PBII deposition of thick carbon coatings from a cathodic arc plasma

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 143-148

  Tarrant, R N ^a   Fujisawa, N ^a   Swain, M V ^a   James, N L ^b   McKenzie, D R ^a   Woodard, J C ^b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b MicroMedical Industries   (Australia)

Author keywords

Amorphous carbon films; Cathodic arc; Electron energy loss spectroscopy (EELS); Nano indentation; Plasma based ion implantation (PBII); Tribology

Indexed keywords

COATINGS; ELECTROLYTES; ELECTRON ENERGY LOSS SPECTROSCOPY; INDENTATION; ION IMPLANTATION; PLASMA APPLICATIONS; SILICON; SUBSTRATES;

ADHERENT COATINGS;

CARBON;

CARBON; CATHODIC ARC PLASMA DEPOSITION; COATING; SOLID LUBRICANT; THICKNESS; TRIBOLOGY;

EID: 0036641135     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00079-8     Document Type: Article

References (17)