Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing

Applied Physics Letters

Volumn 68, Issue 6, 1996, Pages 779-781

  Pharr, George M ^a   Callahan, Daniel L ^a   McAdams, Shaun D ^a   Tsui, Ting Y ^a   Anders, Simone ^b   Anders, André ^b   Ager III, Joel W ^b   Brown, Ian G ^b   Bhatia, C Singh ^c   Silva, S R P ^d   Robertson, John ^d  

^a Rice University   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c IBM   (United States)

^d UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001356099     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116530     Document Type: Article

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