Temporal development of the composition of Zr and Cr cathodic arc plasma streams in a N2 environment

Journal of Applied Physics

Volumn 94, Issue 3, 2003, Pages 1414-1419

  Rosén, Johanna ^a   Anders, André ^b   Hultman, Lars ^a   Schneider, Jochen M ^c  

^a LINKÖPING UNIVERSITY   (Sweden)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; HIGH PRESSURE EFFECTS; IGNITION; THIN FILMS; ZIRCONIUM;

PLASMA COMPOSITION GRADIENTS;

PLASMA THEORY;

EID: 0042011447     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1591079     Document Type: Article

References (28)

1. A. Anders, S. Anders, B. Jüttner, W. Bötticher, H. Lück, and G. Schröder, IEEE Trans. Plasma Sci. 20, 466 (1992).
2. G. A. Mesyats, Cathode Phenomena in a Vacuum Discharge: The Break-down, the Spark and the Arc (Nauka, Moscow, 2000).
3. B. Jüttner, J. Phys. D 34, R103 (2001).
4. J. E. Greene, S. A. Barnett, J.-E. Sundgren, and A. Rocket, in Ion Beam Assisted Thin Film Growth, edited by K. Itoh (Elsevier, Amsterdam, 1989), Chap. 5.
5. I. G. Brown, Rev. Sci. Instrum. 65, 3061 (1994).
6. A. Anders, Phys. Rev. E 55, 969 (1997).
7. E. Oks and G. Yushkov, in Proceedings of the 17th International Symposium on Discharges and Electrical Insulation in Vacuum, Berkeley, CA, 1996, p. 584.
8. P. Spädtke, H. Emig, and B. H. Wolf, Rev. Sci. Instrum. 65, 3113 (1994).
9. S. Anders and B. Jüttner, IEEE Trans. Plasma Sci. 19, 705 (1991).
10. J. M. Schneider, A. Anders, I. Brown. B. Hjörvarsson, and L. Hultman, Appl. Phys. Lett. 75, 612 (1999).
11. I. G. Brown, J. E. Galvin, R. A. MacGill, and R. T. Wright, Rev. Sci. Instrum. 58, 1589 (1987).
12. J. M. Schneider, A. Anders, B. Hjörvarsson, and L. Hultman, Appl. Phys. Lett. 76, 1531 (2000).
13. M. Kühn and F. Richter, Surf. Coat. Technol. 89, 16 (1997).
14. M. Ellrodt and M. Kühn, Contrib. Plasma Phys. 36, 687 (1996).
15. G. E. Kim, J.-L. Meunier, and F. Ajersch, IEEE Trans. Plasma Sci. 23, 1001 (1995).
16. Thermodynamic Properties of Inorganic Materials: Pure Substances, Landolt-Börnstein IV, Vol. 19A1 (Springer, Berlin, 1999).
17. G. Yushkov and A. Anders, IEEE Trans. Plasma Sci. 26, 220 (1998)
18. I. Barin, and O. Knacke, Thermochemical Properties of Inorganic Substances (Springer, Berlin, 1973).
19. Handbook of Chemistry and Physics, 72nd ed. (CRC Press, Boston, 1991).
20. L. E. Tooth, Transition Metal Carbides and Nitrides (Academic, New York, 1971).
21. Phase Equilibria, Crystallographic and Thermodynamic Data of Binary Alloys, Landolt-Börnstein IV Vol. 5D (Springer, Berlin, 1999).
22. Diffusion in Solid Materials and Alloys, Landolt-Börnstein III, Vol. 26 (Springer, Berlin, 1990).
23. R. E. Reed-Hill, Physical Metallurgy Principles, 2nd ed. (PWS, Boston, 1973).
24. Physical Metallurgy, edited by R. W. Cahn and P. Haasen, 3rd ed. (North-Holland, Amsterdam, 1983).
25. B. Chapman, Glow Discharge Processes (Wiley, New York, 1980).
26. A. Anders and G. Yushkov, J. Appl. Phys. 91, 4824 (2002).
27. M. M. M. Bilek, P. J. Martin, and D. R. McKenzie, J. Appl. Phys. 83, 2965 (1998).
28. M. M. M. Bilek, M. Chhowalla, and W. I. Milne, Appl. Phys. Lett. 71, 1777 (1997).