Ion charge state distributions in high current vacuum arc plasmas in a magnetic field

IEEE Transactions on Plasma Science

Volumn 24, Issue 3, 1996, Pages 1174-1183

  Oks, Efim M ^a   Anders, André ^a   Brown, Lan G ^a   Dickinson, Michael R ^a   MacGill, Robert A ^a  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC ARCS; ELECTRIC CURRENTS; ION SOURCES; IONS; MAGNETIC FIELD EFFECTS; MAGNETIC FIELDS; VACUUM APPLICATIONS;

CHARGE STATE DISTRIBUTIONS; HIGH ARC CURRENT; METAL IONS; PLASMA EXPANSION PROCESS; VACUUM ARC PLASMAS;

PLASMAS;

EID: 0030167468     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.533127     Document Type: Article

References (38)

1. R. L. Boxman and S. Goldsmith, "Principles and applications of vacuum arc coatings," IEEE Trans. Plasma Sei., vol. 17, no. 5, pp. 705-712, 1989.
2. I. G. Brown, "Vacuum arc ion sources for particle accelerators and ion implantation," IEEE Trans. Plasma Sei., vol. 21, no. 5, pp. .137-546, 1993.
3. B. H. Wolf, H. Emig, P. Spädtke, and D. Rück, "Investigation of MEVVA ion source for metal ion injection into accelerators at GSI," Rev. Sa. Instmm., vol. 65, no. 10, pp. 3091-3098, 1994.
4. I. G. Brown, "Vacuum arc ion sources," Rev. Sei. Instrum., vol. 65, no. 10, pp. 3061-3081, 1994.
5. I. G. Brown and X. Godechot, "Vacuum arc ion charge-state distribu-tions," IEEE Trans. Plasma ScL, vol. 19, no. 5, pp. 713-717, 1991.
6. [61 E. Oks, I. G. Brown, M. R. Dickinson, R. A. MacGill, P. Spädtke, H. Emig, and B. H. Wolf, "Elevated ion charge states in vacuum arc plasmas in a magnetic field," Appl. Phys. Lett, vol. 67, no. 2, pp. 200-202, July 10, 1995.
7. I. G. Brown, "Advances in metal ion sources," Nucl. Instrum. Meth. Phys. Res., vol. B37/38, pp. 68-73, 1989.
8. I. G. Brown, J. E. Calvin, R. A. MacGill, and M. W. West, "Multiply charge metal ion beams," Nud. Instrum. Meth. Phys. Res., vol. B43, pp. 45558, 1989.
9. S. P. Bugaev, A. G. Nikolaev, E. M. Oks, P. M. Schanin, and G. Yu. Yushkov, "The 100 kV gas and metal ion source for high current ion implantation," Rev. Sei. lustrum., vol. 63, no. 4, pp. 2222-2224, 1992.
10. "The "TITAN" ion source," Rev. Sei. Instrum., vol. 65, no. 10, pp. 3119-3125, 1994.
11. E. Oks, P. Spädtke, H. Emig, and B. H. Wolf, "Ion beam noise reduction method for MEVVA ion source," Rev. Sei. Instrum., vol. 65, no. 10, pp. 3109-3112, 1994.
12. P. Spädtke, H. Emig, B. H. Wolf, and E. Oks, "Influence of gas added Co MEYVA discharge on chc CALruüleU iuii beam," Rev. 5cV. Inatrutn., vol. 65, pp. 3113-3118, 1994.
13. "MEVVA operation in strong magnetic field," GSI-1994 Sei. Rep., Darmstadt, Germany, Mar. 1995, p. 227.
14. F. J. Paoloni and I. G. Brown. "Some observations of the effect of magnetic field and arc current on the vacuum arc charge state distribution," Rev Sei. Instrum., vol. 66, no. 7, pp. 3855-3858, 1995.
15. A. Anders, S. Anders, B. Jiittner, and I. G. Brown, "Time dependence of vacuum arc parameters," IEEE Trans. Plasma Sei., vol. 21, no. 3, pp. 305-311, 1993.
16. A. Anders, I. G. Brown, M. R. Dickinson, and R. A. MacGill, "High ion charge states in a high-current, short-pulse vacuum arc ion source," in 6th Int. Conf. Ion Sources, Whistler, Canada, Sept. 10-16, 1995; to be published in Rev. Sei. Instrum.
17. S. Anders, A. Anders, and I. Brown, "Macroparticle-free thin films produced by an efficient vacuum arc deposition technique," J. Appl. Phys., vol. 74, no. 6, pp. 4239-4241, 1993.
18. I. G. Brown, J. E. Calvin, R. A. MacGill, and R. T. Wright, "Improved time-of-flight charge slale diagnostic." Rev. Sei. Instrum., vol. 58, no. 9, pp. 1589-1592, 1987.
19. I. G. Brown, Ed., The Physics and Technology of Ion Sources. New York: Wiley, 1989
20. [201 B. Wolf, Ed., Handbook of Ion Sources. Boca Raton: CRC, 1995.
21. G. A. Mesyats and D. I. Proskurovsky, Pulsed Electrical Discharge in Vacuum. Berlin: Springer-Verlag, 1989, ch. 6.
22. J. M. Laffeity, Ed., Vacuum Arcs-Theory and Applications. New York: Wiley, 1980, ch. 4.4
23. S. Anders, "On the state of ionization, nonideally and electric conductivity of the cathode plasma of vacuum arcs," Contrib. Plasma Phys., vol. 26, no. 6, pp. 416-421, 1986.
24. C. Wieckerl, "A multicomponent theory of the cathodic plasma jet in vacuum arcs," Contrib. Plasma Phys., vol. 27, no. 5, pp. 309- 330, 1987,
25. S. Anders and A. Anders. "Frozen state of ionization in a calhodic plasma jet of a vacuum arc," J. Phys. D: Appl. Phys., vol. 21. pp. 213-215, 1988.
26. N. Radie and B. Santic, "Composition of vacuum arc plasma," in Proc. XIII Int. Symp. Discharges and Electrical Insulation in Vacuum, Paris, J. M. Buzzi and A. Septier, Eds., 1988, pp. 217-219.
27. S. Anders and A. Anders, "Effects of nonideally and nonequilibriuin in the cathode spot plasma of vacuum arcs," Contrib. Plasma Phys., vol. 29, no. 4/5, pp. 537-543, 1989.
28. N. B, Volkov and A. Z. Nemirovsky, "The ionic composition of the nonideal plasma produced by a metallic sphere isothermally expanding into vacuum," J. Phys. D: Appl. Phys., vol. 24, pp. 693-701, 1991.
29. A. Anders, S. Anders, A. Förster, and I. G. Brown, "Pressure ionization: Its role in metal vapor vacuum arc plasmas and ion sources," Plasma Sources Sei. Technol., vol. 1, pp. 263-270, 1992.
30. A. Arders, S. Anders, B. JUltner, W. Bütlicher, H. Lück, and G. Schröder, "Pulsed dye laser diagnostics of vacuum arc cathode spots," IEEE Trans. Plasma Sei., vol. 20, no. 4, pp. 466 472, 1992.
31. B. Jtitmer, "The dynamics of arc cathode spots in vacuum," J. Phys. D: Appl. Phys., vol. 28, pp. 516-522, 1995.
32. V. F. Puchkarev and M. B. Bochkarev, "Cathode spot initiation under plasma," J. Phys. D: Appl. Phys., vol. 27. pp. 1214-1219, 1994.
33. P. Debye and E. Huckel, "Theory of electrolytes," Phys. Zeitschrift, vol. 24, pp. 185-206, 1923.
34. R. B. Baksht, A. P. Kudinov, and E. A. Litvinov, "Cathode plasma in the initial sLage of a vacuum discharge," 7h. Tekh. Fiz., vol. 43, no. 1, pp. 146-151, 1973; Sov. Phys.-Techn. Phys., vol. 18, no. 1. pp. 94-97, 1973.
35. H.-W. Drawin and P. Felcnbok, Data for Plasmas in Local Thermodynamic Equilibrium. Paris: Gauthier-Villars, 1965.
36. C. E. Moore, Selected Tables of Atomic Spectra, A: Atomic Energy Levels CI-CV1, 2nd cd. Washington, D.C.: Nat. Stand. Réf. Data Ser., Nat. Bur. Stand. 3, 1970, sec. 3
37. S. Bashkin and J. O. Stoner, Atomic Energy-Level and Gronian Dia-grams, vol. II, Sulfur I-Titanium XXII. Amsterdam: North-Holland, 1978.
38. A. Anders, "Ion charge state distributions of vacuum acr plasmas-The origin of species," submitted to Phys. Rev.