(Alx:Tiy)N coatings deposited by cathodic vacuum arc evaporation

Journal of Advanced Materials

Volumn 31, Issue 2, 1999, Pages 41-47

  Vetter, Jörg ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DUCTILITY; EVAPORATION; HARDNESS; METAL CUTTING; MONOLAYERS; MULTILAYERS; OXIDATION RESISTANCE; STEEL; TITANIUM NITRIDE; VAPOR DEPOSITION;

BIAS VOLTAGE; CATHODIC VACUUM ARC EVAPORATION;

PROTECTIVE COATINGS;

EID: 0032651438     PISSN: 10709789     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (18)

1. Freller, H. and Haessler, H., "Thin Solid Films," 153, pp.67-74, 1987.
2. Ertürk, E., Heuvel, H.-J. and Dederichs, H.-G., Surf. Coat. Technol, 39-40 pp. 435-444, 1989.
3. Coll, B.F., Fontana, R., Gates, A. and Sathrum, P., Mat. Sci. Engineering A140, pp.816-824, 1991.
4. Tanaka, Y., Gür, T.M., Kelley, M., Hagstrom, S.B., Ikeda, T., Wakihira, K. and Satoh, H., J. Vac. Sci. Technol, A10, pp. 1749-1756, 1992.
5. Lugscheider, E., Knotek, O., Löffler, F., Barimani, C., Guerreiro, S. and Zimmermann, H., Surf. Coat. Technol, 76-77, pp.700-705, 1995.
6. Boxman, R.L., Martin, P.J. and Sanders, D.M., Handbook of Vacuum Arc Science and Technology, Noyes Publications, New Jersey, 1995.
7. Vetter, J., Surf. Coat. Technol, 76-77, pp. 719-724, 1995.
8. Münz, W.-D., Hurkmans, T., Keiren, G. and Trinh, T., J. Vac. Sci. Technol, A11, pp.2583-2589, 1993.
9. Scholl, H.J., Ein Beitrag zur Abscheidung nitridischer Hartstoffschichten mittels Arc-Ion-Plating, thesis, RWTH Aachen, 1993.
10. Vetter, J., Scholl, H.J. and Knotek, O., Surf. Coat. Technol, 74-75, pp.286-291, 1995.
11. Vetter, J., Lugscheider, E. and Guerreiro, S., "(Cr:Al)N Coatings Deposited by the Cathodic Vacuum Arc Evaporation," International Conf. Plasma Surface Engineering, Garmisch Partenkirchen 1996, Surf. Coat. Technol, 1997.
12. Vetter, J., Burgmer, W., Dederichs, H.G. and Perry, A.J., Surf. Coat. Technol, 61, pp. 209-214, 1993.
13. Prengel, H.-G., PVD-Arc-Ion-plating zur Herstellung von nitridischen Titan-Aluminium-Basis-Hartstoffschichten, Fortschritt-Berichte VDI, Reihe 5: Grund-und Werkstoffe, Nr. 205, VDI-Verlag, Düsseldorf, 1990.
14. Freller, H. and Schack, P., DE 3709468, 1988.
15. Sue, J.A. and True, H.H., EP0418001, 1991.
16. Ikeda, T. and Satoh, H., Thin Solid Films, 195, pp.99-110, 1991.
17. Klages, C.-P., in Schichtkunde Schnittstelle zwischen Verfahren und Anwendung, VDI-Verlag GmbH, Düsseldorf, pp. 32-50, 1991.
18. Bosse, H., Zum tribologischen Verhalten beschichteter metallischer Werkstoffe, Forschungsbericht Universität Otto von Guericke 1992.