SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 200, Issue 14-15, 2006, Pages 4345-4354

A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions

(2) Bilek, M M M a McKenzie, D R a

a UNIVERSITY OF SYDNEY (Australia)

Author keywords

Annealing; Ion assisted deposition; Ion energy; Ion implantation; Model; Stress generation; Stress relief

Indexed keywords

ANNEALING; CHEMICAL BONDS; COATINGS; COMPUTER SIMULATION; DEPOSITION; ION BOMBARDMENT; ION IMPLANTATION; STRESS RELIEF; THIN FILMS;

ION ASSISTED DEPOSITION; ION ENERGY; STRESS GENERATION;

TENSILE STRESS;

ANNEALING; CHEMICAL BONDS; COATINGS; COMPUTER SIMULATION; DEPOSITION; ION BOMBARDMENT; ION IMPLANTATION; STRESS RELIEF; TENSILE STRESS; THIN FILMS;

EID: 33644678557 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.161 Document Type: Article

Times cited : (125)

References (36)

1
- 0000202890
- J.E. Yehoda B. Yang K. Vedam R. Messier J. Vac. Sci. Technol., A, Vac. Surf. Films 6 1988 1631
- (1988) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.6 , pp. 1631
- Yehoda, J.E.¹ Yang, B.² Vedam, K.³ Messier, R.⁴

2
- 0027578647
- C.A. Davis Thin Solid Films 226 1993 30
- (1993) Thin Solid Films , vol.226 , pp. 30
- Davis, C.A.¹

3
- 0000198022
- Y. Lifshitz S.R. Kasi J.W. Rabalais Phys. Rev. Lett. 62 1989 1290
- (1989) Phys. Rev. Lett. , vol.62 , pp. 1290
- Lifshitz, Y.¹ Kasi, S.R.² Rabalais, J.W.³

4
- 0010005593
- D.R. McKenzie D. Muller B.A. Pailthorpe Phys. Rev. Lett. 67 1991 773
- (1991) Phys. Rev. Lett. , vol.67 , pp. 773
- McKenzie, D.R.¹ Muller, D.² Pailthorpe, B.A.³

5
- 0347380889
- N.A. Marks J.M. Bell G.K. Pearce D.R. McKenzie M.M.M. Bilek Diamond Relat. Mater. 12 2003 2003
- (2003) Diamond Relat. Mater. , vol.12 , pp. 2003
- Marks, N.A.¹ Bell, J.M.² Pearce, G.K.³ McKenzie, D.R.⁴ Bilek, M.M.M.⁵

6
- 0002737085
- J. Meneve E. Dekempeneer J. Smeets Diamond Films Technol. 4 1994 23
- (1994) Diamond Films Technol. , vol.4 , pp. 23
- Meneve, J.¹ Dekempeneer, E.² Smeets, J.³

7
- 0031389350
- Q. Wei R.J. Narayan A.K. Sharma J. Sankar J. Narayan Mater. Res. Soc. Symp. Proc. 498 1998 61
- (1998) Mater. Res. Soc. Symp. Proc. , vol.498 , pp. 61
- Wei, Q.¹ Narayan, R.J.² Sharma, A.K.³ Sankar, J.⁴ Narayan, J.⁵

8
- 33751239453
- (submitted for publication)
- J. Houska, J. Vlcek, S. Potocky, J. Cizek, V. Perina, J. Zemek, J. Vac. Sci. Technol., A, Vac. Surf. Films, (submitted for publication).
- J. Vac. Sci. Technol., A, Vac. Surf. Films
- Houska, J.¹ Vlcek, J.² Potocky, S.³ Cizek, J.⁴ Perina, V.⁵ Zemek, J.⁶

9
- 0035499058
- J.S. Chen S.P. Lau G.Y. Chen Z. Sun Y.J. Li B.K. Tay J.W. Chai Diamond Relat. Mater. 10 2001 2018
- (2001) Diamond Relat. Mater. , vol.10 , pp. 2018
- Chen, J.S.¹ Lau, S.P.² Chen, G.Y.³ Sun, Z.⁴ Li, Y.J.⁵ Tay, B.K.⁶ Chai, J.W.⁷

10
- 0001680296
- N.A. Marks Phys. Rev., B 56 5 1997 2441
- (1997) Phys. Rev., B , vol.56 , Issue.5 , pp. 2441
- Marks, N.A.¹

11
- 0242292093
- M.M.M. Bilek R.N. Tarrant D.R. McKenzie S.H.N. Lim D.G. McCulloch IEEE Trans. Plasma Sci. 31 2003 939
- (2003) IEEE Trans. Plasma Sci. , vol.31 , pp. 939
- Bilek, M.M.M.¹ Tarrant, R.N.² McKenzie, D.R.³ Lim, S.H.N.⁴ McCulloch, D.G.⁵

12
- 0032003070
- H. Hoffsäss H. Feldermann R. Merk M. Sebastian C. Ronning Appl. Phys., A 66 1998 153
- (1998) Appl. Phys., A , vol.66 , pp. 153
- Hoffsäss, H.¹ Feldermann, H.² Merk, R.³ Sebastian, M.⁴ Ronning, C.⁵

13
- 0347380889
- N.A. Marks J.M. Bell G.K. Pearce D.R. McKenzie M.M.M. Bilek Diamond Relat. Mater. 12 2003
- (2003) Diamond Relat. Mater. , vol.12
- Marks, N.A.¹ Bell, J.M.² Pearce, G.K.³ McKenzie, D.R.⁴ Bilek, M.M.M.⁵

14
- 84957229255
- D. Nir J. Vac. Sci. Technol., A, Vac. Surf. Films 4 1986 2954
- (1986) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.4 , pp. 2954
- Nir, D.¹

15
- 21544431995
- H. Windischmann J. Appl. Phys. 62 1987 1800
- (1987) J. Appl. Phys. , vol.62 , pp. 1800
- Windischmann, H.¹

16
- 0004215110
- John Wiley and Sons New York
- A. Anders Handbook of Plasma Immersion Ion Implantation and Deposition 2000 John Wiley and Sons New York
- (2000) Handbook of Plasma Immersion Ion Implantation and Deposition
- Anders, A.¹

17
- 9744239806
- S.H.N. Lim D.G. McCulloch M. Bilek D.R. McKenzie Surf. Coat. Technol. 174-175 2003 76
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 76
- Lim, S.H.N.¹ McCulloch, D.G.² Bilek, M.³ McKenzie, D.R.⁴

18
- 1642368056
- B.K. Gan M.M.M. Bilek D.R. McKenzie Yang Shi D.A. Tompsett M.B. Taylor D.G. McCulloch J. Phys. D: Condens. Matter 16 2004 1751
- (2004) J. Phys. D: Condens. Matter , vol.16 , pp. 1751
- Gan, B.K.¹ Bilek, M.M.M.² McKenzie, D.R.³ Yang, S.⁴ Tompsett, D.A.⁵ Taylor, M.B.⁶ McCulloch, D.G.⁷

19
- 5644248317
- M.M.M. Bilek D.R. McKenzie R.N. Tarrant T.W.H. Oates P. Ruch K. Newton-McGee Yang Shi D. Tompsett H.C. Nguyen B.K. Gan D.T. Kwok Contrib. Plasma Phys. 44 5-6 2004 465
- (2004) Contrib. Plasma Phys. , vol.44 , Issue.5-6 , pp. 465
- Bilek, M.M.M.¹ McKenzie, D.R.² Tarrant, R.N.³ Oates, T.W.H.⁴ Ruch, P.⁵ Newton-McGee, K.⁶ Yang, S.⁷ Tompsett, D.⁸ Nguyen, H.C.⁹ Gan, B.K.¹⁰ Kwok, D.T.¹¹

20
- 0037392783
- S.H.N. Lim D.G. McCulloch M. Bilek D.R. McKenzie J. Appl. Phys. 93 7 2003 4283
- (2003) J. Appl. Phys. , vol.93 , Issue.7 , pp. 4283
- Lim, S.H.N.¹ McCulloch, D.G.² Bilek, M.³ McKenzie, D.R.⁴

21
- 2442471908
- R.N. Tarrant D.R. McKenzie M.M.M. Bilek Diamond Relat. Mater. 13 2004 1422
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1422
- Tarrant, R.N.¹ McKenzie, D.R.² Bilek, M.M.M.³

22
- 0038075083
- D.R. McKenzie R.N. Tarrant M. Bilek G. Pearce N.A. Marks D.G. McCulloch S.H.M. Lim NIMB 206 2003 741
- (2003) NIMB , vol.206 , pp. 741
- McKenzie, D.R.¹ Tarrant, R.N.² Bilek, M.³ Pearce, G.⁴ Marks, N.A.⁵ McCulloch, D.G.⁶ Lim, S.H.M.⁷

23
- 17644378069
- M.M.M. Bilek D.R. McKenzie W. Moeller Surf. Coat. Technol. 186 2004 21
- (2004) Surf. Coat. Technol. , vol.186 , pp. 21
- Bilek, M.M.M.¹ McKenzie, D.R.² Moeller, W.³

24
- 18444370805
- (in press)
- M.M.M. Bilek, M. Verdon, L. Ryves, T.W.H. Oates, C.T. Ha, D.R. McKenzie, Thin Solid Films, (in press).
- Thin Solid Films
- Bilek, M.M.M.¹ Verdon, M.² Ryves, L.³ Oates, T.W.H.⁴ Ha, C.T.⁵ McKenzie, D.R.⁶

25
- 1342305086
- B. Abendroth R. Gago A. Kolitsch W. Moeller Thin Solid Films 447-448 2004 131
- (2004) Thin Solid Films , vol.447-448 , pp. 131
- Abendroth, B.¹ Gago, R.² Kolitsch, A.³ Moeller, W.⁴

26
- 0031336524
- A. Antilla L. Lappalainen V.M. Tiainen M. Hakovirta Adv. Mater. 9 1997 1161
- (1997) Adv. Mater. , vol.9 , pp. 1161
- Antilla, A.¹ Lappalainen, L.² Tiainen, V.M.³ Hakovirta, M.⁴

27
- 0000075431
- T.A. Friedmann J.P. Sullivan J.A. Knapp D.R. Tallant D.M. Follstaedt D.L. Medlin P.B. Mirkarimi Appl. Phys. Lett. 71 1997 3820
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3820
- Friedmann, T.A.¹ Sullivan, J.P.² Knapp, J.A.³ Tallant, D.R.⁴ Follstaedt, D.M.⁵ Medlin, D.L.⁶ Mirkarimi, P.B.⁷

28
- 0001296350
- J.P. Sullivan T.A. Friedmann A.G. Baca J. Electron. Mater. 26 1997 1021
- (1997) J. Electron. Mater. , vol.26 , pp. 1021
- Sullivan, J.P.¹ Friedmann, T.A.² Baca, A.G.³

29
- 0031377151
- J.P. Sullivan T.A. Friedmann R.G. Dunn E.B. Stechel P.A. Schultz M.P. Siegal N. Missert Mater. Res. Soc. Symp. Proc. 498 1998 97
- (1998) Mater. Res. Soc. Symp. Proc. , vol.498 , pp. 97
- Sullivan, J.P.¹ Friedmann, T.A.² Dunn, R.G.³ Stechel, E.B.⁴ Schultz, P.A.⁵ Siegal, M.P.⁶ Missert, N.⁷

30
- 0033509536
- B.K. Tay X. Shi E. Liu S.P. Lau L.K. Cheah Z. Sun J. Shi Surf. Coat. Technol. 120-121 1999 448
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 448
- Tay, B.K.¹ Shi, X.² Liu, E.³ Lau, S.P.⁴ Cheah, L.K.⁵ Sun, Z.⁶ Shi, J.⁷

31
- 0001316340
- A.C. Ferrari B. Kleinsorge N.A. Morrison A. Hart V. Stolojan J. Robertson J. Appl. Phys. 85 1999 7191
- (1999) J. Appl. Phys. , vol.85 , pp. 7191
- Ferrari, A.C.¹ Kleinsorge, B.² Morrison, N.A.³ Hart, A.⁴ Stolojan, V.⁵ Robertson, J.⁶

32
- 0034089607
- L.G. Jacobsohn R. Prioli F.L. Freire Jr. G. Mariotto M.M. Lacerda Y.W. Chung Diamond Relat. Mater. 9 2000 680
- (2000) Diamond Relat. Mater. , vol.9 , pp. 680
- Jacobsohn, L.G.¹ Prioli, R.² Freire, F.L.³ Mariotto, G.⁴ Lacerda, M.M.⁵ Chung, Y.W.⁶

33
- 0001079620
- O.R. Monteiro J.W. Ager D.H. Lee R. Yu Lo K.C. Walter M. Nastasi J. Appl. Phys. 88 2000 2395
- (2000) J. Appl. Phys. , vol.88 , pp. 2395
- Monteiro, O.R.¹ Ager, J.W.² Lee, D.H.³ Yu Lo, R.⁴ Walter, K.C.⁵ Nastasi, M.⁶

34
- 33644683409
- (in press) (doi:10.1016/j.diamond.2005.02.001)
- T.W.H. Oates, L. Ryves, F.A. Burgmann, B. Abendroth, M.M.M. Bilek, D.R. McKenzie, D.G. McCulloch, Diamond Relat. Mater. (in press) (doi:10.1016/ j.diamond.2005.02.001).
- Diamond Relat. Mater.
- Oates, T.W.H.¹ Ryves, L.² Burgmann, F.A.³ Abendroth, B.⁴ Bilek, M.M.M.⁵ McKenzie, D.R.⁶ McCulloch, D.G.⁷

35
- 19544391046
- D.G. McCulloch J.L. Peng D.R. McKenzie S.P. Lau D. Sheeja B.K. Tay Phys. Rev., B 70 2004 85406
- (2004) Phys. Rev., B , vol.70 , pp. 85406
- McCulloch, D.G.¹ Peng, J.L.² McKenzie, D.R.³ Lau, S.P.⁴ Sheeja, D.⁵ Tay, B.K.⁶

36
- 0004017453
- (in press)
- Y. Yin, M.M.M. Bilek, D.R. McKenzie, Surf. Coat. Technol., (in press).
- Surf. Coat. Technol.
- Yin, Y.¹ Bilek, M.M.M.² McKenzie, D.R.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.