A model for particle growth in arc deposited armophous carbon films

Diamond and Related Materials

Volumn 7, Issue 9, 1998, Pages 1375-1380

  Drescher, D ^a,d   Koskinen, J ^b   Scheibe, H J ^a   Mensch, A ^c  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^c DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^d SIEMENS AG   (Germany)

Author keywords

Diamond like carbon; Nodular growth

Indexed keywords

AMORPHOUS FILMS; CARBON; COMPUTER SIMULATION; ELECTRIC ARCS; EVAPORATION; FILM GROWTH; SCANNING ELECTRON MICROSCOPY;

CARBON FILMS; DIAMOND-LIKE FILMS; NODULAR GROWTH;

DIAMOND FILMS;

EID: 0032165371     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(98)00211-8     Document Type: Article

References (10)

1. D.R. McKenzie, Y. Yin, N.A. Marks, C.A. Davis, B.A. Pailthorpe, G.A.J. Amaratunga, V.S. Veerashammy, Diamond and Related Materials 3 (1994) 353.
2. J. Koskinen, A. Anttila, J.-P. Hirvonen, Surface and Coatings Technology 47 (1991) 180.
3. I.I. Aksenov, V.E. Strel'nitskij, Surface and Coatings Technology 47 (1991) 98.
4. D. Drescher, H.-J. Scheibe, A. Mensche, P. Alers, Ch. Dyer, Diamond and Related Materials 5 (1996) 968.
5. K.A. Pischow, J. Koskinen, M. Adamik, P.B. Barna, Ceramics International 22 (1996) 49.
6. H.-J. Scheibe, P. Siemroth, IEEE Transactions on Plasma Science 18 (1990) 917.
7. M.A. Tamor, W.C. Vassell, Journal of Applied Physics 76 (1994) 3823.
8. D.R. McKenzie, D. Muller, B.A. Pailthorpe, Physics Review Letters 67 (1991) 773.
9. P.J. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, J. Koskinen, Physics Review B48 (1993) 4777.
10. H.-P. Kaukonen, R.M. Nieminen, Physics Review Letters 68 (1992) 620.