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Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 217-222

The structure and annealing properties of multilayer carbon films

Author keywords

Amorphous; Carbon; Filtered arc; Multilayer; PIII; TEM

Indexed keywords

ANNEALING; CARBON; ELECTRON ENERGY LOSS SPECTROSCOPY; ION IMPLANTATION; MULTILAYERS; TRANSMISSION ELECTRON MICROSCOPY;

DEPOSITED FILMS; HIGH DENSITY LAYERS; MULTILAYER CARBON FILMS; PLASMA IMMERSION ION IMPLANTATION (PIII);

THIN FILMS;

COATING;

EID: 20744455530 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.10.046 Document Type: Article

Times cited : (17)

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