Diamond-like carbon overcoat for TFMH using filtered cathodic arc system with Ar-assisted arc discharge

Diamond and Related Materials

Volumn 14, Issue 9, 2005, Pages 1508-1516

  Druz, B ^a   Yevtukhov, Y ^a   Zaritskiy, I ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

Ar assisted arc; FCA ta C; Low stress; Overcoat

Indexed keywords

CORROSION RESISTANCE; DEPOSITION; ELECTRIC DISCHARGES; ELECTROSTATICS; MAGNETIC HEADS; MICROSTRUCTURE; STRESSES; THIN FILMS;

AR-ASSISTED ARC; FCA TA-C; LOW STRESS; OVERCOAT;

DIAMOND LIKE CARBON FILMS;

EID: 21344467283     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.04.007     Document Type: Article

References (33)

1. C. Angus, P. Koidl, and S. Domotz J. Mort Plasma Deposited Thin Films 1986 CRC Boca Raton, FL
2. J. Robertson Prog. Solid State Chem. 21 1991 199
3. J. Robertson Pure Appl. Chem. 66 1994 1739
4. S. Anders, C.S. Bhatia, D.B. Bogy, W. Fong, and R.Y. Lo Mater. Res. Soc. Symp. Proc. 517 1998 371
5. J. Koskinen J. Appl. Phys. 63 1988 2094
6. Y. Lifshits, S.R. Kasi, and J. Rabajais Phys. Rev. Lett. 68 1989 520
7. I.I. Aksenov, S.I. Vakula, V.G. Padalka, V.E. Strelnitski, and V. Khoroshikh Sov. Phys. Tech. Phys. 25 1980 1164
8. Shi Xu, B.K. Tay, H.S. Tan, Li Zhong, Y.G. Tu, S.R.P. Silva, and W.I. Milne J. Appl. Phys. 79 1996 7234
9. A.C. Ferrari, and J. Robertson Phys. Rev., B 64 2001 75414
10. P.R. Goglia, J. Berkowitz, J. Hoehn, A. Xidis, and L. Stover Diamond Relat. Mater. 10 2001 271
11. R. Ohr, B. Jacoby, M.V. Gradowski, C. Schug, and H. Hilgers Surf. Coat. Technol. 173 2003 111
12. A.C. Ferrari Surf. Coat. Technol. 180-161 2004 190
13. A. Anders, S. Anders, and I.G. Brown Plasma Sources Sci. Technol. 4 1995 1
14. R.L. Boxman, V. Zhitomirsky, B. Alterkop, E. Gidalevich, I. Beilis, M. Keidar, and S. Goldsmith Surf. Coat. Technol. 86-87 1996 243
15. M.C. Polo, J.L. Andujar, A. Hart, J. Robertson, and W.I. Milne Diamond Relat. Mater. 9 2000 663
16. B. Druz, Y. Yevtukhov, V. Novotny, I. Zaritskiy, V. Kanarov, V. Polyakov, and A. Rukovishnikov Diamond Relat. Mater. 9 2000 668
17. M.K. Puchert, C.A. Davis, D.R. McKenzie, and B.W. James J. Vac. Sci. Technol., A, Vac. Surf. Films 10 1992 3493
18. M.M.M. Bilek, M. Chhowalla, and W.I. Milne Appl. Phys. Lett. 71 1997 1777
19. B. Druz, E. Ostan, S. Distefano, A. Hayes, V. Kanarov, V. Polyakov, A. Rukovishnikov, N. Rossukanyi, and A. Khomich Diamond Relat. Mater. 79 1998 965
20. B. Druz, I. Zaritskiy, J. Hoehn, V. Polyakov, A. Rukovishnikov, and V. Novotny Diamond Relat. Mater. 10 2001 931
21. A. llie, A.C. Ferrari, T. Yagi, S.E. Rodil, and J. Robertson J. Appl. Phys. 90 2001 2024
22. A.C. Ferrari, A. Libassi, B.K. Tanner, V. Stolojan, J. Yuan, L.M. Brown, S.E. Rodil, B. Kleinsorge, and J. Robertson Phys. Rev., B 62 2000 11089
23. S. Prawer, and K.W. Nugent S.R.P. Silva J. Robertson W.I. Milne G.A.J. Amaratunga Amorphous Carbon: State of the Art 1998 World Scientific Publishing Co. Singapore
24. A.C. Ferrari, and J. Robertson Phys. Rev., B 61 2000 14095
25. B. Druz, I. Zaritskiy, Y. Yevtukhov, A. Konchits, M. Valakh, B. Shanina, S. Kolesnik, I. Yanchuk, and Yu. Gromovoy Diamond Relat. Mater. 13 2004 1592
26. B.K. Tay, X. Shi, L.K. Cheah, and D.I. Flynn Thin Solid Films 308-309 1997 268
27. J. Robertson Diamond Relat. Mater. 6 1997 212
28. A.C. Ferrari, S.E. Rodil, and J. Robertson Phys. Rev., B 67 2003 155306
29. A.C. Ferrari, S.E. Rodil, J. Robertson, and W.I. Milne Diamond Relat. Mater. 11 2002 994
30. H. Windischmann J. Appl. Phys. 62 1987 1800
31. H. Windischmann J. Vac. Sci. Technol., A, Vac. Surf. Films 9 1991 2431
32. N.J. Lanno, S. Ahmer, S. Pittal, and J.A. Woollam Mater. Res. Soc. Symp. Proc. 349 1994 535
33. B. Kleinsorge, A.C. Ferrari, J. Robertson, W.I. Milne, S. Waidmann, and S. Hearne Diamond Relat. Mater. 9 2000 643