.17
, pp. 303-310
-
-
Smeets, R.P.P.1
-
19
-
-
0034239954
-
Chopping effect observed at cathodic arc initiation
-
Anders A. Chopping effect observed at cathodic arc initiation. IEEE Trans. Plasma Sci. 2000, 28:1303-1304.
-
(2000)
IEEE Trans. Plasma Sci.
, vol.28
, pp. 1303-1304
-
-
Anders, A.1
-
22
-
-
0022795731
-
Solidification of hot craters on the cathode of vacuum arcs
-
Prock J. Solidification of hot craters on the cathode of vacuum arcs. J. Phys. D: Appl. Phys. 1986, 19:1917-1924.
-
(1986)
J. Phys. D: Appl. Phys.
, vol.19
, pp. 1917-1924
-
-
Prock, J.1
-
23
-
-
0000053245
-
Pressure ionization: its role in metal vapor vacuum arc plasmas and ion sources
-
Anders A., Anders S., Förster A., Brown I.G. Pressure ionization: its role in metal vapor vacuum arc plasmas and ion sources. Plasma Sources Sci. Technol. 1992, 1:263-270.
-
(1992)
Plasma Sources Sci. Technol.
, vol.1
, pp. 263-270
-
-
Anders, A.1
Anders, S.2
Förster, A.3
Brown, I.G.4
-
24
-
-
0020497004
-
Random walk of cathode arc spots in vacuum
-
Daalder J.E. Random walk of cathode arc spots in vacuum. J. Phys. D: Appl. Phys. 1983, 16:17-27.
-
(1983)
J. Phys. D: Appl. Phys.
, vol.16
, pp. 17-27
-
-
Daalder, J.E.1
-
26
-
-
0002065024
-
Cathode spots
-
Noyes, Park Ridge, New Jersey, R.L. Boxman, D.M. Sanders, P.J. Martin (Eds.)
-
Jüttner B., Puchkarev V.F., Hantzsche E., Beilis I. Cathode spots. Handbook of Vacuum Arc Science and Technology 1995, 73-281. Noyes, Park Ridge, New Jersey. R.L. Boxman, D.M. Sanders, P.J. Martin (Eds.).
-
(1995)
Handbook of Vacuum Arc Science and Technology
, pp. 73-281
-
-
Jüttner, B.1
Puchkarev, V.F.2
Hantzsche, E.3
Beilis, I.4
-
27
-
-
0030821075
-
The dynamics of arc cathode spots in vacuum: new measurements
-
Jüttner B. The dynamics of arc cathode spots in vacuum: new measurements. J. Phys. D: Appl. Phys. 1997, 30:221-229.
-
(1997)
J. Phys. D: Appl. Phys.
, vol.30
, pp. 221-229
-
-
Jüttner, B.1
-
28
-
-
0021375419
-
The influence of surface roughness and surface temperature on arc spot movement in vacuum
-
Jüttner B., Pursch H., Shilov V.A. The influence of surface roughness and surface temperature on arc spot movement in vacuum. J. Phys. D: Appl. Phys. 1984, 17:L31-L34.
-
(1984)
J. Phys. D: Appl. Phys.
, vol.17
-
-
Jüttner, B.1
Pursch, H.2
Shilov, V.A.3
-
29
-
-
0031556919
-
Structure and dynamics of high-current arc cathode spots in vacuum
-
Beilis I., Djakov B.E., Jüttner B., Pursch H. Structure and dynamics of high-current arc cathode spots in vacuum. J. Phys. D: Appl. Phys 1997, 30:119-130.
-
(1997)
J. Phys. D: Appl. Phys
, vol.30
, pp. 119-130
-
-
Beilis, I.1
Djakov, B.E.2
Jüttner, B.3
Pursch, H.4
-
30
-
-
4244158852
-
The retrograde motion of arc cathode spots in vacuum
-
Jüttner B., Kleberg I. The retrograde motion of arc cathode spots in vacuum. J. Phys. D: Appl. Phys. 2000, 33:2025-2036.
-
(2000)
J. Phys. D: Appl. Phys.
, vol.33
, pp. 2025-2036
-
-
Jüttner, B.1
Kleberg, I.2
-
31
-
-
27644478381
-
The fractal nature of cathode spots
-
Anders A. The fractal nature of cathode spots. IEEE Trans. Plasma Sci. 2005, 33:1456-1464.
-
(2005)
IEEE Trans. Plasma Sci.
, vol.33
, pp. 1456-1464
-
-
Anders, A.1
-
34
-
-
3843130642
-
Influence of steering magnetic field on the time-resolved plasma chemistry in cathodic arc discharges
-
Ehiasarian A.P., Hovsepian P.E., New R., Valter J. Influence of steering magnetic field on the time-resolved plasma chemistry in cathodic arc discharges. J. Phys. D: Appl. Phys. 2004, 37:2101-2106.
-
(2004)
J. Phys. D: Appl. Phys.
, vol.37
, pp. 2101-2106
-
-
Ehiasarian, A.P.1
Hovsepian, P.E.2
New, R.3
Valter, J.4
-
35
-
-
27644554319
-
Experimental study of cathode spot motion and burning voltage of low-current vacuum arc in magnetic field
-
Zabello K.K., Barinov Y.A., Chaly A.M., Logatchev A.A., Shkol'nik S.M. Experimental study of cathode spot motion and burning voltage of low-current vacuum arc in magnetic field. IEEE Trans. Plasma Sci. 2005, 33:1553-1559.
-
(2005)
IEEE Trans. Plasma Sci.
, vol.33
, pp. 1553-1559
-
-
Zabello, K.K.1
Barinov, Y.A.2
Chaly, A.M.3
Logatchev, A.A.4
Shkol'nik, S.M.5
-
36
-
-
0020809950
-
Temperature dependence of retrograde velocity of vacuum arcs in magnetic fields
-
Fang D.Y. Temperature dependence of retrograde velocity of vacuum arcs in magnetic fields. IEEE Trans. Plasma Sci. 1983, 11:110-114.
-
(1983)
IEEE Trans. Plasma Sci.
, vol.11
, pp. 110-114
-
-
Fang, D.Y.1
-
37
-
-
33749941034
-
Origin of retrograde motion of arc cathode spots
-
Robson A.E., von Engel A. Origin of retrograde motion of arc cathode spots. Phys. Rev. 1954, 93:1121-1122.
-
(1954)
Phys. Rev.
, vol.93
, pp. 1121-1122
-
-
Robson, A.E.1
von Engel, A.2
-
40
-
-
0023964809
-
Fluctuations of charged particle and light emission in vacuum arcs
-
Smeets R.P.P., Schulpen F.J.H. Fluctuations of charged particle and light emission in vacuum arcs. J. Phys. D: Appl. Phys. 1988, 21:301-310.
-
(1988)
J. Phys. D: Appl. Phys.
, vol.21
, pp. 301-310
-
-
Smeets, R.P.P.1
Schulpen, F.J.H.2
-
41
-
-
20844456566
-
Cathodic arcs: fractal voltage and cohesive energy rule
-
211503-1-3
-
Anders A., Oks E.M.Yu., Yushkov G. Cathodic arcs: fractal voltage and cohesive energy rule. Appl. Phys. Lett. 2005, 86. 211503-1-3.
-
(2005)
Appl. Phys. Lett.
, vol.86
-
-
Anders, A.1
Oks, E.2
Yushkov, G.3
-
42
-
-
0026243248
-
Influence of residual gases on cathode spot behavior
-
Anders S., Jüttner B. Influence of residual gases on cathode spot behavior. IEEE Trans. Plasma Sci. 1991, 19:705-712.
-
(1991)
IEEE Trans. Plasma Sci.
, vol.19
, pp. 705-712
-
-
Anders, S.1
Jüttner, B.2
-
43
-
-
0030087253
-
Vacuum arcs cathode spots as a self-similarity phenomenon
-
Schülke T., Siemroth P. Vacuum arcs cathode spots as a self-similarity phenomenon. IEEE Trans. Plasma Sci. 1996, 24:63-64.
-
(1996)
IEEE Trans. Plasma Sci.
, vol.24
, pp. 63-64
-
-
Schülke, T.1
Siemroth, P.2
-
44
-
-
0031206795
-
Investigations of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectrography
-
Siemroth P., Schülke T., Witke T. Investigations of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectrography. IEEE Trans. Plasma Sci. 1997, 25:571-579.
-
(1997)
IEEE Trans. Plasma Sci.
, vol.25
, pp. 571-579
-
-
Siemroth, P.1
Schülke, T.2
Witke, T.3
-
45
-
-
0242386600
-
Mysteries of the arc cathode spot: a retrospective glance
-
Hantzsche E. Mysteries of the arc cathode spot: a retrospective glance. IEEE Trans. Plasma Sci. 2003, 31:799-808.
-
(2003)
IEEE Trans. Plasma Sci.
, vol.31
, pp. 799-808
-
-
Hantzsche, E.1
-
46
-
-
79956007705
-
Angularly resolved measurements of the ion energy of vacuum arc plasmas
-
Anders A., Yushkov G.Y. Angularly resolved measurements of the ion energy of vacuum arc plasmas. Appl. Phys. Lett. 2002, 80:2457-2459.
-
(2002)
Appl. Phys. Lett.
, vol.80
, pp. 2457-2459
-
-
Anders, A.1
Yushkov, G.Y.2
-
47
-
-
0024753323
-
In flux from the cathode region of a vacuum arc
-
Kutzner J., Miller H.C. In flux from the cathode region of a vacuum arc. IEEE Trans. Plasma Sci. 1989, 17:688-694.
-
(1989)
IEEE Trans. Plasma Sci.
, vol.17
, pp. 688-694
-
-
Kutzner, J.1
Miller, H.C.2
-
48
-
-
0021507864
-
Time-resolved measurements of the parameters of arc cathode plasmas in vacuum
-
Ivanov V.A., Jüttner B., Pursch H. Time-resolved measurements of the parameters of arc cathode plasmas in vacuum. IEEE Trans. Plasma Sci. 1985, 13:334-336.
-
(1985)
IEEE Trans. Plasma Sci.
, vol.13
, pp. 334-336
-
-
Ivanov, V.A.1
Jüttner, B.2
Pursch, H.3
-
49
-
-
0016331536
-
Cathode spot erosion and ionization phenomena in the transition region from vacuum to atmospheric pressure arcs
-
Kimblin C.W. Cathode spot erosion and ionization phenomena in the transition region from vacuum to atmospheric pressure arcs. J. Appl. Phys. 1974, 45:5235-5244.
-
(1974)
J. Appl. Phys.
, vol.45
, pp. 5235-5244
-
-
Kimblin, C.W.1
-
50
-
-
0017022377
-
Components of cathode erosion in vacuum arcs
-
Daalder J.E. Components of cathode erosion in vacuum arcs. J. Phys. D: Appl. Phys. 1976, 9:2379-2395.
-
(1976)
J. Phys. D: Appl. Phys.
, vol.9
, pp. 2379-2395
-
-
Daalder, J.E.1
-
51
-
-
0037091861
-
Ion flux from vacuum arc cathode spots in the absence and presence of magnetic fields
-
Anders A., Yushkov G.Y. Ion flux from vacuum arc cathode spots in the absence and presence of magnetic fields. J. Appl. Phys. 2002, 91:4824-4832.
-
(2002)
J. Appl. Phys.
, vol.91
, pp. 4824-4832
-
-
Anders, A.1
Yushkov, G.Y.2
-
52
-
-
33750033188
-
Determination of the specific ion erosion of the vacuum arc cathode by measuring the total ion current from the discharge plasma
-
Anders A., Oks E.M., Yushkov G.Y., Savkin K.P., Brown Y., Nikolaev A.G. Determination of the specific ion erosion of the vacuum arc cathode by measuring the total ion current from the discharge plasma. Tech. Phys. 2006, 51:1311-1315.
-
(2006)
Tech. Phys.
, vol.51
, pp. 1311-1315
-
-
Anders, A.1
Oks, E.M.2
Yushkov, G.Y.3
Savkin, K.P.4
Brown, Y.5
Nikolaev, A.G.6
-
54
-
-
36849100211
-
Analysis of the electrode products emitted by dc arcs in a vacuum ambient
-
Davis W.D., Miller H.C. Analysis of the electrode products emitted by dc arcs in a vacuum ambient. J. Appl. Phys. 1969, 40:2212-2221.
-
(1969)
J. Appl. Phys.
, vol.40
, pp. 2212-2221
-
-
Davis, W.D.1
Miller, H.C.2
-
56
-
-
0000944571
-
Multiply stripped ion generation in the metal vapor vacuum arc
-
Brown I.G., Feinberg B., Galvin J.E. Multiply stripped ion generation in the metal vapor vacuum arc. J. Appl. Phys. 1988, 63:4889-4898.
-
(1988)
J. Appl. Phys.
, vol.63
, pp. 4889-4898
-
-
Brown, I.G.1
Feinberg, B.2
Galvin, J.E.3
-
57
-
-
0026241787
-
Vacuum arc ion charge-state distributions
-
Brown I.G., Godechot X. Vacuum arc ion charge-state distributions. IEEE Trans. Plasma Sci. 1991, 19:713-717.
-
(1991)
IEEE Trans. Plasma Sci.
, vol.19
, pp. 713-717
-
-
Brown, I.G.1
Godechot, X.2
-
58
-
-
0027609383
-
Time dependence of vacuum arc parameters
-
Anders A., Anders S., Jüttner B., Brown I.G. Time dependence of vacuum arc parameters. IEEE Trans. Plasma Sci. 1993, PS-21:305-311.
-
(1993)
IEEE Trans. Plasma Sci.
, vol.PS-21
, pp. 305-311
-
-
Anders, A.1
Anders, S.2
Jüttner, B.3
Brown, I.G.4
-
59
-
-
36449001746
-
Elevated ion charge states in vacuum arc plasmas in a magnetic field
-
Oks E., Brown I.G., Dickinson M.R., MacGill R.A., Spädtke P., Emig H., Wolf B.H. Elevated ion charge states in vacuum arc plasmas in a magnetic field. Appl. Phys. Lett. 1995, 67:200-202.
-
(1995)
Appl. Phys. Lett.
, vol.67
, pp. 200-202
-
-
Oks, E.1
Brown, I.G.2
Dickinson, M.R.3
MacGill, R.A.4
Spädtke, P.5
Emig, H.6
Wolf, B.H.7
-
60
-
-
0001137814
-
Some observations of the effect of magnetic field and arc current on the vacuum arc charge state distribution
-
Paoloni F.J., Brown I.G. Some observations of the effect of magnetic field and arc current on the vacuum arc charge state distribution. Rev. Sci. Instrum. 1995, 66:3855-3858.
-
(1995)
Rev. Sci. Instrum.
, vol.66
, pp. 3855-3858
-
-
Paoloni, F.J.1
Brown, I.G.2
-
61
-
-
36449000220
-
Vacuum arc ion sources
-
Brown I.G. Vacuum arc ion sources. Rev. Sci. Instrum. 1994, 65:3061-3081.
-
(1994)
Rev. Sci. Instrum.
, vol.65
, pp. 3061-3081
-
-
Brown, I.G.1
-
64
-
-
5244279078
-
Very broad vacuum arc ion and plasma sources with extended large area cathodes
-
Ryabchikov A.I., Stepanov I.B., Dektjarev S.V., Lukonin E.I., Shulepov I.A. Very broad vacuum arc ion and plasma sources with extended large area cathodes. Rev. Sci. Instrum. 2000, 71:704-706.
-
(2000)
Rev. Sci. Instrum.
, vol.71
, pp. 704-706
-
-
Ryabchikov, A.I.1
Stepanov, I.B.2
Dektjarev, S.V.3
Lukonin, E.I.4
Shulepov, I.A.5
-
65
-
-
0035875498
-
Correlation between cathode properties, burning voltage, and plasma parameters of vacuum arcs
-
Anders A., Yotsombat B., Binder R. Correlation between cathode properties, burning voltage, and plasma parameters of vacuum arcs. J. Appl. Phys. 2001, 89:7764-7771.
-
(2001)
J. Appl. Phys.
, vol.89
, pp. 7764-7771
-
-
Anders, A.1
Yotsombat, B.2
Binder, R.3
-
67
-
-
0001720167
-
Ion charge state distributions of vacuum arc plasmas: The origin of species
-
Anders A. Ion charge state distributions of vacuum arc plasmas: The origin of species. Phys. Rev. E 1997, 55:969-981.
-
(1997)
Phys. Rev. E
, vol.55
, pp. 969-981
-
-
Anders, A.1
-
68
-
-
0000929271
-
Ion charge state distributions of pulsed vacuum arc plasmas in strong magnetic fields
-
Anders A., Yushkov G., Oks E., Nikolaev A., Brown I. Ion charge state distributions of pulsed vacuum arc plasmas in strong magnetic fields. Rev. Sci. Instrum. 1998, 69:1332-1335.
-
(1998)
Rev. Sci. Instrum.
, vol.69
, pp. 1332-1335
-
-
Anders, A.1
Yushkov, G.2
Oks, E.3
Nikolaev, A.4
Brown, I.5
-
69
-
-
0041670914
-
On the mechanism of the external magnetic field action on the electron temperature and ion charge state distribution in a vacuum arc plasma
-
Krinberg I.A. On the mechanism of the external magnetic field action on the electron temperature and ion charge state distribution in a vacuum arc plasma. Techn. Phys. Lett. 2003, 29:504-506.
-
(2003)
Techn. Phys. Lett.
, vol.29
, pp. 504-506
-
-
Krinberg, I.A.1
-
70
-
-
0030167468
-
Ion charge state distributions in high current vacuum arc plasma in a magnetic field
-
Oks E.M., Anders A., Brown I.G., Dickinson M.R., MacGill R.A. Ion charge state distributions in high current vacuum arc plasma in a magnetic field. IEEE Trans. Plasma Sci. 1996, 24:1174-1183.
-
(1996)
IEEE Trans. Plasma Sci.
, vol.24
, pp. 1174-1183
-
-
Oks, E.M.1
Anders, A.2
Brown, I.G.3
Dickinson, M.R.4
MacGill, R.A.5
-
71
-
-
0035530796
-
The ion charge-current strength relationship in stationary and pulsed vacuum discharges
-
Krinberg I.A. The ion charge-current strength relationship in stationary and pulsed vacuum discharges. Tech. Phys. Lett. 2001, 27:45-48.
-
(2001)
Tech. Phys. Lett.
, vol.27
, pp. 45-48
-
-
Krinberg, I.A.1
-
72
-
-
0020244853
-
A review of arcing phenomena in vacuum and in the transition to atmospheric pressure arcs
-
Kimblin C.W. A review of arcing phenomena in vacuum and in the transition to atmospheric pressure arcs. IEEE Trans. Plasma Sci. 1971, 10:322-330.
-
(1971)
IEEE Trans. Plasma Sci.
, vol.10
, pp. 322-330
-
-
Kimblin, C.W.1
-
73
-
-
0001339524
-
Ionization mechanism for nitrogen in a vacuum arc discharge
-
Demidenko I.I., Lomino N.S., Ovcharenko V.D., Padalka V.G., Polyakova G.N. Ionization mechanism for nitrogen in a vacuum arc discharge. Sov. Phys Tech. Phys. 1984, 29:895-897.
-
(1984)
Sov. Phys Tech. Phys.
, vol.29
, pp. 895-897
-
-
Demidenko, I.I.1
Lomino, N.S.2
Ovcharenko, V.D.3
Padalka, V.G.4
Polyakova, G.N.5
-
74
-
-
0023439496
-
Characteristics of titanium arc evaporation processes
-
Martin P.J., McKenzie D.R., Netterfield R.P., Swift P., Filipczuk S.W., Müller K.-H., et al. Characteristics of titanium arc evaporation processes. Thin Solid Films 1987, 153:91-102.
-
(1987)
Thin Solid Films
, vol.153
, pp. 91-102
-
-
Martin, P.J.1
McKenzie, D.R.2
Netterfield, R.P.3
Swift, P.4
Filipczuk, S.W.5
Müller, K.-H.6
-
75
-
-
0028727777
-
Excitation, ionization, and reaction mechanism of a reactive cathodic arc deposition of TiN
-
Sakaki M., Sakakibara T. Excitation, ionization, and reaction mechanism of a reactive cathodic arc deposition of TiN. IEEE Trans. Plasma Sci. 1994, 22:1049-1054.
-
(1994)
IEEE Trans. Plasma Sci.
, vol.22
, pp. 1049-1054
-
-
Sakaki, M.1
Sakakibara, T.2
-
77
-
-
0001481239
-
Influence of gas pressure and cathode composition on ion energy distributions in filtered cathodic vacuum arcs
-
Bilek M.M.M., Martin P.J., McKenzie D.R. Influence of gas pressure and cathode composition on ion energy distributions in filtered cathodic vacuum arcs. J. Appl. Phys. 1998, 83:2965-2970.
-
(1998)
J. Appl. Phys.
, vol.83
, pp. 2965-2970
-
-
Bilek, M.M.M.1
Martin, P.J.2
McKenzie, D.R.3
-
78
-
-
0000992916
-
Temporal development of the plasma composition of a pulsed aluminum plasma stream in the presence of oxygen
-
Schneider J.M., Anders A., Brown I.G., Hjörvarsson B., Hultman L. Temporal development of the plasma composition of a pulsed aluminum plasma stream in the presence of oxygen. Appl. Phys. Lett. 1999, 75:612-614.
-
(1999)
Appl. Phys. Lett.
, vol.75
, pp. 612-614
-
-
Schneider, J.M.1
Anders, A.2
Brown, I.G.3
Hjörvarsson, B.4
Hultman, L.5
-
80
-
-
9744253013
-
Charge state and time resolved plasma composition of a pulsed zirconium arc in a nitrogen environment
-
Rosén J., Anders A., Hultman L., Schneider J.M. Charge state and time resolved plasma composition of a pulsed zirconium arc in a nitrogen environment. J. Appl. Phys. 2004, 96:4793-4799.
-
(2004)
J. Appl. Phys.
, vol.96
, pp. 4793-4799
-
-
Rosén, J.1
Anders, A.2
Hultman, L.3
Schneider, J.M.4
-
81
-
-
33745697575
-
Influence of argon and oxygen on charge-state-resolved ion energy distributions of filtered aluminum arc
-
123303-1-5
-
Rosén J., Anders A., Mráz S., Atiser A., Schneider J.M. Influence of argon and oxygen on charge-state-resolved ion energy distributions of filtered aluminum arc. J. Appl. Phys. 2006, 99. 123303-1-5.
-
(2006)
J. Appl. Phys.
, vol.99
-
-
Rosén, J.1
Anders, A.2
Mráz, S.3
Atiser, A.4
Schneider, J.M.5
-
82
-
-
0347712274
-
Atomic structure and the resonant charge exchange process
-
Smirnov B.M. Atomic structure and the resonant charge exchange process. Uspekhi Fizicheskikh Nauk. 2001, 171:233-266.
-
(2001)
Uspekhi Fizicheskikh Nauk.
, vol.171
, pp. 233-266
-
-
Smirnov, B.M.1
-
83
-
-
84915192534
-
Evaluated theoretical cross-section data for charge exchange of multiply charged ions with atoms. III. Nonhydrogenic target atoms
-
Janev R.K., Gallagher J.W. Evaluated theoretical cross-section data for charge exchange of multiply charged ions with atoms. III. Nonhydrogenic target atoms. J. Phys. Chem. Reference Data 1984, 13:1199-1249.
-
(1984)
J. Phys. Chem. Reference Data
, vol.13
, pp. 1199-1249
-
-
Janev, R.K.1
Gallagher, J.W.2
-
84
-
-
0026854247
-
Integrated ion flux emitted from the cathode spot region of a diffuse vacuum arc
-
Kutzner J., Miller H.C. Integrated ion flux emitted from the cathode spot region of a diffuse vacuum arc. J. Phys. D: Appl. Phys. 1992, 25:686-693.
-
(1992)
J. Phys. D: Appl. Phys.
, vol.25
, pp. 686-693
-
-
Kutzner, J.1
Miller, H.C.2
-
85
-
-
20944443971
-
Charge-state-resolved ion energy distributions of aluminum vacuum arcs in the absence and presence of a magnetic field
-
103306-1-6
-
Rosén J., Anders A., Mráz S., Schneider J.M. Charge-state-resolved ion energy distributions of aluminum vacuum arcs in the absence and presence of a magnetic field. J. Appl. Phys. 2005, 97. 103306-1-6.
-
(2005)
J. Appl. Phys.
, vol.97
-
-
Rosén, J.1
Anders, A.2
Mráz, S.3
Schneider, J.M.4
-
87
-
-
33749456329
-
Charge state dependence of cathodic vacuum arc ion energy and velocity distributions
-
141502-1-3
-
Rosén J., Schneider J.M., Anders A. Charge state dependence of cathodic vacuum arc ion energy and velocity distributions. Appl. Phys. Lett. 2006, 89. 141502-1-3.
-
(2006)
Appl. Phys. Lett.
, vol.89
-
-
Rosén, J.1
Schneider, J.M.2
Anders, A.3
-
88
-
-
0031208999
-
Velocities of copper and silver ions generated from an impulse vacuum arc
-
Tsuruta K., Skiya K., Watanabe G. Velocities of copper and silver ions generated from an impulse vacuum arc. IEEE Trans. Plasma Sci. 1997, 25:603-608.
-
(1997)
IEEE Trans. Plasma Sci.
, vol.25
, pp. 603-608
-
-
Tsuruta, K.1
Skiya, K.2
Watanabe, G.3
-
89
-
-
0033355574
-
Influence of a current jump on vacuum arc parameters
-
Bugaev A.S., Gushenets V.I., Nikolaev A.G., Oks E.M., Yushkov G.Y. Influence of a current jump on vacuum arc parameters. IEEE Trans. Plasma Sci. 1999, 27:882-887.
-
(1999)
IEEE Trans. Plasma Sci.
, vol.27
, pp. 882-887
-
-
Bugaev, A.S.1
Gushenets, V.I.2
Nikolaev, A.G.3
Oks, E.M.4
Yushkov, G.Y.5
-
90
-
-
0000189546
-
Enhanced ion charge states in vacuum arc plasmas using a 'current spike' method
-
Bugaev A.S., Oks E.M., Yushkov G.Y., Anders A., Brown I.G. Enhanced ion charge states in vacuum arc plasmas using a 'current spike' method. Rev. Sci. Instrum. 2000, 71:701-703.
-
(2000)
Rev. Sci. Instrum.
, vol.71
, pp. 701-703
-
-
Bugaev, A.S.1
Oks, E.M.2
Yushkov, G.Y.3
Anders, A.4
Brown, I.G.5
-
91
-
-
0001621931
-
Ion velocities in vacuum arc plasmas
-
Yushkov G.Y., Anders A., Oks E.M., Brown I.G. Ion velocities in vacuum arc plasmas. J. Appl. Phys. 2000, 88:5618-5622.
-
(2000)
J. Appl. Phys.
, vol.88
, pp. 5618-5622
-
-
Yushkov, G.Y.1
Anders, A.2
Oks, E.M.3
Brown, I.G.4
-
92
-
-
33847662421
-
Charge-state-resolved ion energy distribution functions of cathodic vacuum arcs: A study involving the plasma potential and biased plasmas
-
043304-1-6
-
Anders A., Oks E. Charge-state-resolved ion energy distribution functions of cathodic vacuum arcs: A study involving the plasma potential and biased plasmas. J. Appl. Phys. 2007, 101. 043304-1-6.
-
(2007)
J. Appl. Phys.
, vol.101
-
-
Anders, A.1
Oks, E.2
-
93
-
-
0037443006
-
Ion energy distribution functions of vacuum arc plasmas
-
Byon E., Anders A. Ion energy distribution functions of vacuum arc plasmas. J. Appl. Phys. 2003, 93:1899-1906.
-
(2003)
J. Appl. Phys.
, vol.93
, pp. 1899-1906
-
-
Byon, E.1
Anders, A.2
-
95
-
-
84882889898
-
Kinetic of cathode jet at explosive emission of electrons
-
Nauka, Novosibirsk, (in Russian), G.A. Mesyats (Ed.)
-
Litvinov E.A. Kinetic of cathode jet at explosive emission of electrons. High Current Nanosecond Pulsed Sources of Accelerated Electrons 1974, Nauka, Novosibirsk, (in Russian). G.A. Mesyats (Ed.).
-
(1974)
High Current Nanosecond Pulsed Sources of Accelerated Electrons
-
-
Litvinov, E.A.1
-
96
-
-
0030288368
-
Application of a vacuum arc model to the determination of cathodic microjet parameters
-
Krinberg I.A., Lukovnikova M.P. Application of a vacuum arc model to the determination of cathodic microjet parameters. J. Phys. D: Appl. Phys. 1996, 29:2901-2906.
-
(1996)
J. Phys. D: Appl. Phys.
, vol.29
, pp. 2901-2906
-
-
Krinberg, I.A.1
Lukovnikova, M.P.2
-
97
-
-
0035533379
-
On a mechanism of ion acceleration in vacuum arc-discharge plasma
-
Yushkov G.Y., Bugaev A.S., Krinberg I.A., Oks E.M. On a mechanism of ion acceleration in vacuum arc-discharge plasma. Doklady Phys. 2001, 46:307-309.
-
(2001)
Doklady Phys.
, vol.46
, pp. 307-309
-
-
Yushkov, G.Y.1
Bugaev, A.S.2
Krinberg, I.A.3
Oks, E.M.4
-
98
-
-
0035541594
-
Acceleration of multicomponent plasma in the cathode region of vacuum arc
-
Krinberg I.A. Acceleration of multicomponent plasma in the cathode region of vacuum arc. Techn. Phys. 2001, 46:1371-1378.
-
(2001)
Techn. Phys.
, vol.46
, pp. 1371-1378
-
-
Krinberg, I.A.1
-
99
-
-
84882900214
-
-
L.P. Sablev, J.I. Dolotov, L.I. Getman, V.N. Gorbunov, E.G. Goldiner, K.T. Kirshfeld, V.V. Usov, Apparatus for vacuum evaporation of metals under the action of an electric arc, Patent US 3,783,231 (1974).
-
L.P. Sablev, J.I. Dolotov, L.I. Getman, V.N. Gorbunov, E.G. Goldiner, K.T. Kirshfeld, V.V. Usov, Apparatus for vacuum evaporation of metals under the action of an electric arc, Patent US 3,783,231 (1974).
-
-
-
-
100
-
-
84882831693
-
-
A.A. Snaper, Arc deposition process and apparatus, Patent US 3,836,451 (1974).
-
A.A. Snaper, Arc deposition process and apparatus, Patent US 3,836,451 (1974).
-
-
-
-
101
-
-
84882850960
-
-
A.A. Snaper, Arc deposition process and apparatus, Patent US 3,625,848 (1971).
-
A.A. Snaper, Arc deposition process and apparatus, Patent US 3,625,848 (1971).
-
-
-
-
102
-
-
84882906447
-
-
P. Hovsepian, Lichtbogen-Verdampfungsvorrichtung, Patent DE 4220588 (1994).
-
P. Hovsepian, Lichtbogen-Verdampfungsvorrichtung, Patent DE 4220588 (1994).
-
-
-
-
103
-
-
84882923189
-
-
L.P. Sablev, N.P. Atamansky, V.N. Gorbunov, J.I. Dolotov, V.N. Lutseenko, V.M. Lunev, V.V. Usov, Apparatus for metal evaporation coating, Patent US 3,793,179 (1974).
-
L.P. Sablev, N.P. Atamansky, V.N. Gorbunov, J.I. Dolotov, V.N. Lutseenko, V.M. Lunev, V.V. Usov, Apparatus for metal evaporation coating, Patent US 3,793,179 (1974).
-
-
-
-
104
-
-
33644618706
-
Motion of the cathode spot of a vacuum arc in an inhomogeneous magnetic field
-
Aksenov I.I., Andreev A.A. Motion of the cathode spot of a vacuum arc in an inhomogeneous magnetic field. Sov. Tech. Phys. Lett. 1977, 3:525-526.
-
(1977)
Sov. Tech. Phys. Lett.
, vol.3
, pp. 525-526
-
-
Aksenov, I.I.1
Andreev, A.A.2
-
105
-
-
0031551613
-
Cathodic arc sources and macroparticle filtering
-
Karpov D.A. Cathodic arc sources and macroparticle filtering. Surf. Coat. Technol. 1997, 96:22-33.
-
(1997)
Surf. Coat. Technol.
, vol.96
, pp. 22-33
-
-
Karpov, D.A.1
-
106
-
-
84882865573
-
-
G.E. Vergason, Electric arc vapor deposition device, Patent US 5,037,522 (1991).
-
G.E. Vergason, Electric arc vapor deposition device, Patent US 5,037,522 (1991).
-
-
-
-
108
-
-
84882921295
-
-
R.P. Welty, Apparatus and method for coating a substrate using vacuum arc evaporation, Patent US 5,269,898 (1993).
-
R.P. Welty, Apparatus and method for coating a substrate using vacuum arc evaporation, Patent US 5,269,898 (1993).
-
-
-
-
109
-
-
0028671119
-
High-current arc - a new source for high-rate deposition
-
Siemroth P., Schülke T., Witke T. High-current arc - a new source for high-rate deposition. Surf. Coat. Technol. 1994, 68:314-319.
-
(1994)
Surf. Coat. Technol.
, vol.68
, pp. 314-319
-
-
Siemroth, P.1
Schülke, T.2
Witke, T.3
-
110
-
-
0033350058
-
Deposition of droplet-free films by vacuum arc evaporation - results and applications
-
Witke T., Siemroth P. Deposition of droplet-free films by vacuum arc evaporation - results and applications. IEEE Trans. Plasma Sci. 1999, 27:1039-1044.
-
(1999)
IEEE Trans. Plasma Sci.
, vol.27
, pp. 1039-1044
-
-
Witke, T.1
Siemroth, P.2
-
111
-
-
0035386720
-
Influence of the pulsing of the current of a vacuum arc on rate and droplets
-
Büschel M., Grimm W. Influence of the pulsing of the current of a vacuum arc on rate and droplets. Surf. Coat. Technol. 2001, 142-144:665-668.
-
(2001)
Surf. Coat. Technol.
, vol.142-144
, pp. 665-668
-
-
Büschel, M.1
Grimm, W.2
-
112
-
-
0344946084
-
A high-current pulsed cathodic vacuum arc plasma source
-
Oates T.W.H., Pigott J., McKenzie D.R., Bilek M.M.M. A high-current pulsed cathodic vacuum arc plasma source. Rev. Sci. Instrum. 2003, 74:4750-4754.
-
(2003)
Rev. Sci. Instrum.
, vol.74
, pp. 4750-4754
-
-
Oates, T.W.H.1
Pigott, J.2
McKenzie, D.R.3
Bilek, M.M.M.4
-
113
-
-
0018986466
-
Cathode spots and vacuum arcs
-
Daalder J.E. Cathode spots and vacuum arcs. Physica C 1981, 104C:91-106.
-
(1981)
Physica C
, vol.104 C
, pp. 91-106
-
-
Daalder, J.E.1
-
115
-
-
0016441277
-
Study of electrode products emitted by vacuum arcs in form of molten metal particles
-
Utsumi T., English J.H. Study of electrode products emitted by vacuum arcs in form of molten metal particles. J. Appl. Phys. 1975, 46:126-131.
-
(1975)
J. Appl. Phys.
, vol.46
, pp. 126-131
-
-
Utsumi, T.1
English, J.H.2
-
116
-
-
0017994632
-
Erosion products from the cathode spot region of a copper vacuum arc
-
Tuma D.T., Chen C.L., Davis D.K. Erosion products from the cathode spot region of a copper vacuum arc. J. Appl. Phys. 1978, 49:3821-3831.
-
(1978)
J. Appl. Phys.
, vol.49
, pp. 3821-3831
-
-
Tuma, D.T.1
Chen, C.L.2
Davis, D.K.3
-
118
-
-
0022797477
-
Characteristics of macroparticle emission from a high-current-density multi-cathode spot vacuum arc
-
Disatnik G., Boxman R.L., Goldsmith S. Characteristics of macroparticle emission from a high-current-density multi-cathode spot vacuum arc. IEEE Trans. Plasma Sci. 1987, PS-15:520-523.
-
(1987)
IEEE Trans. Plasma Sci.
, vol.PS-15
, pp. 520-523
-
-
Disatnik, G.1
Boxman, R.L.2
Goldsmith, S.3
-
119
-
-
0021286060
-
Laser Doppler anemometry: a tool for studying macroparticle dynamics in a vacuum arc
-
Shalev S., Goldsmith S., Boxman R.L., Einav S., Avidor J.M. Laser Doppler anemometry: a tool for studying macroparticle dynamics in a vacuum arc. J. Phys. E: Sci. Instrum. 1984, 17:56-61.
-
(1984)
J. Phys. E: Sci. Instrum.
, vol.17
, pp. 56-61
-
-
Shalev, S.1
Goldsmith, S.2
Boxman, R.L.3
Einav, S.4
Avidor, J.M.5
-
120
-
-
0042852909
-
Velocities and emission rates of cathode-produced molybdenum macroparticles in a vacuum arc
-
Shalev S., Boxmann R.L., Goldsmith S.J. Velocities and emission rates of cathode-produced molybdenum macroparticles in a vacuum arc. J. Appl. Phys. 1985, 58:2503-2507.
-
(1985)
J. Appl. Phys.
, vol.58
, pp. 2503-2507
-
-
Shalev, S.1
Boxmann, R.L.2
Goldsmith, S.J.3
-
123
-
-
0026833174
-
Macroparticle contamination in cathodic arc coatings: Generation, transport and control
-
Boxman R.L., Goldsmith S. Macroparticle contamination in cathodic arc coatings: Generation, transport and control. Surf. Coat. Technol. 1992, 52:39-50.
-
(1992)
Surf. Coat. Technol.
, vol.52
, pp. 39-50
-
-
Boxman, R.L.1
Goldsmith, S.2
-
124
-
-
0029139433
-
Study of microdroplet generation from vacuum arcs on graphite cathodes
-
Kandah M., Meunier J.-L. Study of microdroplet generation from vacuum arcs on graphite cathodes. J. Vac. Sci. Technol. A 1995, 13:2444-2450.
-
(1995)
J. Vac. Sci. Technol. A
, vol.13
, pp. 2444-2450
-
-
Kandah, M.1
Meunier, J.-L.2
-
125
-
-
0030121541
-
Erosion study on graphite cathodes using pulsed vacuum arcs
-
Kandah M., Meunier J.-L. Erosion study on graphite cathodes using pulsed vacuum arcs. IEEE Trans. Plasma Sci. 1996, 24:523-527.
-
(1996)
IEEE Trans. Plasma Sci.
, vol.24
, pp. 523-527
-
-
Kandah, M.1
Meunier, J.-L.2
-
126
-
-
0027684316
-
On the macroparticle flux from vacuum arc cathode spots
-
Anders S., Anders A., Yu K.M., Yao X.Y., Brown I.G. On the macroparticle flux from vacuum arc cathode spots. IEEE Trans. Plasma Sci. 1993, 21:440-446.
-
(1993)
IEEE Trans. Plasma Sci.
, vol.21
, pp. 440-446
-
-
Anders, S.1
Anders, A.2
Yu, K.M.3
Yao, X.Y.4
Brown, I.G.5
-
127
-
-
0343626989
-
Velocity distribution of carbon macroparticles generated by pulsed vacuum arcs
-
Schülke T., Anders A. Velocity distribution of carbon macroparticles generated by pulsed vacuum arcs. Plasma Sources Sci. Technol. 1999, 8:567-571.
-
(1999)
Plasma Sources Sci. Technol.
, vol.8
, pp. 567-571
-
-
Schülke, T.1
Anders, A.2
-
128
-
-
0032165371
-
A model for particle growth in arc deposited amorphous carbon films
-
Drescher D., Koskinen J., Scheibe H.-J., Mensch A. A model for particle growth in arc deposited amorphous carbon films. Diamond Rel. Mater. 1998, 7:1375-1380.
-
(1998)
Diamond Rel. Mater.
, vol.7
, pp. 1375-1380
-
-
Drescher, D.1
Koskinen, J.2
Scheibe, H.-J.3
Mensch, A.4
-
129
-
-
42449153954
-
Motion of a plasmoid in a curvilinear magnetic field
-
Voitsenya V.S., Gorbanyuk A.G., Onishchenko I.N., Safronov B.G., Khizhniyak N.A., Shkoda V.V. Motion of a plasmoid in a curvilinear magnetic field. Sov. Phys. Tech. Phys. 1967, 12:185-192.
-
(1967)
Sov. Phys. Tech. Phys.
, vol.12
, pp. 185-192
-
-
Voitsenya, V.S.1
Gorbanyuk, A.G.2
Onishchenko, I.N.3
Safronov, B.G.4
Khizhniyak, N.A.5
Shkoda, V.V.6
-
130
-
-
0017992915
-
Transport of plasma streams in a curvilinear plasma-optics system
-
Aksenov I.I., Belous V.A., Padalka V.G., Khoroshikh V.M. Transport of plasma streams in a curvilinear plasma-optics system. Sov. J. Plasma Phys. 1978, 4:425-428.
-
(1978)
Sov. J. Plasma Phys.
, vol.4
, pp. 425-428
-
-
Aksenov, I.I.1
Belous, V.A.2
Padalka, V.G.3
Khoroshikh, V.M.4
-
131
-
-
0001068134
-
Apparatus to rid the plasma of a vacuum arc of macroparticles
-
Aksenov I.I., Belous V.A., Padalka V.G., Khoroshikh V.M. Apparatus to rid the plasma of a vacuum arc of macroparticles. Instrum. Exp. Tech. 1978, 21:1416-1418.
-
(1978)
Instrum. Exp. Tech.
, vol.21
, pp. 1416-1418
-
-
Aksenov, I.I.1
Belous, V.A.2
Padalka, V.G.3
Khoroshikh, V.M.4
-
132
-
-
0000564333
-
Effect of duct bias on transport of vacuum arc plasmas through curved magnetic filters
-
Anders A., Anders S., Brown I.G. Effect of duct bias on transport of vacuum arc plasmas through curved magnetic filters. J. Appl. Phys. 1994, 75:4900-4905.
-
(1994)
J. Appl. Phys.
, vol.75
, pp. 4900-4905
-
-
Anders, A.1
Anders, S.2
Brown, I.G.3
-
133
-
-
0030258872
-
Interactions of the directed plasma from a cathodic arc with electrodes and magnetic field
-
Bilek M.M.M., McKenzie D.R., Yin Y., Chhowalla M.U., Milne W.I. Interactions of the directed plasma from a cathodic arc with electrodes and magnetic field. IEEE Trans. Plasma Sci. 1996, 24:1291-1298.
-
(1996)
IEEE Trans. Plasma Sci.
, vol.24
, pp. 1291-1298
-
-
Bilek, M.M.M.1
McKenzie, D.R.2
Yin, Y.3
Chhowalla, M.U.4
Milne, W.I.5
-
134
-
-
0031206910
-
S-shaped magnetic macroparticle filter for cathodic arc deposition
-
Anders S., Anders A., Dickinson M.R., MacGill R.A., Brown I.G. S-shaped magnetic macroparticle filter for cathodic arc deposition. IEEE Trans. Plasma Sci. 1997, 25:670-674.
-
(1997)
IEEE Trans. Plasma Sci.
, vol.25
, pp. 670-674
-
-
Anders, S.1
Anders, A.2
Dickinson, M.R.3
MacGill, R.A.4
Brown, I.G.5
-
135
-
-
0034599699
-
Comparison of filtered high current pulsed arc deposition (f-HCA) with conventional vacuum arc methods
-
Witke T., Schuelke T., Schultrich B., Siemroth P., Vetter J. Comparison of filtered high current pulsed arc deposition (f-HCA) with conventional vacuum arc methods. Surf. Coat. Technol. 2000, 126:81-88.
-
(2000)
Surf. Coat. Technol.
, vol.126
, pp. 81-88
-
-
Witke, T.1
Schuelke, T.2
Schultrich, B.3
Siemroth, P.4
Vetter, J.5
-
136
-
-
0033531836
-
Transport of vacuum arc plasma through an off-plane double bend filtering duct
-
Shi X., Tay B.K., Tan H.S., Liu E., Shi J., Cheah L.K., Jin X. Transport of vacuum arc plasma through an off-plane double bend filtering duct. Thin Solid Films 1999, 345:1-6.
-
(1999)
Thin Solid Films
, vol.345
, pp. 1-6
-
-
Shi, X.1
Tay, B.K.2
Tan, H.S.3
Liu, E.4
Shi, J.5
Cheah, L.K.6
Jin, X.7
-
137
-
-
0034310602
-
Twist filter for the removal of macroparticles from cathodic arc plasmas
-
Anders A., MacGill R.A. Twist filter for the removal of macroparticles from cathodic arc plasmas. Surf. Coat. Technol. 2000, 133-134:96-100.
-
(2000)
Surf. Coat. Technol.
, vol.133-134
, pp. 96-100
-
-
Anders, A.1
MacGill, R.A.2
-
138
-
-
0033512093
-
Approaches to rid cathodic arc plasma of macro- and nanoparticles: a review
-
Anders A. Approaches to rid cathodic arc plasma of macro- and nanoparticles: a review. Surf. Coat. Technol. 1999, 120-121:319-330.
-
(1999)
Surf. Coat. Technol.
, vol.120-121
, pp. 319-330
-
-
Anders, A.1
-
139
-
-
21844498600
-
Energetic condensation: processes, properties, and products
-
Colligon J.S. Energetic condensation: processes, properties, and products. J. Vac. Sci. Technol. A 1995, 13:1649-1657.
-
(1995)
J. Vac. Sci. Technol. A
, vol.13
, pp. 1649-1657
-
-
Colligon, J.S.1
-
140
-
-
0031643548
-
Cathodic arc deposition of films
-
Brown I.G. Cathodic arc deposition of films. Annu. Rev. Mater. Sci. 1998, 28:243-269.
-
(1998)
Annu. Rev. Mater. Sci.
, vol.28
, pp. 243-269
-
-
Brown, I.G.1
-
141
-
-
0035175849
-
Thin film synthesis by energetic condensation
-
Monteiro O.R. Thin film synthesis by energetic condensation. Annu. Rev. Mater. Sci. 2001, 31:111-137.
-
(2001)
Annu. Rev. Mater. Sci.
, vol.31
, pp. 111-137
-
-
Monteiro, O.R.1
-
143
-
-
0002537944
-
Molecular-dynamics study of the fundamental processes involved in subplantation of diamondlike carbon
-
Uhlmann S., Fraunheim T., Lifshitz Y. Molecular-dynamics study of the fundamental processes involved in subplantation of diamondlike carbon. Phys. Rev. Lett. 1998, 81:641-644.
-
(1998)
Phys. Rev. Lett.
, vol.81
, pp. 641-644
-
-
Uhlmann, S.1
Fraunheim, T.2
Lifshitz, Y.3
-
144
-
-
32144459568
-
Subplantation model for film growth from hyperthermal species
-
Lifshitz Y., Kasai S.R., Rabalais J.W., Eckstein W. Subplantation model for film growth from hyperthermal species. Phys. Rev. B 1990, 41:10468-10480.
-
(1990)
Phys. Rev. B
, vol.41
, pp. 10468-10480
-
-
Lifshitz, Y.1
Kasai, S.R.2
Rabalais, J.W.3
Eckstein, W.4
-
145
-
-
0037934341
-
Ion-beam synthesis and growth mechanism of diamond-like materials
-
Ronning C. Ion-beam synthesis and growth mechanism of diamond-like materials. Appl. Phys. A 2003, 77:39-50.
-
(2003)
Appl. Phys. A
, vol.77
, pp. 39-50
-
-
Ronning, C.1
-
147
-
-
33744647520
-
Calculated ionization potentials for multiply charges ions
-
Carlson T.A., Nestor C.W., Wasserman N., McDowell J.D. Calculated ionization potentials for multiply charges ions. Atomic Data 1970, 2:63-99.
-
(1970)
Atomic Data
, vol.2
, pp. 63-99
-
-
Carlson, T.A.1
Nestor, C.W.2
Wasserman, N.3
McDowell, J.D.4
-
148
-
-
0003877758
-
-
CRC Press, Boca Raton, New York, D.R. Lide (Ed.)
-
Handbook of Chemistry and Physics 2000, CRC Press, Boca Raton, New York. 81st ed. D.R. Lide (Ed.).
-
(2000)
Handbook of Chemistry and Physics
-
-
-
149
-
-
0034092121
-
Hard and superhard nanocomposite coatings
-
Musil J. Hard and superhard nanocomposite coatings. Surf. Coat. Technol. 2000, 125:322-330.
-
(2000)
Surf. Coat. Technol.
, vol.125
, pp. 322-330
-
-
Musil, J.1
-
150
-
-
79955991664
-
Atomic scale heating in cathodic arc plasma deposition
-
Anders A. Atomic scale heating in cathodic arc plasma deposition. Appl. Phys. Lett. 2002, 80:1100-1102.
-
(2002)
Appl. Phys. Lett.
, vol.80
, pp. 1100-1102
-
-
Anders, A.1
-
152
-
-
33644678557
-
A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions
-
Bilek M.M.M., McKenzie D.R. A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions. Surf. Coat. Technol. 2006, 200:4345-4354.
-
(2006)
Surf. Coat. Technol.
, vol.200
, pp. 4345-4354
-
-
Bilek, M.M.M.1
McKenzie, D.R.2
-
153
-
-
0242292093
-
Control of stress and microstructure in cathodic arc deposited films
-
Bilek M.M.M., Tarrant R.N., McKenzie D.R., Lim S.H.N., McCulloch D.G. Control of stress and microstructure in cathodic arc deposited films. IEEE Trans. Plasma Sci. 2003, 31:939-944.
-
(2003)
IEEE Trans. Plasma Sci.
, vol.31
, pp. 939-944
-
-
Bilek, M.M.M.1
Tarrant, R.N.2
McKenzie, D.R.3
Lim, S.H.N.4
McCulloch, D.G.5
-
154
-
-
9744239806
-
Minimisation of intrinsic stress in titanium nitride using a cathodic arc with plasma immersion ion implantation
-
Lim S.H.N., McCulloch D.G., Bilek M.M.M., McKenzie D.R. Minimisation of intrinsic stress in titanium nitride using a cathodic arc with plasma immersion ion implantation. Surf. Coat. Technol. 2003, 174-175:76-80.
-
(2003)
Surf. Coat. Technol.
, vol.174-175
, pp. 76-80
-
-
Lim, S.H.N.1
McCulloch, D.G.2
Bilek, M.M.M.3
McKenzie, D.R.4
-
155
-
-
0027578647
-
A simple model for the formation of compressive stress in thin films by ion bombardment
-
Davis C.A. A simple model for the formation of compressive stress in thin films by ion bombardment. Thin Solid Films 1993, 226:30-34.
-
(1993)
Thin Solid Films
, vol.226
, pp. 30-34
-
-
Davis, C.A.1
-
156
-
-
21544431995
-
An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering
-
Windischmann H. An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering. J. Appl. Phys 1987, 62:1800-1807.
-
(1987)
J. Appl. Phys
, vol.62
, pp. 1800-1807
-
-
Windischmann, H.1
-
157
-
-
0001680296
-
Evidence for subpicosecond thermal spikes in the formation of tetrahedral amorphous carbon
-
Marks N.A. Evidence for subpicosecond thermal spikes in the formation of tetrahedral amorphous carbon. Phys. Rev. B 1997, 56:2441.
-
(1997)
Phys. Rev. B
, vol.56
, pp. 2441
-
-
Marks, N.A.1
-
158
-
-
17644378069
-
Use of low energy and high frequency PBII during thin film deposition to achieve relief of intrinsic stress and microstructural changes
-
Bilek M.M.M., McKenzie D.R., Moeller W. Use of low energy and high frequency PBII during thin film deposition to achieve relief of intrinsic stress and microstructural changes. Surf. Coat. Technol. 2004, 186:21-28.
-
(2004)
Surf. Coat. Technol.
, vol.186
, pp. 21-28
-
-
Bilek, M.M.M.1
McKenzie, D.R.2
Moeller, W.3
-
159
-
-
1342305086
-
Stress measurement and stress relaxation during magnetron sputter deposition of cubic boron nitride thin films
-
Abendroth B., Gago R., Kolitsch A., Moller W. Stress measurement and stress relaxation during magnetron sputter deposition of cubic boron nitride thin films. Thin Solid Films 2004, 447-448:131-135.
-
(2004)
Thin Solid Films
, vol.447-448
, pp. 131-135
-
-
Abendroth, B.1
Gago, R.2
Kolitsch, A.3
Moller, W.4
-
160
-
-
20744459160
-
Intrinsic stress induced by substrate bias in amorphous hydrogenated silicon thin films
-
Yin Y., McKenzie D., Bilek M. Intrinsic stress induced by substrate bias in amorphous hydrogenated silicon thin films. Surf. Coat. Technol. 2005, 198:156-160.
-
(2005)
Surf. Coat. Technol.
, vol.198
, pp. 156-160
-
-
Yin, Y.1
McKenzie, D.2
Bilek, M.3
-
161
-
-
34548248587
-
Bonding statistics and electronic structure of novel Si-B-C-N materials: ab initio calculations and experimental verification
-
Houska J., Capek J., Vlcek J., Bilek M.M.M., McKenzie D.R. Bonding statistics and electronic structure of novel Si-B-C-N materials: ab initio calculations and experimental verification. J. Vac. Sci. Technol. A 2007, 25:1411-1416.
-
(2007)
J. Vac. Sci. Technol. A
, vol.25
, pp. 1411-1416
-
-
Houska, J.1
Capek, J.2
Vlcek, J.3
Bilek, M.M.M.4
McKenzie, D.R.5
-
162
-
-
17644363700
-
A model for stress generation and stress relief mechanisms applied to as-deposited filtered cathodic vacuum arc amorphous carbon films
-
Bilek M.M.M., Verdon M., Ryves L., Oates T.W.H., Ha C.T., McKenzie D.R. A model for stress generation and stress relief mechanisms applied to as-deposited filtered cathodic vacuum arc amorphous carbon films. Thin Solid Films 2005, 482:69-73.
-
(2005)
Thin Solid Films
, vol.482
, pp. 69-73
-
-
Bilek, M.M.M.1
Verdon, M.2
Ryves, L.3
Oates, T.W.H.4
Ha, C.T.5
McKenzie, D.R.6
-
163
-
-
0032003070
-
Cylindrical spike model for the formation of diamondlike thin films by ion deposition
-
Hofsäss H., Feldermann H., Merk R., Sebastian M., Ronning C. Cylindrical spike model for the formation of diamondlike thin films by ion deposition. Appl. Phys. A: Mater. Sci. Process. 1998, 66:153-181.
-
(1998)
Appl. Phys. A: Mater. Sci. Process.
, vol.66
, pp. 153-181
-
-
Hofsäss, H.1
Feldermann, H.2
Merk, R.3
Sebastian, M.4
Ronning, C.5
-
165
-
-
0037429928
-
Coalescence of nanometer silver islands on oxides grown by filtered cathodic arc deposition
-
Byon E., Oates T.H., Anders A. Coalescence of nanometer silver islands on oxides grown by filtered cathodic arc deposition. Appl. Phys. Lett. 2003, 82:1634-1636.
-
(2003)
Appl. Phys. Lett.
, vol.82
, pp. 1634-1636
-
-
Byon, E.1
Oates, T.H.2
Anders, A.3
-
166
-
-
12344275296
-
Percolation threshold in ultrathin titanium films determined by in-situ spectroscopic ellipsometry
-
Oates T., McKenzie D., Bilek M. Percolation threshold in ultrathin titanium films determined by in-situ spectroscopic ellipsometry. Phys. Rev. B 2004, 70:195406.
-
(2004)
Phys. Rev. B
, vol.70
, pp. 195406
-
-
Oates, T.1
McKenzie, D.2
Bilek, M.3
-
167
-
-
0021385709
-
Unambiguous determination of thickness and dielectric function of thin films by spectroscopic ellipsometry
-
Arwin H., Aspnes D.E. Unambiguous determination of thickness and dielectric function of thin films by spectroscopic ellipsometry. Thin Solid Films 1984, 113:101-113.
-
(1984)
Thin Solid Films
, vol.113
, pp. 101-113
-
-
Arwin, H.1
Aspnes, D.E.2
-
168
-
-
84882881359
-
-
J.F. Ziegler, J. Biersack, Monte Carlo code SRIM2006.02, downloadable from: > (2006).
-
J.F. Ziegler, J. Biersack, Monte Carlo code SRIM2006.02, downloadable from: > (2006). http://srim.org/.
-
-
-
-
169
-
-
0023164448
-
Thermodynamic properties of the Cr-Fe system
-
Andersson J.-O., Sundman B. Thermodynamic properties of the Cr-Fe system. Calphad 1987, 11:83-92.
-
(1987)
Calphad
, vol.11
, pp. 83-92
-
-
Andersson, J.-O.1
Sundman, B.2
-
172
-
-
0027113329
-
A new method for hard coatings - ABS (arc bond sputtering)
-
Münz W.-D., Schulze D., Hauzer F.J.M. A new method for hard coatings - ABS (arc bond sputtering). Surf. Coat. Technol. 1992, 50:169-178.
-
(1992)
Surf. Coat. Technol.
, vol.50
, pp. 169-178
-
-
Münz, W.-D.1
Schulze, D.2
Hauzer, F.J.M.3
-
173
-
-
0035393111
-
Optimization of in-situ substrate treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics
-
Schönjahn C., Ehiasarian A.P., Lewis D.B., New R., Münz W.-D., Twesten R.D., Petrov I. Optimization of in-situ substrate treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics. J. Vac. Sci. Technol. A 2001, 19:1415-1420.
-
(2001)
J. Vac. Sci. Technol. A
, vol.19
, pp. 1415-1420
-
-
Schönjahn, C.1
Ehiasarian, A.P.2
Lewis, D.B.3
New, R.4
Münz, W.-D.5
Twesten, R.D.6
Petrov, I.7
-
174
-
-
2442505507
-
Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique
-
Ehiasarian A.P., Hovsepian P.E., Hultman L., Helmersson U. Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique. Thin Solid Films 2004, 457:270-277.
-
(2004)
Thin Solid Films
, vol.457
, pp. 270-277
-
-
Ehiasarian, A.P.1
Hovsepian, P.E.2
Hultman, L.3
Helmersson, U.4
-
175
-
-
33644798260
-
Chromium nitride/niobium nitride nano-scale multilayer coatings deposited at low temperature by the combined cathodic arc/unbalanced magnetron technique
-
Lewis D.B., Reitz D., Wüstefeld C., Ohser-Wiedemann R., Oettel H., Ehiasarian A.P., Hovsepian P.E. Chromium nitride/niobium nitride nano-scale multilayer coatings deposited at low temperature by the combined cathodic arc/unbalanced magnetron technique. Thin Solid Films 2006, 503:133-142.
-
(2006)
Thin Solid Films
, vol.503
, pp. 133-142
-
-
Lewis, D.B.1
Reitz, D.2
Wüstefeld, C.3
Ohser-Wiedemann, R.4
Oettel, H.5
Ehiasarian, A.P.6
Hovsepian, P.E.7
-
177
-
-
0023526786
-
Cathodic arc plasma deposition processes and their applications
-
Johnson P.C. Cathodic arc plasma deposition processes and their applications. 30th Annual SVC Technical Conference 1987, 317-324.
-
(1987)
30th Annual SVC Technical Conference
, pp. 317-324
-
-
Johnson, P.C.1
-
179
-
-
33749519466
-
-
Carl Hanser Verlag, München, K.W. Mertz, H.A. Jehn (Eds.)
-
Praxishandbuch moderne Beschichtungen 2001, Carl Hanser Verlag, München. K.W. Mertz, H.A. Jehn (Eds.).
-
(2001)
Praxishandbuch moderne Beschichtungen
-
-
-
180
-
-
84882811036
-
A brief modern history of cathodic arc coating
-
Society of Vacuum Coaters, Albuquerque, NM, D.M. Mattox, V. Harwood Mattox (Eds.)
-
Anders A. A brief modern history of cathodic arc coating. 50 Years of Vacuum coating and the Growth of the Society of Vacuum Coaters 2007, 120-131. Society of Vacuum Coaters, Albuquerque, NM. D.M. Mattox, V. Harwood Mattox (Eds.).
-
(2007)
50 Years of Vacuum coating and the Growth of the Society of Vacuum Coaters
, pp. 120-131
-
-
Anders, A.1
-
181
-
-
0030402565
-
Hard coatings for lubrication reduction in metal forming
-
Vetter J., Knaup R., Dwuletzki H., Schneider E., Vogler S. Hard coatings for lubrication reduction in metal forming. Surf. Coat. Technol. 1996, 86-87:739-746.
-
(1996)
Surf. Coat. Technol.
, vol.86-87
, pp. 739-746
-
-
Vetter, J.1
Knaup, R.2
Dwuletzki, H.3
Schneider, E.4
Vogler, S.5
-
182
-
-
0023437835
-
Reactive arc vapor ion deposition of TiN, ZrN and HfN
-
Johansen O.A., Dontje J.H., Zenner R.L.D. Reactive arc vapor ion deposition of TiN, ZrN and HfN. Thin Solid Films 1987, 153:75-82.
-
(1987)
Thin Solid Films
, vol.153
, pp. 75-82
-
-
Johansen, O.A.1
Dontje, J.H.2
Zenner, R.L.D.3
-
183
-
-
0023452585
-
Zirconium nitride films prepared by cathodic arc plasma deposition process
-
Johnson P.C., Randhawa H. Zirconium nitride films prepared by cathodic arc plasma deposition process. Surf. Coat. Technol. 1987, 33:53-62.
-
(1987)
Surf. Coat. Technol.
, vol.33
, pp. 53-62
-
-
Johnson, P.C.1
Randhawa, H.2
-
184
-
-
0032651438
-
y)N coatings deposited by cathodic vacuum arc evaporation
-
y)N coatings deposited by cathodic vacuum arc evaporation. J. Adv. Mater. 1999, 31:41-47.
-
(1999)
J. Adv. Mater.
, vol.31
, pp. 41-47
-
-
Vetter, J.1
-
185
-
-
0023436325
-
1-xN films deposited by ion plating with an arc evaporator
-
1-xN films deposited by ion plating with an arc evaporator. Thin Solid Films 1987, 153:67-74.
-
(1987)
Thin Solid Films
, vol.153
, pp. 67-74
-
-
Freller, H.1
Haessler, H.2
-
189
-
-
0141886144
-
Self-organized nanostructures in the Ti-Al-N system
-
Mayrhofer P.H., Hörling A., Karlsson L., Sjolen J., Larsson T., Mitterer C., Hultman L. Self-organized nanostructures in the Ti-Al-N system. Appl. Phys. Lett. 2003, 83:2049-2051.
-
(2003)
Appl. Phys. Lett.
, vol.83
, pp. 2049-2051
-
-
Mayrhofer, P.H.1
Hörling, A.2
Karlsson, L.3
Sjolen, J.4
Larsson, T.5
Mitterer, C.6
Hultman, L.7
-
190
-
-
0028671115
-
The multisource arc process for depositing ternary Cr- and Ti-based coatings
-
Knotek O., Loffler F., Scholl H.J., Barimani C. The multisource arc process for depositing ternary Cr- and Ti-based coatings. Surf. Coat. Technol. 1994, 68-69:309-313.
-
(1994)
Surf. Coat. Technol.
, vol.68-69
, pp. 309-313
-
-
Knotek, O.1
Loffler, F.2
Scholl, H.J.3
Barimani, C.4
-
191
-
-
0029378466
-
(TiCr)N coatings deposited by cathodic vacuum arc evaporation
-
Vetter J., Scholl H.J., Knotek O. (TiCr)N coatings deposited by cathodic vacuum arc evaporation. Surf. Coat. Technol. 1995, 74-75:286-291.
-
(1995)
Surf. Coat. Technol.
, vol.74-75
, pp. 286-291
-
-
Vetter, J.1
Scholl, H.J.2
Knotek, O.3
-
192
-
-
0023451661
-
Hard coatings of TiN (TiHf)N and (TiNb)N deposited by random and steered arc evaporation
-
Boelens S., Veltrop H. Hard coatings of TiN (TiHf)N and (TiNb)N deposited by random and steered arc evaporation. Surf. Coat. Technol. 1987, 33:63-71.
-
(1987)
Surf. Coat. Technol.
, vol.33
, pp. 63-71
-
-
Boelens, S.1
Veltrop, H.2
-
194
-
-
0033721734
-
1-x (x=0, 0.15, 0.45) thin films deposited by arc evaporation
-
1-x (x=0, 0.15, 0.45) thin films deposited by arc evaporation. Thin Solid Films 2000, 371:167-177.
-
(2000)
Thin Solid Films
, vol.371
, pp. 167-177
-
-
Karlsson, L.1
Hultman, L.2
Sundgren, J.E.3
-
195
-
-
33847152662
-
Characterization of TiCr(C,N)/amorphous carbon coatings synthesized by a cathodic arc deposition process
-
Chang Y.-Y., Yang S.-J., Wang D.-Y. Characterization of TiCr(C,N)/amorphous carbon coatings synthesized by a cathodic arc deposition process. Thin Solid Films 2007, 515:4722-4726.
-
(2007)
Thin Solid Films
, vol.515
, pp. 4722-4726
-
-
Chang, Y.-Y.1
Yang, S.-J.2
Wang, D.-Y.3
-
196
-
-
0041326663
-
Properties of (Ti,Cr,AI)N coatings with high Al content deposited by new plasma enhanced arc-cathode
-
Yamamoto K., Sato T., Takahara K., Hanaguri K. Properties of (Ti,Cr,AI)N coatings with high Al content deposited by new plasma enhanced arc-cathode. Surf. Coat. Technol. 2003, 174-175:620-626.
-
(2003)
Surf. Coat. Technol.
, vol.174-175
, pp. 620-626
-
-
Yamamoto, K.1
Sato, T.2
Takahara, K.3
Hanaguri, K.4
-
197
-
-
36049032489
-
Characteristics and performance of TiSiN/TiAlN multilayers coating synthesized by cathodic arc plasma evaporation
-
Chang C.-L., Chen W.-C., Tsai P.-C., Ho W.-Y., Wang D.-Y. Characteristics and performance of TiSiN/TiAlN multilayers coating synthesized by cathodic arc plasma evaporation. Surf. Coat. Technol. 2007, 202:987-992.
-
(2007)
Surf. Coat. Technol.
, vol.202
, pp. 987-992
-
-
Chang, C.-L.1
Chen, W.-C.2
Tsai, P.-C.3
Ho, W.-Y.4
Wang, D.-Y.5
-
198
-
-
0034292470
-
Pulsed vacuum arc deposition of multilayers in the nanometer range
-
Chun S.-Y., Chayahara A. Pulsed vacuum arc deposition of multilayers in the nanometer range. Surf. Coat. Technol. 2000, 132:217-221.
-
(2000)
Surf. Coat. Technol.
, vol.132
, pp. 217-221
-
-
Chun, S.-Y.1
Chayahara, A.2
-
199
-
-
33748417116
-
Self-adaptive wear behavior of nano-multilayered TiAlCrN/WN coatings under severe machining conditions
-
Fox-Rabinovich G.S., Yamamoto K., Veldhuis S.C., Kovalev A.I., Shuster L.S., Ning L. Self-adaptive wear behavior of nano-multilayered TiAlCrN/WN coatings under severe machining conditions. Surf. Coat. Technol. 2006, 201:1852-1860.
-
(2006)
Surf. Coat. Technol.
, vol.201
, pp. 1852-1860
-
-
Fox-Rabinovich, G.S.1
Yamamoto, K.2
Veldhuis, S.C.3
Kovalev, A.I.4
Shuster, L.S.5
Ning, L.6
-
200
-
-
33645096592
-
The effect of multilayer filtered arc coatings on mechanical properties, corrosion resistance and performance of periodontal dental instruments
-
Gorokhovsky V., Heckerman B., Watson P., Bekesch N. The effect of multilayer filtered arc coatings on mechanical properties, corrosion resistance and performance of periodontal dental instruments. Surf. Coat. Technol. 2006, 200:5614-5630.
-
(2006)
Surf. Coat. Technol.
, vol.200
, pp. 5614-5630
-
-
Gorokhovsky, V.1
Heckerman, B.2
Watson, P.3
Bekesch, N.4
-
201
-
-
21244458723
-
TiAlN based nanoscale multilayer coatings designed to adapt their tribological properties at elevated temperatures
-
Hovsepian P.E., Lewis D.B., Luo Q., Munz W.-D., Mayrhofer P.H., Mitterer C., et al. TiAlN based nanoscale multilayer coatings designed to adapt their tribological properties at elevated temperatures. Thin Solid Films 2005, 485:160-168.
-
(2005)
Thin Solid Films
, vol.485
, pp. 160-168
-
-
Hovsepian, P.E.1
Lewis, D.B.2
Luo, Q.3
Munz, W.-D.4
Mayrhofer, P.H.5
Mitterer, C.6
-
202
-
-
0029375861
-
Arc evaporation of multicomponent MCrAlY cathodes
-
Knotek O., Lugscheider E., Löffler F., Beele W., Barimani C. Arc evaporation of multicomponent MCrAlY cathodes. Surf. Coat. Technol. 1995, 74/75:118-122.
-
(1995)
Surf. Coat. Technol.
, pp. 118-122
-
-
Knotek, O.1
Lugscheider, E.2
Löffler, F.3
Beele, W.4
Barimani, C.5
-
204
-
-
17644382272
-
Synthesis and in-situ ellipsometric monitoring of Ti/C nanostructured multilayers using a high-current, dual source pulsed cathodic arc
-
Ryves L., Bilek M.M.M., Oates T.W.H., Tarrant R.N., McKenzie D.R., Burgmann F.A., McCulloch D.G. Synthesis and in-situ ellipsometric monitoring of Ti/C nanostructured multilayers using a high-current, dual source pulsed cathodic arc. Thin Solid Films 2005, 482:133-137.
-
(2005)
Thin Solid Films
, vol.482
, pp. 133-137
-
-
Ryves, L.1
Bilek, M.M.M.2
Oates, T.W.H.3
Tarrant, R.N.4
McKenzie, D.R.5
Burgmann, F.A.6
McCulloch, D.G.7
-
205
-
-
0028671187
-
Growth and characterization of cathodic arc evaporated CrN (TiAl)N and (TiZr)N films
-
Sant S.B., Gill K.S. Growth and characterization of cathodic arc evaporated CrN (TiAl)N and (TiZr)N films. Surf. Coat. Technol. 1994, 68-69:152-156.
-
(1994)
Surf. Coat. Technol.
, vol.68-69
, pp. 152-156
-
-
Sant, S.B.1
Gill, K.S.2
-
206
-
-
44949289227
-
Preparation of multilayers films structures by laser arcs
-
Scheibe H.J., Pompe W., Siemroth P., Buecken B., Schulze D., Wilberg R. Preparation of multilayers films structures by laser arcs. Surf. Coat. Technol. 1990, 193-194:788-798.
-
(1990)
Surf. Coat. Technol.
, vol.193-194
, pp. 788-798
-
-
Scheibe, H.J.1
Pompe, W.2
Siemroth, P.3
Buecken, B.4
Schulze, D.5
Wilberg, R.6
-
207
-
-
0027908022
-
The architecture and performance of multilayer and compositionally gradient coatings made by cathodic arc evaporation
-
Vetter J., Burgmer W., Dederichs H.G., Perry A.J. The architecture and performance of multilayer and compositionally gradient coatings made by cathodic arc evaporation. Surf. Coat. Technol. 1993, 61:209-214.
-
(1993)
Surf. Coat. Technol.
, vol.61
, pp. 209-214
-
-
Vetter, J.1
Burgmer, W.2
Dederichs, H.G.3
Perry, A.J.4
-
208
-
-
18144443893
-
AlTiCrNO coatings for dry cutting deposited by reactive cathodic vacuum arc evaporation
-
Vetter J., Krug T., von der Heide V. AlTiCrNO coatings for dry cutting deposited by reactive cathodic vacuum arc evaporation. Surf. Coat. Technol. 2003, 174:615-619.
-
(2003)
Surf. Coat. Technol.
, vol.174
, pp. 615-619
-
-
Vetter, J.1
Krug, T.2
von der Heide, V.3
-
209
-
-
1342310601
-
Cathodic arc evaporation of (Ti, Al)N coatings and (Ti,Al)N/TiN multilayer-coatings - correlation between lifetime of coated cutting tools, structural and mechanical film properties
-
Weber F.R., Fontaine F., Scheib M., Bock W. Cathodic arc evaporation of (Ti, Al)N coatings and (Ti,Al)N/TiN multilayer-coatings - correlation between lifetime of coated cutting tools, structural and mechanical film
-
(2004)
Surf. Coat. Technol.
, vol.177-178
, pp. 227-232
-
-
Weber, F.R.1
Fontaine, F.2
Scheib, M.3
Bock, W.4
-
210
-
-
0345491496
-
Mechanical and tribological properties of hard aluminium-carbon multilayer films prepared by the laser-arc technique
-
Ziegele H., Rebholz C., Scheibe H.J., Schultrich B., Matthews A. Mechanical and tribological properties of hard aluminium-carbon multilayer films prepared by the laser-arc technique. Surf. Coat. Technol. 1998, 107:159-167.
-
(1998)
Surf. Coat. Technol.
, vol.107
, pp. 159-167
-
-
Ziegele, H.1
Rebholz, C.2
Scheibe, H.J.3
Schultrich, B.4
Matthews, A.5
-
211
-
-
0031245737
-
Multilayers of amorphous carbon prepared by cathodic arc deposition
-
Anders S., Callahan D.L., Pharr G.M., Tsui T.Y., Bhatia C.S. Multilayers of amorphous carbon prepared by cathodic arc deposition. Surf. Coat. Technol. 1997, 94/95:189-194.
-
(1997)
Surf. Coat. Technol.
, pp. 189-194
-
-
Anders, S.1
Callahan, D.L.2
Pharr, G.M.3
Tsui, T.Y.4
Bhatia, C.S.5
-
212
-
-
20744455530
-
The structure and annealing properties of multilayer carbon films
-
McCulloch D.G., Xiao X.L., Peng J.L., Ha P.C.T., McKenzie D.R., Bilek M.M.M., et al. The structure and annealing properties of multilayer carbon films. Surf. Coat. Technol. 2005, 198:217-222.
-
(2005)
Surf. Coat. Technol.
, vol.198
, pp. 217-222
-
-
McCulloch, D.G.1
Xiao, X.L.2
Peng, J.L.3
Ha, P.C.T.4
McKenzie, D.R.5
Bilek, M.M.M.6
-
213
-
-
18344399594
-
Characterization of WC-CrAlN heterostructures obtained using a cathodic arc ion plating process
-
Lee H.Y., Han J.G., Baeg S.H., Yang S.H. Characterization of WC-CrAlN heterostructures obtained using a cathodic arc ion plating process. Surf. Coat. Technol. 2003, 174-175:303-309.
-
(2003)
Surf. Coat. Technol.
, vol.174-175
, pp. 303-309
-
-
Lee, H.Y.1
Han, J.G.2
Baeg, S.H.3
Yang, S.H.4
-
215
-
-
0036672187
-
Variation of color in titanium and zirconium nitride decorative thin films
-
Niyomsoan S., Grant W., Olson D.L., Mishra B. Variation of color in titanium and zirconium nitride decorative thin films. Thin Solid Films 2002, 415:187-194.
-
(2002)
Thin Solid Films
, vol.415
, pp. 187-194
-
-
Niyomsoan, S.1
Grant, W.2
Olson, D.L.3
Mishra, B.4
-
216
-
-
0242322469
-
A systematic study of the properties of the Zr-C-N ternary system, deposited by reactive arc evaporation
-
Eerden M., van Ijzendoorn W., Tietema R., van der Kolk G.J. A systematic study of the properties of the Zr-C-N ternary system, deposited by reactive arc evaporation. 46th Annual Technical Conference, Society of Vacuum Coaters 2003, 56-60.
-
(2003)
46th Annual Technical Conference, Society of Vacuum Coaters
, pp. 56-60
-
-
Eerden, M.1
van Ijzendoorn, W.2
Tietema, R.3
van der Kolk, G.J.4
-
217
-
-
0027912286
-
Decorative hard coatings: interdependence of optical, stoichiometric and structural properties
-
Beck U., Reiners G., Kopacz U., Jehn H.A. Decorative hard coatings: interdependence of optical, stoichiometric and structural properties. Surf. Coat. Technol. 1993, 60:389-395.
-
(1993)
Surf. Coat. Technol.
, vol.60
, pp. 389-395
-
-
Beck, U.1
Reiners, G.2
Kopacz, U.3
Jehn, H.A.4
-
218
-
-
36448999703
-
Filtered arc deposition of amorphous diamond
-
Lossy R., Pappas D.L., Roy R.A., Cuomo J.J., Sura V.H. Filtered arc deposition of amorphous diamond. Appl. Phys. Lett. 1992, 61:171-173.
-
(1992)
Appl. Phys. Lett.
, vol.61
, pp. 171-173
-
-
Lossy, R.1
Pappas, D.L.2
Roy, R.A.3
Cuomo, J.J.4
Sura, V.H.5
-
220
-
-
0032046625
-
Field emission from amorphous diamond films prepared by filtered arc deposition
-
Wang X., Zhao J.P., Chen Z.Y., Yang S.Q., Shi T.S., Liu X.H. Field emission from amorphous diamond films prepared by filtered arc deposition. Thin Solid Films 1998, 317:356-358.
-
(1998)
Thin Solid Films
, vol.317
, pp. 356-358
-
-
Wang, X.1
Zhao, J.P.2
Chen, Z.Y.3
Yang, S.Q.4
Shi, T.S.5
Liu, X.H.6
-
221
-
-
11744271088
-
Properties of tetrahedral amorphous carbon films deposited in a filtered cathodic arc in the presence of hydrogen
-
Davis C.A., Veerasamy V.S., Amaratunga G.A.J., Milne W.I., McKenzie D.R. Properties of tetrahedral amorphous carbon films deposited in a filtered cathodic arc in the presence of hydrogen. Phil. Mag. B 1994, 69:1121-1131.
-
(1994)
Phil. Mag. B
, vol.69
, pp. 1121-1131
-
-
Davis, C.A.1
Veerasamy, V.S.2
Amaratunga, G.A.J.3
Milne, W.I.4
McKenzie, D.R.5
-
222
-
-
0032137785
-
Deposition of carbon films containing nitrogen by filtered pulsed cathodic arc discharge method
-
Stanishevsky A., Khriachtchev L., Akula I. Deposition of carbon films containing nitrogen by filtered pulsed cathodic arc discharge method. Diamond Rel. Mater. 1998, 7:1190-1195.
-
(1998)
Diamond Rel. Mater.
, vol.7
, pp. 1190-1195
-
-
Stanishevsky, A.1
Khriachtchev, L.2
Akula, I.3
-
223
-
-
0033729189
-
Nitrogenated carbon films deposited using filtered cathodic arc
-
Druz B., Yevtukhov Y., Novotny V., Zaritsky I., Kanarov V., Polyakov V., Rukavishnikov A. Nitrogenated carbon films deposited using filtered cathodic arc. Diamond Rel. Mater. 2000, 9:668-674.
-
(2000)
Diamond Rel. Mater.
, vol.9
, pp. 668-674
-
-
Druz, B.1
Yevtukhov, Y.2
Novotny, V.3
Zaritsky, I.4
Kanarov, V.5
Polyakov, V.6
Rukavishnikov, A.7
-
224
-
-
0031387019
-
The effect of additional ion/plasma assistance in CNx-film deposition based on a filtered cathodic arc
-
Kühn M., Spaeth C., Pintaske R., Peter S., Richter F., Anders A. The effect of additional ion/plasma assistance in CNx-film deposition based on a filtered cathodic arc. Thin Solid Films 1997, 311:151-156.
-
(1997)
Thin Solid Films
, vol.311
, pp. 151-156
-
-
Kühn, M.1
Spaeth, C.2
Pintaske, R.3
Peter, S.4
Richter, F.5
Anders, A.6
-
225
-
-
0033504662
-
The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc
-
Liu E., Shi X., Tan H.S., Cheah L.K., Sun Z., Tay B.K., Shi J.R. The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc. Surf. Coat. Technol. 1999, 120-121:601-606.
-
(1999)
Surf. Coat. Technol.
, vol.120-121
, pp. 601-606
-
-
Liu, E.1
Shi, X.2
Tan, H.S.3
Cheah, L.K.4
Sun, Z.5
Tay, B.K.6
Shi, J.R.7
-
226
-
-
0031276062
-
Amorphous carbon and carbon nitride films prepared by filtered arc deposition and ion assisted arc deposition
-
Zhao J.P., Wang X., Chen Z.Y., Yang S.Q., Shi T.S., Liu X.H. Amorphous carbon and carbon nitride films prepared by filtered arc deposition and ion assisted arc deposition. Mater. Lett. 1997, 33:41-45.
-
(1997)
Mater. Lett.
, vol.33
, pp. 41-45
-
-
Zhao, J.P.1
Wang, X.2
Chen, Z.Y.3
Yang, S.Q.4
Shi, T.S.5
Liu, X.H.6
-
227
-
-
1842785345
-
Surface energy of metal containing amorphous carbon films deposited by filtered cathodic vacuum arc
-
Zhang P., Tay B.K., Yu G.Q., Lau S.P., Fu Y.Q. Surface energy of metal containing amorphous carbon films deposited by filtered cathodic vacuum arc. Diamond Rel. Mater. 2004, 13:459-464.
-
(2004)
Diamond Rel. Mater.
, vol.13
, pp. 459-464
-
-
Zhang, P.1
Tay, B.K.2
Yu, G.Q.3
Lau, S.P.4
Fu, Y.Q.5
-
228
-
-
34547304981
-
Filtered cathodic arc deposition with ion-species-selective bias
-
063901-1-5
-
Anders A., Pasaja N., Sansongsiri S. Filtered cathodic arc deposition with ion-species-selective bias. Rev. Sci. Instrum. 2007, 78. 063901-1-5.
-
(2007)
Rev. Sci. Instrum.
, vol.78
-
-
Anders, A.1
Pasaja, N.2
Sansongsiri, S.3
-
229
-
-
2742547582
-
Tetrahedral bonding in amorphous carbon
-
McKenzie D.R. Tetrahedral bonding in amorphous carbon. Rep. Prog. Phys. 1996, 59:1611-1664.
-
(1996)
Rep. Prog. Phys.
, vol.59
, pp. 1611-1664
-
-
McKenzie, D.R.1
-
230
-
-
33748353813
-
Tribology of diamondlike carbon films: recent progress and future prospects
-
Erdemir A., Donnet C. Tribology of diamondlike carbon films: recent progress and future prospects. J. Phys. D: Appl. Phys. 2006, 39:R1-R17.
-
(2006)
J. Phys. D: Appl. Phys.
, vol.39
-
-
Erdemir, A.1
Donnet, C.2
-
231
-
-
0037165927
-
Diamond-like amorphous carbon
-
Robertson J. Diamond-like amorphous carbon. Mater. Sci. Eng. R 2002, 37:129-281.
-
(2002)
Mater. Sci. Eng. R
, vol.37
, pp. 129-281
-
-
Robertson, J.1
-
232
-
-
0042499997
-
Properties of diamond-like carbon coating produced by plasma condensation
-
Strel'nitskii V.E., Aksenov I.I., Vakula S.I., Padalka V.G., Belous V.A. Properties of diamond-like carbon coating produced by plasma condensation. Sov. Techn. Phys. Lett. 1978, 4:546-547.
-
(1978)
Sov. Techn. Phys. Lett.
, vol.4
, pp. 546-547
-
-
Strel'nitskii, V.E.1
Aksenov, I.I.2
Vakula, S.I.3
Padalka, V.G.4
Belous, V.A.5
-
233
-
-
84882859712
-
Optical properties of diamond-like carbon films
-
Vakula S.I., Padalka V.G., Strel'nitskii V.E., Usoskin A.I. Optical properties of diamond-like carbon films. Sov. Techn. Phys. Lett. 1979, 5:573-574.
-
(1979)
Sov. Techn. Phys. Lett.
, vol.5
, pp. 573-574
-
-
Vakula, S.I.1
Padalka, V.G.2
Strel'nitskii, V.E.3
Usoskin, A.I.4
-
234
-
-
0001273616
-
High-efficiency source of pure carbon plasma
-
Aksenov I.I., Vakula S.I., Padalka V.G., Strel'nitskii V.E., Khoroshikh V.M. High-efficiency source of pure carbon plasma. Sov. Phys. Techn. Phys. 1980, 25:1164-1166.
-
(1980)
Sov. Phys. Techn. Phys.
, vol.25
, pp. 1164-1166
-
-
Aksenov, I.I.1
Vakula, S.I.2
Padalka, V.G.3
Strel'nitskii, V.E.4
Khoroshikh, V.M.5
-
236
-
-
0028378008
-
Electronic density of states in highly tetrahedral amorphous carbon
-
Veerasamy V.S., Amaratunga G.A.J., Davis C.A., Milne W.I., Hewitt P., Weiler M. Electronic density of states in highly tetrahedral amorphous carbon. Solid State Electron. 1994, 37:319-326.
-
(1994)
Solid State Electron.
, vol.37
, pp. 319-326
-
-
Veerasamy, V.S.1
Amaratunga, G.A.J.2
Davis, C.A.3
Milne, W.I.4
Hewitt, P.5
Weiler, M.6
-
237
-
-
0000560715
-
Influence of ion energies and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films
-
Chhowalla M., Robertson J., Chen C.W., Silva S.R.P., Davis C.A., Amaratunga G.A.J., Milne W.I. Influence of ion energies and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films. J. Appl. Phys. 1997, 81:139-145.
-
(1997)
J. Appl. Phys.
, vol.81
, pp. 139-145
-
-
Chhowalla, M.1
Robertson, J.2
Chen, C.W.3
Silva, S.R.P.4
Davis, C.A.5
Amaratunga, G.A.J.6
Milne, W.I.7
-
238
-
-
0343378252
-
Influence of hydrogen on the structure and properties of tetrahedral amorphous carbon films obtained by the filtered cathodic vacuum arc technique
-
Cheah L.K., Shi X., Liu E., Tay B.K., Shi J.R., Sun Z. Influence of hydrogen on the structure and properties of tetrahedral amorphous carbon films obtained by the filtered cathodic vacuum arc technique. Phil. Mag. B 1999, 79:1647-1658.
-
(1999)
Phil. Mag. B
, vol.79
, pp. 1647-1658
-
-
Cheah, L.K.1
Shi, X.2
Liu, E.3
Tay, B.K.4
Shi, J.R.5
Sun, Z.6
-
239
-
-
0001356099
-
Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate bias
-
Pharr G.M., Callahan D.L., McAdams D., et al. Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate bias. Appl. Phys. Lett. 1996, 68:779-781.
-
(1996)
Appl. Phys. Lett.
, vol.68
, pp. 779-781
-
-
Pharr, G.M.1
Callahan, D.L.2
McAdams, D.3
-
240
-
-
1342344902
-
Optical and electrical properties of amorphous carbon films deposited using filtered cathodic vacuum arc with pulse biasing
-
Sze J.Y., Tay B.K., Sheeja D., Lau S.P., Fu Y.Q., Chua D.H.C., Milne W.I. Optical and electrical properties of amorphous carbon films deposited using filtered cathodic vacuum arc with pulse biasing. Thin Solid Films 2004, 447:148-152.
-
(2004)
Thin Solid Films
, vol.447
, pp. 148-152
-
-
Sze, J.Y.1
Tay, B.K.2
Sheeja, D.3
Lau, S.P.4
Fu, Y.Q.5
Chua, D.H.C.6
Milne, W.I.7
-
241
-
-
0029405872
-
Development of hard carbon coatings for thin-film tape heads
-
Bhushan B., Gupta B.K., Sundaram R., Dey S., Anders S., Anders A., et al. Development of hard carbon coatings for thin-film tape heads. IEEE Trans. Magnet. 1995, 31:2976-2978.
-
(1995)
IEEE Trans. Magnet.
, vol.31
, pp. 2976-2978
-
-
Bhushan, B.1
Gupta, B.K.2
Sundaram, R.3
Dey, S.4
Anders, S.5
Anders, A.6
-
242
-
-
0035247759
-
Ultrathin carbon coatings for magnetic storage technology
-
Robertson J. Ultrathin carbon coatings for magnetic storage technology. Thin Solid Films 2001, 383:81-88.
-
(2001)
Thin Solid Films
, vol.383
, pp. 81-88
-
-
Robertson, J.1
-
243
-
-
0345915728
-
Ultrathin ta-C films on heads deposited by twist-filtered cathodic arc carbon deposition (invited)
-
2 and Beyond 2000, 43-50.
-
(2000)
2 and Beyond
, pp. 43-50
-
-
Anders, A.1
Ryan, F.R.2
-
244
-
-
21344467283
-
Diamond-like carbon overcoat for TFMH using filtered cathodic arc system with Ar-assisted arc discharge
-
Druz B., Yevtukhov Y., Zaritskiy I. Diamond-like carbon overcoat for TFMH using filtered cathodic arc system with Ar-assisted arc discharge. Diamond Rel. Materials 2005, 14:1508-1516.
-
(2005)
Diamond Rel. Materials
, vol.14
, pp. 1508-1516
-
-
Druz, B.1
Yevtukhov, Y.2
Zaritskiy, I.3
-
245
-
-
0031369179
-
Laser-arc technology for industrial hard coating deposition
-
Scheibe H.J., Schultrich B., Wilberg R., Falz M. Laser-arc technology for industrial hard coating deposition. Surf. Coat. Technol. 1997, 97:410-413.
-
(1997)
Surf. Coat. Technol.
, vol.97
, pp. 410-413
-
-
Scheibe, H.J.1
Schultrich, B.2
Wilberg, R.3
Falz, M.4
-
246
-
-
10244230955
-
Effects of Si content in DLC films on their friction and wear properties
-
Ikeyama M., Nakao S., Miyagawa Y., Miyagawa S. Effects of Si content in DLC films on their friction and wear properties. Surf. Coat. Technol. 2005, 191:38-42.
-
(2005)
Surf. Coat. Technol.
, vol.191
, pp. 38-42
-
-
Ikeyama, M.1
Nakao, S.2
Miyagawa, Y.3
Miyagawa, S.4
-
247
-
-
0037310828
-
On stress reduction of tetrahedral amorphous carbon films for moving mechanical assemblies
-
Tay B.K., Sheeja D., Yu L.J. On stress reduction of tetrahedral amorphous carbon films for moving mechanical assemblies. Diamond Rel. Mater. 2003, 12:185-194.
-
(2003)
Diamond Rel. Mater.
, vol.12
, pp. 185-194
-
-
Tay, B.K.1
Sheeja, D.2
Yu, L.J.3
-
248
-
-
0035465630
-
Tribological characterisation of diamond-like carbon coatings on Co-Cr-Mo alloy for orthopaedic applications
-
Sheeja D., Tay B.K., Lau S.P., Nung L.N. Tribological characterisation of diamond-like carbon coatings on Co-Cr-Mo alloy for orthopaedic applications. Surf. Coat. Technol. 2001, 146-147:410-416.
-
(2001)
Surf. Coat. Technol.
, vol.146-147
, pp. 410-416
-
-
Sheeja, D.1
Tay, B.K.2
Lau, S.P.3
Nung, L.N.4
-
249
-
-
0037852937
-
A review of modified DLC coatings for biological applications
-
Hauert R. A review of modified DLC coatings for biological applications. Diamond Rel. Mater. 2003, 12:583-589.
-
(2003)
Diamond Rel. Mater.
, vol.12
, pp. 583-589
-
-
Hauert, R.1
-
250
-
-
34147171092
-
Hemocompatibility and anti-bacterial properties of silver doped diamond-like carbon prepared by pulsed filtered cathodic vacuum arc deposition
-
Kwok S.C.H., Zhang W., Wan G.J., McKenzie D.R., Bilek M.M.M., Chu P.K. Hemocompatibility and anti-bacterial properties of silver doped diamond-like carbon prepared by pulsed filtered cathodic vacuum arc deposition. Diamond Rel. Mater. 2007, 16:1353-1360.
-
(2007)
Diamond Rel. Mater.
, vol.16
, pp. 1353-1360
-
-
Kwok, S.C.H.1
Zhang, W.2
Wan, G.J.3
McKenzie, D.R.4
Bilek, M.M.M.5
Chu, P.K.6
-
251
-
-
33845308546
-
Plasma biasing to control the growth conditions of diamond-like carbon
-
Anders A., Pasaja N., Lim S.H.N., Petersen T.C., Keast V.J. Plasma biasing to control the growth conditions of diamond-like carbon. Surf. Coat. Technol. 2007, 201:4628-4632.
-
(2007)
Surf. Coat. Technol.
, vol.201
, pp. 4628-4632
-
-
Anders, A.1
Pasaja, N.2
Lim, S.H.N.3
Petersen, T.C.4
Keast, V.J.5
-
252
-
-
0000075431
-
Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond
-
Friedmann T.A., Sullivan J.P., Knapp J.A., Tallant D.R., Follstaedt D.M., Medlin D.L., Mirkarimi P.B. Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond. Appl. Phys. Lett. 1997, 71:3820-3822.
-
(1997)
Appl. Phys. Lett.
, vol.71
, pp. 3820-3822
-
-
Friedmann, T.A.1
Sullivan, J.P.2
Knapp, J.A.3
Tallant, D.R.4
Follstaedt, D.M.5
Medlin, D.L.6
Mirkarimi, P.B.7
-
253
-
-
0001079620
-
Annealing of nonhydrogenated amophous carbon films prepared by filtered cathodic arc
-
Monteiro O.R., Ager J.W., Lee D.H., Lo R.Y., Walter K.C., Nastasi M. Annealing of nonhydrogenated amophous carbon films prepared by filtered cathodic arc. J. Appl. Phys. 2000, 88:2395-2399.
-
(2000)
J. Appl. Phys.
, vol.88
, pp. 2395-2399
-
-
Monteiro, O.R.1
Ager, J.W.2
Lee, D.H.3
Lo, R.Y.4
Walter, K.C.5
Nastasi, M.6
-
254
-
-
0001603574
-
Effect of mass-selected ion species on structure and properties of diamond-like carbon films
-
Tang Z., Zhang Z.J., Narumi K., Xu Y., Naramoto H., Nagai S., Miyashita K. Effect of mass-selected ion species on structure and properties of diamond-like carbon films. J. Appl. Phys. 2001, 89:1959-1964.
-
(2001)
J. Appl. Phys.
, vol.89
, pp. 1959-1964
-
-
Tang, Z.1
Zhang, Z.J.2
Narumi, K.3
Xu, Y.4
Naramoto, H.5
Nagai, S.6
Miyashita, K.7
-
255
-
-
0000800377
-
Mechanical properties and coordinations of amorphous carbons
-
Robertson J. Mechanical properties and coordinations of amorphous carbons. Phys. Rev. Lett 1992, 68:220.
-
(1992)
Phys. Rev. Lett
, vol.68
, pp. 220
-
-
Robertson, J.1
-
257
-
-
0035254753
-
Combined deposition and implantation in the cathodic arc for thick film preparation
-
Tarrant R.N., Montross C.S., McKenzie D.R. Combined deposition and implantation in the cathodic arc for thick film preparation. Surf. Coat. Technol. 2001, 136:188-191.
-
(2001)
Surf. Coat. Technol.
, vol.136
, pp. 188-191
-
-
Tarrant, R.N.1
Montross, C.S.2
McKenzie, D.R.3
-
258
-
-
0036641135
-
PBII deposition of thick carbon coatings from a cathodic arc plasma
-
Tarrant R.N., Fujisawa N., Swain M.V., James N.L., McKenzie D.R., Woodard J.C. PBII deposition of thick carbon coatings from a cathodic arc plasma. Surf. Coat. Technol. 2002, 156:143-148.
-
(2002)
Surf. Coat. Technol.
, vol.156
, pp. 143-148
-
-
Tarrant, R.N.1
Fujisawa, N.2
Swain, M.V.3
James, N.L.4
McKenzie, D.R.5
Woodard, J.C.6
-
259
-
-
0031245899
-
Metallization of sub-micron trenches and vias with high aspect ratio
-
Siemroth P., Wenzel C., Kliomes W., Schultrich B., Schülke T. Metallization of sub-micron trenches and vias with high aspect ratio. Thin Solid Films 1997, 308:455-459.
-
(1997)
Thin Solid Films
, vol.308
, pp. 455-459
-
-
Siemroth, P.1
Wenzel, C.2
Kliomes, W.3
Schultrich, B.4
Schülke, T.5
-
260
-
-
0034506770
-
Copper metallization in microelectronics using filtered vacuum arc deposition - principles and technological development
-
Siemroth P., Schülke T. Copper metallization in microelectronics using filtered vacuum arc deposition - principles and technological development. Surf. Coat. Technol. 2000, 133-134:106-113.
-
(2000)
Surf. Coat. Technol.
, vol.133-134
, pp. 106-113
-
-
Siemroth, P.1
Schülke, T.2
-
261
-
-
22644448879
-
Novel metallization technique for filling 100-nm-wide trenches and vias with very high aspect ratio
-
Monteiro O.R. Novel metallization technique for filling 100-nm-wide trenches and vias with very high aspect ratio. J. Vac. Sci. Technol. B 1999, 17:1094-1097.
-
(1999)
J. Vac. Sci. Technol. B
, vol.17
, pp. 1094-1097
-
-
Monteiro, O.R.1
-
262
-
-
23444459382
-
Characterization of copper metallization for interconnect by 90[deg]-bend electromagnetic filtered vacuum arc
-
Chen U.-S., Shih H.C. Characterization of copper metallization for interconnect by 90[deg]-bend electromagnetic filtered vacuum arc. Nucl. Instrum. Meth. Phys. Res. B 2005, 237:477-483.
-
(2005)
Nucl. Instrum. Meth. Phys. Res. B
, vol.237
, pp. 477-483
-
-
Chen, U.-S.1
Shih, H.C.2
-
263
-
-
0033332743
-
Structural and optical properties of titanium oxide thin films deposited by filtered arc deposition
-
Bendavid A., Martin P.J., Jamting A., Takikawa H. Structural and optical properties of titanium oxide thin films deposited by filtered arc deposition. Thin Solid Films 1999, 356:6-11.
-
(1999)
Thin Solid Films
, vol.356
, pp. 6-11
-
-
Bendavid, A.1
Martin, P.J.2
Jamting, A.3
Takikawa, H.4
-
264
-
-
0025638229
-
Ion-beam-deposited films produced by filtered arc evaporation
-
Martin P.J., Netterfield R.P., Kinder T.J. Ion-beam-deposited films produced by filtered arc evaporation. Thin Solid Films 1990, 193:77-83.
-
(1990)
Thin Solid Films
, vol.193
, pp. 77-83
-
-
Martin, P.J.1
Netterfield, R.P.2
Kinder, T.J.3
-
266
-
-
0033079772
-
Plasma deposition of tribological and optical thin film materials with a filtered cathodic arc source
-
Martin P.J., Bendavid A., Netterfield R.P., Kinder T.J., Jahan F., Smith G. Plasma deposition of tribological and optical thin film materials with a filtered cathodic arc source. Surf. Coat. Technol. 1999, 112:257-260.
-
(1999)
Surf. Coat. Technol.
, vol.112
, pp. 257-260
-
-
Martin, P.J.1
Bendavid, A.2
Netterfield, R.P.3
Kinder, T.J.4
Jahan, F.5
Smith, G.6
-
267
-
-
0034140213
-
Deposition and modification of titanium dioxide thin films by filtered arc deposition
-
Bendavid A., Martin P.J., Takikawa H. Deposition and modification of titanium dioxide thin films by filtered arc deposition. Thin Solid Films 2000, 360:241-249.
-
(2000)
Thin Solid Films
, vol.360
, pp. 241-249
-
-
Bendavid, A.1
Martin, P.J.2
Takikawa, H.3
-
268
-
-
1342302497
-
Ion beam-induced erosion and humidity effect of MgO protective layer prepared by vacuum arc deposition
-
Kim J.K., Lee E.S., Kim D.H., Kim D.G. Ion beam-induced erosion and humidity effect of MgO protective layer prepared by vacuum arc deposition. Thin Solid Films 2004, 447:95-99.
-
(2004)
Thin Solid Films
, vol.447
, pp. 95-99
-
-
Kim, J.K.1
Lee, E.S.2
Kim, D.H.3
Kim, D.G.4
-
269
-
-
33748111493
-
x films prepared by cathodic-vacuum-arc ion deposition system
-
x films prepared by cathodic-vacuum-arc ion deposition system. IEEE Trans. Plasma Sci. 2006, 34:1099-1104.
-
(2006)
IEEE Trans. Plasma Sci.
, vol.34
, pp. 1099-1104
-
-
Zheng, C.1
Zhu, D.2
Chen, D.3
He, Z.4
Wen, L.5
Cheung, W.Y.6
Wong, S.P.7
-
270
-
-
20844441327
-
Effects of substrate bias and growth temperature on properties of aluminium oxide thin films by using filtered cathodic vacuum arc
-
Tay B.K., Zhao Z.W., Sun C.Q. Effects of substrate bias and growth temperature on properties of aluminium oxide thin films by using filtered cathodic vacuum arc. Surf. Coat. Technol. 2005, 198:94-97.
-
(2005)
Surf. Coat. Technol.
, vol.198
, pp. 94-97
-
-
Tay, B.K.1
Zhao, Z.W.2
Sun, C.Q.3
-
271
-
-
24044466099
-
Effect of ion energy on structure and composition of cathodic arc deposited alumina thin films
-
Rosén J., Mräz S., Kreissig U., Music D., Schneider J.M. Effect of ion energy on structure and composition of cathodic arc deposited alumina thin films. Plasma Chem. Plasma Process. 2005, 25:303-317.
-
(2005)
Plasma Chem. Plasma Process.
, vol.25
, pp. 303-317
-
-
Rosén, J.1
Mräz, S.2
Kreissig, U.3
Music, D.4
Schneider, J.M.5
-
272
-
-
17744368469
-
Transparent AlN layers formed by metal plasma immersion ion implantation and deposition
-
Mändl S., Manova D., Rauschenbach B. Transparent AlN layers formed by metal plasma immersion ion implantation and deposition. Surf. Coat. Technol. 2004, 186:82-87.
-
(2004)
Surf. Coat. Technol.
, vol.186
, pp. 82-87
-
-
Mändl, S.1
Manova, D.2
Rauschenbach, B.3
-
273
-
-
0035270018
-
Properties of aluminium nitride coating obtained by vacuum arc discharge method with plasma flow separation
-
Inkin V.N., Kirpilenko G.G., Kolpakov A.J. Properties of aluminium nitride coating obtained by vacuum arc discharge method with plasma flow separation. Diamond Rel. Mater. 2001, 10:1314-1316.
-
(2001)
Diamond Rel. Mater.
, vol.10
, pp. 1314-1316
-
-
Inkin, V.N.1
Kirpilenko, G.G.2
Kolpakov, A.J.3
-
274
-
-
20744433841
-
Effect of substrate angle on properties of ITO films deposited by cathodic arc ion plating with In-Sn alloy target
-
Wen A.J.-C., Chen K.-L., Yang M.-H., Hsiao W.-T., Chao L.-G., Leu M.-S. Effect of substrate angle on properties of ITO films deposited by cathodic arc ion plating with In-Sn alloy target. Surf. Coat. Technol. 2005, 198:362-366.
-
(2005)
Surf. Coat. Technol.
, vol.198
, pp. 362-366
-
-
Wen, A.J.-C.1
Chen, K.-L.2
Yang, M.-H.3
Hsiao, W.-T.4
Chao, L.-G.5
Leu, M.-S.6
-
275
-
-
0037009721
-
High rate deposition of transparent conducting oxide thin films by vacuum arc plasma evaporation
-
Minami T., Ida S., Miyata T. High rate deposition of transparent conducting oxide thin films by vacuum arc plasma evaporation. Thin Solid Films 2002, 416:92-96.
-
(2002)
Thin Solid Films
, vol.416
, pp. 92-96
-
-
Minami, T.1
Ida, S.2
Miyata, T.3
-
277
-
-
4444358498
-
The future of ZnO light emitters
-
Look D.C., Claflin B., Alivov Y.I., Park S.J. The future of ZnO light emitters. Phys. Stat. Sol. (A) 2004, 201:2203-2212.
-
(2004)
Phys. Stat. Sol. (A)
, vol.201
, pp. 2203-2212
-
-
Look, D.C.1
Claflin, B.2
Alivov, Y.I.3
Park, S.J.4
-
279
-
-
0242290770
-
Deposition of SnO2 coatings using a rectangular filtered vacuum arc source
-
Boxman R.L., Zhitomirsky V., Goldsmith S., David T., Dikhtyar V. Deposition of SnO2 coatings using a rectangular filtered vacuum arc source. 46th Annual Technical Meeting of the Society of Vacuum Coaters 2003, 234-239.
-
(2003)
46th Annual Technical Meeting of the Society of Vacuum Coaters
, pp. 234-239
-
-
Boxman, R.L.1
Zhitomirsky, V.2
Goldsmith, S.3
David, T.4
Dikhtyar, V.5
-
280
-
-
0028748954
-
Annealing and Sb-doping of Sn-O films produced by filtered vacuum arc deposition - structure and electro-optical properties
-
Kaplan L., Benshalom A., Boxman R.L., Goldsmith S., Rosenberg U., Nathan M. Annealing and Sb-doping of Sn-O films produced by filtered vacuum arc deposition - structure and electro-optical properties. Thin Solid Films 1994, 253:1-8.
-
(1994)
Thin Solid Films
, vol.253
, pp. 1-8
-
-
Kaplan, L.1
Benshalom, A.2
Boxman, R.L.3
Goldsmith, S.4
Rosenberg, U.5
Nathan, M.6
-
281
-
-
0029405366
-
Arc behaviour during filtered vacuum arc deposition of Sn-O thin films
-
Kaplan L., Zhitomirsky V.N., Goldsmith S., Boxman R.L., Rusman I. Arc behaviour during filtered vacuum arc deposition of Sn-O thin films. Surf. Coat. Technol. 1995, 76:181-189.
-
(1995)
Surf. Coat. Technol.
, vol.76
, pp. 181-189
-
-
Kaplan, L.1
Zhitomirsky, V.N.2
Goldsmith, S.3
Boxman, R.L.4
Rusman, I.5
-
282
-
-
13544270304
-
STM and XPS study of filtered vacuum arc deposited Sn-O films
-
Kaplan L., Rusman I., Boxman R.L., Goldsmith S., Nathan M., BenJacob E. STM and XPS study of filtered vacuum arc deposited Sn-O films. Thin Solid Films 1996, 291:355-361.
-
(1996)
Thin Solid Films
, vol.291
, pp. 355-361
-
-
Kaplan, L.1
Rusman, I.2
Boxman, R.L.3
Goldsmith, S.4
Nathan, M.5
BenJacob, E.6
-
284
-
-
25644434436
-
2 coatings fabricated on polymer substrates using filtered vacuum arc deposition
-
2 coatings fabricated on polymer substrates using filtered vacuum arc deposition. Thin Solid Films 2005, 492:187-194.
-
(2005)
Thin Solid Films
, vol.492
, pp. 187-194
-
-
Zhitomirsky, V.N.1
David, T.2
Boxman, R.L.3
Goldsmith, S.4
Verdyan, A.5
Soifer, Y.M.6
Rapoport, L.7
-
285
-
-
33751256568
-
Filtered vacuum arc deposition of undoped and doped ZnO thin films: Electrical, optical, and structural properties
-
Goldsmith S. Filtered vacuum arc deposition of undoped and doped ZnO thin films: Electrical, optical, and structural properties. Surf. Coat. Technol. 2006, 201:3993-3999.
-
(2006)
Surf. Coat. Technol.
, vol.201
, pp. 3993-3999
-
-
Goldsmith, S.1
-
286
-
-
0034824148
-
Polycrystalline ZnO thin films on Si (100) deposited by filtered cathodic vacuum arc
-
Xu X.L., Lau S.P., Chen J.S., Chen G.Y., Tay B.K. Polycrystalline ZnO thin films on Si (100) deposited by filtered cathodic vacuum arc. J. Crystal Growth 2001, 223:201-205.
-
(2001)
J. Crystal Growth
, vol.223
, pp. 201-205
-
-
Xu, X.L.1
Lau, S.P.2
Chen, J.S.3
Chen, G.Y.4
Tay, B.K.5
-
287
-
-
0035505779
-
Structural and optical properties of ZnO thin films produced by filtered cathodic vacuum arc
-
Xu X.L., Lau S.P., Tay B.K. Structural and optical properties of ZnO thin films produced by filtered cathodic vacuum arc. Thin Solid Films 2001, 398-399:244-249.
-
(2001)
Thin Solid Films
, vol.398-399
, pp. 244-249
-
-
Xu, X.L.1
Lau, S.P.2
Tay, B.K.3
-
288
-
-
33744933680
-
Review of metal oxide films deposited by filtered cathodic vacuum arc technique
-
Tay B.K., Zhao Z.W., Chua D.H.C. Review of metal oxide films deposited by filtered cathodic vacuum arc technique. Mater. Sci. Eng. R: Reports 2006, 52:1-48.
-
(2006)
Mater. Sci. Eng. R: Reports
, vol.52
, pp. 1-48
-
-
Tay, B.K.1
Zhao, Z.W.2
Chua, D.H.C.3
-
289
-
-
2542464410
-
Internal stress and surface morphology of zinc oxide thin films deposited by filtered cathodic vacuum arc technique
-
Lee H.W., Lau S.P., Wang Y.G., Tay B.K., Hng H.H. Internal stress and surface morphology of zinc oxide thin films deposited by filtered cathodic vacuum arc technique. Thin Solid Films 2004, 458:15-19.
-
(2004)
Thin Solid Films
, vol.458
, pp. 15-19
-
-
Lee, H.W.1
Lau, S.P.2
Wang, Y.G.3
Tay, B.K.4
Hng, H.H.5
-
290
-
-
0035978408
-
Characterization of large area filtered arc deposition technology: Part II - Coating properties and application
-
Gorokhovsky V.I., Bhat D.G., Shivpuri R., Kulkarni K., Bhattacharya R., Rai A.K. Characterization of large area filtered arc deposition technology: Part II - Coating properties and application. Surf. Coat. Technol. 2001, 140:215-224.
-
(2001)
Surf. Coat. Technol.
, vol.140
, pp. 215-224
-
-
Gorokhovsky, V.I.1
Bhat, D.G.2
Shivpuri, R.3
Kulkarni, K.4
Bhattacharya, R.5
Rai, A.K.6
|