Charge-state-resolved ion energy distribution functions of cathodic vacuum arcs: A study involving the plasma potential and biased plasmas

Journal of Applied Physics

Volumn 101, Issue 4, 2007, Pages

  Anders, Andŕ ^a   Oks, Efim ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b TOMSK STATE UNIVERSITY OF CONTROL SYSTEMS AND RADIOELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ELECTRIC CHARGE; ELECTRON EMISSION; MAGNETIC FIELD EFFECTS; MASS SPECTROMETERS; PLASMA SHEATHS;

ENERGY DISTRIBUTION; ION ENERGY; PULSED CATHODIC ARCS; STATE DISTRIBUTIONS;

ELECTRIC ARCS;

EID: 33847662421     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2561226     Document Type: Article

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