SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 311, Issue 1-2, 1997, Pages 151-156

The effect of additional ion/plasma assistance in CNx-film deposition based on a filtered cathodic arc

(6) Kuhn M a Spaeth, C a Pintaske, R a Peter, S a Richter, F a Anders, A b

a CHEMNITZ UNIVERSITY OF TECHNOLOGY (Germany)

b LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

Author keywords

Carbon; Ion bombardment; Nitrides; Plasma processing and deposition

Indexed keywords

COMPOSITION; CRYSTAL MICROSTRUCTURE; DEPOSITION; ELECTRIC VARIABLES MEASUREMENT; ION BOMBARDMENT; ION IMPLANTATION; IONIZATION; MASS SPECTROMETRY; MECHANICAL PROPERTIES; NITRIDES; PLASMA APPLICATIONS; PROBES;

CARBON NITRIDE; ELECTRIC PROBE MEASUREMENT; ENERGY RESOLVED MASS SPECTROSCOPY; FILTERED CATHODIC ARC; KAUFMAN ION SOURCE;

THIN FILMS;

EID: 0031387019 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00470-7 Document Type: Article

Times cited : (4)

References (13)

1
- 84907009269
- K.J. Boyd, D. Marton, S.S. Todorov, A.H. Al-Bayati, J. Kulik, R.A. Zuhr, J.W. Rabalais, J. Vac. Sci. Technol. A 13 (1995) 2110.
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2110
- Boyd, K.J.¹ Marton, D.² Todorov, S.S.³ Al-Bayati, A.H.⁴ Kulik, J.⁵ Zuhr, R.A.⁶ Rabalais, J.W.⁷

2
- 0029492322
- H.C. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, Mater. Res. Soc. Symp. Proc. 354 (1995) 93.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.354 , pp. 93
- Hofsäss, H.C.¹ Ronning, C.² Griesmeier, U.³ Gross, M.⁴

3
- 0029250683
- X. Wang, P.J. Martin, T.J. Kinder, Thin Solid Films 256 (1995) 148.
- (1995) Thin Solid Films , vol.256 , pp. 148
- Wang, X.¹ Martin, P.J.² Kinder, T.J.³

4
- 0002477359
- Z.J. Zhang, J. Huang, S. Fan, C.M. Lieber, Mater. Sci. Eng. A 209 (1996) 5.
- (1996) Mater. Sci. Eng. A , vol.209 , pp. 5
- Zhang, Z.J.¹ Huang, J.² Fan, S.³ Lieber, C.M.⁴

5
- 0029390415
- F.-R. Weber, H. Oechsner, Surf. Coat. Technol. 74-75 (1995) 704.
- (1995) Surf. Coat. Technol. , vol.74-75 , pp. 704
- Weber, F.-R.¹ Oechsner, H.²

6
- 0029219919
- J.P. Rivière, D. Texier, J. Delafond, M. Jaouen, E.L. Mathé, J. Chaumont, Mater. Lett. 22 (1995) 115.
- (1995) Mater. Lett. , vol.22 , pp. 115
- Rivière, J.P.¹ Texier, D.² Delafond, J.³ Jaouen, M.⁴ Mathé, E.L.⁵ Chaumont, J.⁶

7
- 0000266019
- C. Spaeth, M. Kühn, U. Kreissig, F. Richter, Diam. Relat. Mater. 6 (1997) 626.
- (1997) Diam. Relat. Mater. , vol.6 , pp. 626
- Spaeth, C.¹ Kühn, M.² Kreissig, U.³ Richter, F.⁴

8
- 0001348377
- M. Zeuner, H. Neumann, J. Meichsner, F. Bigl, F. Scholze, J. Appl. Phys. 80 (1996) 611.
- (1996) J. Appl. Phys. , vol.80 , pp. 611
- Zeuner, M.¹ Neumann, H.² Meichsner, J.³ Bigl, F.⁴ Scholze, F.⁵

9
- 0011418949
- A. Anders, S. Anders, Plasma Sources Sci. Technol. 4 (1995) 571.
- (1995) Plasma Sources Sci. Technol. , vol.4 , pp. 571
- Anders, A.¹ Anders, S.²

10
- 0001222537
- A. Anders, N. Newman, M. Rubin et al., Rev. Sci. Instr. 67 (1996) 905.
- (1996) Rev. Sci. Instr. , vol.67 , pp. 905
- Anders, A.¹ Newman, N.² Rubin, M.³

11
- 0003792707
- Springer, Berlin
- P.M. Chung, L. Talbot, K.J. Touryan, Electric Probes in Stationary and Flowing Plasmas: Theory and Application, Springer, Berlin, 1975.
- (1975) Electric Probes in Stationary and Flowing Plasmas: Theory and Application
- Chung, P.M.¹ Talbot, L.² Touryan, K.J.³

12
- 0028730347
- V.S. Veerasamy, G.A.J. Amaratunga, M. Weiler, J.S. Park, W.I. Milne, Surf. Coat. Technol. 68-69 (1994) 301.
- (1994) Surf. Coat. Technol. , vol.68-69 , pp. 301
- Veerasamy, V.S.¹ Amaratunga, G.A.J.² Weiler, M.³ Park, J.S.⁴ Milne, W.I.⁵

13
- 0028734270
- B. Schultrich, H.J. Scheibe, G. Grandremy, D. Schneider, P. Siemroth, Thin Solid Films 253 (1994) 125.
- (1994) Thin Solid Films , vol.253 , pp. 125
- Schultrich, B.¹ Scheibe, H.J.² Grandremy, G.³ Schneider, D.⁴ Siemroth, P.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.