Cylindrical spike model for the formation of diamondlike thin films by ion deposition

Applied Physics A: Materials Science and Processing

Volumn 66, Issue 2, 1998, Pages 153-181

  Hofsass H ^a   Feldermann, H ^a   Merk, R ^a   Sebastian, M ^a   Ronning, C ^a  

^a UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CRYSTAL ATOMIC STRUCTURE; CUBIC BORON NITRIDE; DEPOSITION; ELECTRON TRANSITIONS; FILM GROWTH; ION BEAMS; MATHEMATICAL MODELS; PHONONS; THIN FILMS;

DIAMOND LIKE CARBON THIN FILMS; ION BEAM ASSISTED DEPOSITION; ION BEAM DEPOSITION;

AMORPHOUS FILMS;

EID: 0032003070     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050652     Document Type: Article

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