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Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 94-97

Effects of substrate bias and growth temperature on properties of aluminium oxide thin films by using filtered cathodic vacuum arc

(3) Tay, B K a Zhao, Z W a Sun, C Q a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

Aluminium oxide; FCVA; Mechanical properties; Optical properties

Indexed keywords

CATHODES; COMPRESSIVE STRESS; ELASTIC MODULI; HARDENING; REFRACTIVE INDEX; RESIDUAL STRESSES; SUBSTRATES; SUPERCONDUCTING TRANSITION TEMPERATURE; THERMAL EFFECTS; THIN FILMS; VACUUM APPLICATIONS;

FILTERED CATHODE VACUUM ARC (FCVA); GROWTH TEMPERATURE; RESIDUAL COMPRESSIVE STRESS; SUBSTRATE BIASES;

ALUMINUM COMPOUNDS;

CATHODIC ARC PLASMA DEPOSITION;

EID: 20844441327 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.10.049 Document Type: Article

Times cited : (17)

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