Ion-beam synthesis and growth mechanism of diamond-like materials

Applied Physics A: Materials Science and Processing

Volumn 77, Issue 1, 2003, Pages 39-50

  Ronning, C ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLINE MATERIALS; DEPOSITION; DIAMOND LIKE CARBON FILMS; FILM GROWTH; ION IMPLANTATION; MATHEMATICAL MODELS; NUCLEATION;

DIAMOND-LIKE MATERIALS; MASS-SELECTED ION-BEAM DEPOSITION; SUBPLANTATION;

ION BEAMS;

EID: 0037934341     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-002-2063-7     Document Type: Article

References (156)

1. H.O. Pierson: Handbook of Carbon, Graphite, Diamond and Fullerenes (Noyes, Park Ridge 1993)
2. J.J. Pouch, S.A. Alterovitz (Eds.): Synthesis and Properties of Boron Nitride: Mater. Sci. Forum 54-55 (1990)
3. M.W. Geis, J.C. Angus: Sci. Am. 267, 64 (1992)
4. M.W. Geis, J.C. Angus: Proc. IEEE 79, 669 (1991)
5. S. Nakamura, G. Fasol: The Blue Laser Diode (Springer, Berlin 1997)
6. M. Seal: Interdisciplin. Sci. Rev. 14, 164 (1989)
7. C. Bandis, B.B. Pate: Phys. Rev. Lett. 74, 777 (1995)
8. M.J. Powers, M.C. Benjamin, L.M. Porter, R.J. Nemanich, R.F. Davis, J.J. Cuomo, G.L. Doll, S.J. Harris: Appl. Phys. Lett. 67, 3912 (1995)
9. H. Hofsäss, C. Ronning: 'Ion beam deposition and doping of diamond-like materials.' In Beam Processing of Advanced Materials, ed. by J. Singh, S.M. Copley, J. Mazumder, Conf. Proc. ASM (1996) pp. 29-56
10. S. Matsumoto, Y. Sato, M. Tsutusumi, N. Setaka: J. Mater. Sci. 17, 3106 (1982)
11. Y. Hirose, S. Amanuma: J. Appl. Phys. 68, 6401 (1990)
12. K.V. Ravi: Diamond Relat. Mater. 4, 243 (1995)
13. P. Mirkarimi, K.F. McCarty, D.L. Medlin: Mater. Sci. Eng. R 21, 47 (1997)
14. H. Hofsäss, H. Binder, T. Klumpp, E. Recknagel: Diamond Relat. Mater. 3, 137 (1993)
15. T. Miyazawa, S. Misawa, S. Yoshida, S. Gonda: J. Appl. Phys. 55, 188 (1984)
16. S. Kasi, H. Kang, J.W. Rabalais: Phys. Rev. Lett. 59, 75 (1987)
17. J. Ishikawa, Y. Takeiri, K. Ogawa, T. Taagi: J. Appl. Phys. 61, 2509 (1987)
18. J. Koskinen: J. Appl. Phys. 63, 2094 (1988)
19. D. Marton, K.J. Boyd, A.H. Albayati, S.S. Todorov, J.W. Rabalais: Phys. Rev. Lett. 73, 118 (1994)
20. H. Hofsäss, S. Ronning, U. Greismeier, M. Gross: Mater. Res. Soc. Symp. Proc. 354, 93 (1995)
21. S.S. Todorov, D. Marton, K.J. Boyd, A.H. Al-Bayati, J.W. Rabalais: J. Vac. Sci. Technol. A 12, 3192 (1994)
22. H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, S. Reinke, M. Kuhr: Appl. Phys. Lett. 67, 46 (1995)
23. H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, S. Reinke, M. Kuhr, J. Zweck, R. Fischer: Nucl. Instrum. Methods B 106, 153 (1995)
24. H. Hofsäss, H. Feldermann, R. Merk, M. Sebastian, C. Ronning: Appl. Phys. A 66, 153 (1998)
25. P. Neumaier, G. Dollinger, A. Bergmaier, I. Genchev, L. Görgens, R. Fischer, V. Dose, C. Ronning, H. Hofsäss: Nucl. Instrum. Methods B 183, 48 (2001); submitted to Phys. Rev. Lett.
26. J.F. Ziegler, J.P. Biersack, U. Litmark: The Stopping and Ranges of Ions in Solids (Pergamon, New York 1985)
27. C. Ronning, H. Feldermann, R. Merk, J.-U. Thiele, P. Reinke, H. Hofsäss: Phys. Rev. B 58, 2207 (1998)
28. H. Hofsäss, C. Ronning, H. Feldermann, M. Sebastian: 'Quantitative analysis of chemically-enhanced sputtering during ion beam deposition of carbon nitride thin films'. In Materials Modification and Synthesis by Ion Beam Processing, ed. by D.E. Alexander, N.W. Cheung, B. Park, W. Skorupa: Mater. Res. Soc. Symp. Proc. 438, 575 (1997)
29. C. Ronning, M. Büttner, U. Vetter, H. Feldermann, O. Wondratschek, H. Hofsäss, W. Brunner, F. Au, Q. Li, S.T. Lee: J. Appl. Phys. 90, 4237 (2001)
30. C. Ronning, R. Merk, H. Feldermann, F. Harbsmeier, H. Hofsäss: 'Properties of ion beam deposited tetrahedral fluorinated amorphous carbon films (ta-C:F)'. In Amorphous and Nanostructured Carbon, ed. by T. Allen, B. Coll, J. Robertson, J. Sullivan: Mater. Res. Soc. Symp. Proc. 593, 335 (2000)
31. C. Ronning, H. Feldermann, H. Hofsäss: 'Ion beam deposition and surface processing of cubic boron nitride'. In Proc. 6th Applied Diamond/2nd Frontier Carbon Technology Joint Conf. (ADC/FCT). ed. by Y. Tzeng, K. Miyoshi, M. Yoshikawa, M. Murakawa, Y. Koga, K. Kobashi, G.A.J. Amaratunga (eds.), Nasa/CP 2001-210948 (2001) p. 571
32. H. Feldermann, C. Ronning, H. Hofsäss, Y.-L. Huang, M. Seibt: J. Appl. Phys. 90, 3248 (2001)
33. C. Ronning, H. Feldermann, H. Hofsäss: Diamond Relat. Mater. 9, 1767 (2000)
34. H. Feldermann, R. Merk, H. Hofsäss, C. Ronning, T. Zheleva: Appl. Phys. Lett. 74, 1552 (1999)
35. C. Ronning, A.D. Banks, B.L. McCarson, R. Schlesser, Z. Sitar, R.F. Davis, B.L. Wrad, R.J. Nemanich: J. Appl. Phys. 84, 5046 (1998)
36. H. Hofsäss, H. Feldermann, M. Sebastian, C. Ronning: Phys. Rev. B 55, 13 230 (1997)
37. H. Hofsäss, S. Eyhusen, H. Feldermann, C. Ronning: Phys. Rev. B 65, 115410 (2002)
38. I. Gerhards, C. Ronning, U. Vetter, H. Hofsäss, H. Gibhardt, G. Eckold, Q. Li, S.T. Lee, Y.L. Huang, M. Seibt: Surf. Coat. Technol. 158-159, 114 (2002)
39. J.J. Pouch, A. Alterovitz (Eds.): Properties and Characterization of Amorphous Carbon Films: Mater. Sci. Forum 52-53 (1990)
40. S. Aisenberg, R. Chabot: J. Appl. Phys. 42, 2953 (1971)
41. S. Aisenberg: J. Vac. Sci. Technol. A 2, 369 (1984)
42. P.J. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, J. Koskinen: Phys. Rev. B 48, 4777 (1993)
43. Y. Lifshitz, S.R. Kasi, J.W. Rabalais: Mater. Sci. Forum 52-53, 237 (1989)
44. J. Ullmann, G. Schmidt: Diamond Relat. Mater. 1, 321 (1992)
45. J.J. Cuomo, J.P. Doyle, J. Bruley, J.C. Liu: J. Vac. Sci. Technol. A 9, 2210 (1991)
46. D.R. McKenzie, D. Muller, B.A. Pailthorpe, Z.H. Wang, E. Kravtchinskaia, D. Segal, P.B. Lukins, P.D. Swift, P.J. Martin, G.A.J. Amaratunga, P.H. Gaskell, A. Saeed: Diamond Relat. Mater. 1, 51 (1992)
47. J. Kulik, G.D. Lempert, E. Grossman, D. Marton, J.W. Rabalais, Y. Lifshitz: Phys. Rev. B 52, 15812 (1995)
48. G. Beamson, W.J. Brennan, N.J. Clayden, R.C.K. Jennings: J. Polym. Sci. B - Polym. Phys. 31, 1205 (1993)
49. P.B. Lukins, D.R. McKenzie, A.M. Vassallo, J.V. Hanna: Carbon 31, 569 (1993)
50. H.K. Schmid: Microsc. Microanal. Microstruct. 6, 99 (1995)
51. J. Koskinen, A. Antila, J.P. Hirvonen: Surf. Coat. Technol. 47, 180 (1991)
52. P.J. Martin, S.W. Filipcuk, R.P. Netterfield, J.S. Field, D.F. Whithmall, D.R. McKenzie: J. Mater. Sci. Lett. 7, 410 (1988)
53. G.M. Pharr, D.L. Callahan, D. McAdams, T.Y. Tsui, S. Anders, A. Anders, J.W. Ager III, I.G. Brown, C. Singh, C.S. Bhatia, S.R.P. Silva, J. Robertson: Appl. Phys. Lett. 68, 779 (1996)
54. M. Chhowalla, C.A. Davis, M. Weiler, B. Kleinsorge, G.A.J. Amaratunga: J. Appl. Phys. 79, 2237 (1996)
55. S. Xu, B.T. Tay, S. Tan, L. Zhong, Y.Q. Tu, S.R.P. Silva, W. Milne: J. Appl. Phys. 79, 7234 (1996)
56. R. Lossy, D.L. Pappas, R.A. Roy, J.P. Doyle, J.J. Cuomo: J. Appl. Phys. 77, 4750 (1995)
57. C. Ronning, E. Dreher, J.-U. Thiele, P. Oelhafen, H. Hofsäss: Diamond Relat. Mater. 6, 830 (1997)
58. E. Grossman, G.D. Lempert, J. Kulik, D. Marton, J.W. Rabalais, Y. Lifshitz: Appl. Phys. Lett. 68, 1214 (1996)
59. Y. Lifshitz, G.D. Lempert, E. Grossmann, I. Avigal, C. Uzan-Saguy, R. Kalish, J. Kulik, D. Marton, J.W. Rabalais: Diamond Relat. Mater. 4, 318 (1995)
60. M. Hakovirta, J. Salo, R. Lappalainen, A. Anttila: Phys. Lett. A 205, 287 (1995)
61. C.Z. Wang, K.M. Ho: Phys. Rev. Lett. 71, 1184 (1993)
62. N.A. Marks, D.R. McKenzie, B.A. Pailthorpe, M. Bernasconi, M. Parinello: Phys. Rev. B 54, 9703 (1996)
63. T. Köhler, T. Frauenheim, G. Jungnickel: Phys. Rev. B 52, 11837 (1995)
64. T. Frauenheim, P. Blaudeck, U. Stephan, G. Jungnickel: Phys. Rev. B 48, 4823 (1993)
65. P.C. Kelires: Phys. Rev. B 47, 1829 (1993)
66. B.R. Djordjevic, F.M. Thorpe, F. Wooton: Phys. Rev. B 52, 5685 (1995)
67. H.U. Jäger, K. Albe: J. Appl. Phys. 88, 1129 (2000)
68. A.Y. Belov, H.U. Jäger: Surf. Coat. Technol. 151-152, 128 (2002)
69. J. Robertson: Diamond Relat. Mater. 2, 984 (1993)
70. I. Koponen, M. Hakovirta, R. Lappalainen: J. Appl. Phys. 78, 5837 (1995)
71. C.A. Davis: Thin Solid Films 226, 30 (1993)
72. F. Seitz, J.S. Koehler: Solid State Phys. 2, 305 (1956)
73. S. Uhlmann: Ph.D. thesis, Technical University Chemnitz (1997) [http://www.tu-chemnitz.de/physik/ARCHIV/PROMOT/]
74. R. Fischer, M. Mayer, W. von der Linden, V. Dose: Phys. Rev. E 55, 666 (1997)
75. R. Fischer, M. Mayer, W. von der Linden, V. Dose: Phys. Rev. Lett. 71, 899 (1993)
76. A.Y. Liu, M.L. Cohen: Science 245, 841 (1994)
77. A. Y. Liu, M.L. Cohen: Phys. Rev. B 41, 10 727 (1990)
78. D. Marton, K.J. Boyd, J.W. Rabalais: Int. J. Mod. Phys. B 9, 3527 (1995)
79. B. Enders, Y. Horino, N. Tsubouchi, A. Chayahara, A. Kinomura, K. Fujii: Nucl. Instrum. Methods B 121, 73 (1997)
80. S. Grigull, W. Jacob, D. Henke, A. Mücklich, C. Spaeth, L. Sümmchen: Appl. Phys. Lett. 70, 1387 (1997)
81. H. Xin, C. Lin, W. Xu, L. Wang, S. Zou, X. Wu, X. Shi, H. Zhu: J. Appl. Phys. 79, 2364 (1996)
82. X.W. Su, H.W. Song, Q.Y. Zhang, F.Z. Cui: Nucl. Instrum. Methods B 111, 59 (1996)
83. X.W. Su, H.W. Song, Q.Y. Zhang, F.Z. Cui: J. Phys.: Condens. Matter 7, L517 (1995)
84. I. Gouzman, R. Brener, A. Hofman: Thin Solid Films 253, 90 (1994)
85. L. Galan, I. Montero, F. Rueda: Surf. Coat. Technol. 83, 103 (1996)
86. S.S. Todorov, D. Marton, K.J. Boyd, A.H. Al-Bayati, J.W. Rabalais: J. Vac. Sci. Technol. A 12, 3192 (1994)
87. H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross: MRS Symp. Proc. 354, 93 (1995)
88. F.D.A. Aarao Reis, D.F. Franceschini: Appl. Phys. Lett. 74, 209 (1999)
89. D. Marton, K.J. Boyd, A.H. Al-Bayati, S.S. Todorov, J.W. Rabalais: Phys. Rev. Lett. 73, 118 (1994)
90. R. Zhong-Min, D. Yuan-Cheng, Y. Zhi-Feng, L. Fu-Ming, L. Jing, R. Yun-Zhu, Z. Xiang-Fu: Nucl. Instrum. Methods B 117, 249 (1996)
91. A.K. Sharma, P. Ayyub, M.S. Multani, K.P. Adhi, S.B. Ogale, M. Sunderaraman, D.D. Upadhyay, S. Banerjee: Appl. Phys. Lett. 69, 3489 (1996)
92. S. Kumar, K.S.A. Butcher, T.L. Tansley: J. Vac. Sci. Technol. A 14, 2687 (1996)
93. K.M. Yu, M.L. Cohen, E.E. Haller, W.L. Hansen, A.Y. Liu, I.C. Wu: Phys. Rev. B 49, 5034 (1994)
94. C. Niu, Y.Z. Lu, C.M. Lieber: Science 261, 334 (1993)
95. T.-Y. Yen, C.-P. Chou: Appl. Phys. Lett. 67, 2801 (1995)
96. L.A. Bursill, P. JuLin, V.N. Guararie, A.V. Orlov, S. Prawer: J. Mater. Res. 10, 2277 (1995)
97. D.M. Teter, R.J. Hemley: Science 271, 53 (1996)
98. J.V. Badding, D.C. Nesting: Chem. Mater. 8, 535 (1996)
99. N.V. Trubkin, M.I. Novgorodova: Crystallogr. Rep. 41, 982 (1996)
100. N. Hellgren, J. Guo, C. Sathe, A. Agui, J. Nordgren, Y. Luo, H. Agren, J.E. Sundgren: Appl. Phys. Lett. 79, 4348 (2001)
101. J.A. Theil: J. Vac. Sci. Technol. B 17, 2397 (1999)
102. H. Yokomichi, A. Masuda: J. Appl. Phys. 86, 2468 (1999)
103. H. Yang, D.J. Tweet, Y. Ma, T. Nguyen: Appl. Phys. Lett. 73, 1514 (1998)
104. K. Endo, K. Shinoda, T. Tatsumi: J. Appl. Phys. 86, 2739 (1999)
105. D.M. Bhusari, A.S. Kumbar, S.T. Kshirsagar: J. Appl. Phys. 77, 54 (1995)
106. T. Shirafuji, A. Kamisawa, T. Shimasaki, Y. Hayashi, S. Nishino: Thin Solid Films 374, 256 (2000)
107. J.W. Yi, Y.H. Lee, B. Farouk: Thin Solid Films 374, 103 (2000)
108. T.W. Mounstsier, J.A. Samuels: Thin Solid Films 332, 362 (1998)
109. U. Müller, R. Hauert, B. Oral, M. Tobler: Surf. Coat. Technol. 76-77, 367 (1995)
110. K. Endo, T. Tatsumi: J. Appl. Phys. 78, 1370 (1995)
111. K. Endo, T. Tatsumi: Appl. Phys. Lett. 68, 2864 (1996)
112. K. Endo, T. Tatsumi: Jpn. J. Appl. Phys. 37, 1809 (1998)
113. Y. Ma, H. Yang, J. Guo, C. Sathe, A. Agui, J. Nordgren: Appl. Phys. Lett. 72, 3353 (1998)
114. R. d'Agostino, R. Lamendola, P. Favia, A. Giquel: J. Vac. Sci. Technol. A 12, 308 (1994)
115. H. Yokomichi, T. Hayashi, A. Masuda: Appl. Phys. Lett. 72, 2704 (1998)
116. X. Wang, H.R. Harris, K. Bouldin, H. Temkin, S. Gangopadhyay, M.D. Strathman, M. West: J. Appl. Phys. 87, 621 (2000)
117. A. Grill: Thin Solid Films 398-399, 527 (2001)
118. J.P. Chang, H.W. Krautter, W. Zhu, R.L. Opila, C.S. Pai: J. Vac. Sci. Technol. A 17, 2969 (1999)
119. M. Hakovirta, X.M. He, M. Nastasi: J. Appl. Phys. 88, 1456 (2000)
120. H. Yokomichi, A. Masuda: Vacuum 59, 771 (2000)
121. O. Mishma, J. Tanaka, S. Yamaoka, O. Fukunaga: Science 238, 181 (1987)
122. O. Mishma, K. Era, J. Tanaka, S. Yamaoka: Appl. Phys. Lett. 53, 962 (1988)
123. E.L. Muetterties: The Chemistry of Boron and Its Compounds (Wiley, New York 1967) p. 141
124. A. Zunger, A. Katzir, A. Halperin: Phys. Rev. B 13, 5560 (1976)
125. N.E. Christensen, S. Satpathy, Z. Pawlowska: Phys. Rev. B 36, 1032 (1987)
126. L. Vel, G. Demazeau, J. Etourneau: Mater. Sci. B 10, 149 (1991)
127. H. Sachdev, R. Haubner, B. Lux, H. Nöth: Diamond Relat. Mater. 6, 286 (1997)
128. S. Reinke, M. Kuhr, W. Kulisch: Diamond Relat. Mater. 4, 272 (1995)
129. S. Bohr, R. Haubner, B. Lux: Diamond Relat. Mater. 4, 714 (1995)
130. D.J. Kester, R. Messier: J. Appl. Phys. 72, 504 (1992)
131. T. Ichiki, T. Momose, T. Yoshida: J. Appl. Phys. 75, 1330 (1994)
132. T. Ikeda: Appl. Phys. Lett. 61, 786 (1992)
133. T. Wada, N. Yamashita: J. Vac. Sci. Technol. A 10, 515 (1992)
134. M. Lu, A. Bousetta, R. Sukach, A. Bensaoula, K. Walters, K. Eipers-Smith, A. Schultz: Appl. Phys. Lett. 64, 1514 (1994)
135. D. Litvinov, R. Clarke: Appl. Phys. Lett. 71, 1969 (1997)
136. W.J. Zhang, M. Tansho, S. Matsumoto, T. Mori: J. Appl. Phys. 89, 1734 (2001)
137. S. Reinke, M. Kuhr, W. Kulisch: Diamond Relat. Mater. 3, 341 (1994)
138. J. Hahn, F. Richter, R. Pintaske, M Röder, E. Schneider, Th. Welzel: Surf. Coat. Technol. 92, 129 (1997)
139. K.F. McCarty, P.B. Mirkarimi, D.L. Medlin, T.A. Friedmann, J.C. Barbour: Diamond Relat. Mater. 5, 1519 (1996)
140. P. Reinke, P. Oelhfen, H. Feldermann, C. Ronning, H. Hofsäss: J. Appl. Phys. 88, 5597 (2000)
141. H.G. Boyen, P. Widmayer, D. Schwertberger, N. Deyneka, P. Ziemann: Appl. Phys. Lett. 76, 709 (2000)
142. H.G. Boyen, P. Widmayer, D. Schwertberger, N. Deyneka, P. Ziemann: presented at the 2001 Spring Meeting of the German Physical Society (DPG)
143. S.J. Harris, G.L. Doll, D.C. Chance, A.M. Weiner: Appl. Phys. Lett. 67, 2314 (1995)
144. I. Konyashin, V. Khvostov, V. Babaev, M. Guseva, J. Bill, F. Aldinger: Diamond Relat. Mater. 8, 2053 (1999)
145. A.E.W. Jarfors: J. Mater. Sci. 34, 4533 (1999)
146. I. Karakaya, W.T. Thompson: Bull. Alloy Phase Diagrams 9, 226 (1988)
147. C.R. Bamford: Colour Generation and Control in Glass, Glass Science and Technology, Vol. 2 (Elsevier, Amsterdam 1977)
148. L. Gao, Z.-Y. Li: J. Appl. Phys. 87, 1620 (2000)
149. R.H. Magruder III., R.F. Haglund Jr., L. Yang, J.E. Wittig, R.A. Zuhr: J. Appl. Phys., 76, 708 (1994)
150. J.M. Ballesteros, J. Solis, R. Serna, C.N. Afonso: Appl. Phys. Lett. 74, 2791 (1999)
151. D. Babonneau, J. Briatico, F. Petroff, T. Cabioc'h, A. Naudon: J. Appl. Phys. 87, 3432 (2000)
152. M. Yu, Y. Liu, A. Moser, D. Weller, D.J. Sellmyer: Appl. Phys. Lett. 75, 3992 (1999)
153. M. Yu, Y. Liu, D.J. Sellmyer: J. Appl. Phys. 87, 6959 (2000)
154. I. Panagiotopoulos, S. Stavroyiannis, D. Niarchos, J.A. Christodoulides, G.C. Hadjipanayis: J. Appl. Phys. 87, 4358 (2000)
155. L.V. Lutsev, S.V. Yakovlev, V.I. Siklitski: Phys. Solid State 42, 1139 (2000)
156. Y.J. Li, S.P. Lau, B.K. Tay, Z. Sun, G.Y. Chen, J.S. Chen, X.Z. Ding, X. Shi: Appl. Phys. Lett. 77, 2021 (2000)