Ion beam-induced erosion and humidity effect of MgO protective layer prepared by vacuum arc deposition

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 95-99

  Kim, Jong Kuk ^a   Lee, Eun Sung ^a   Kim, Dong Ho ^a   Kim, Do Geun ^a,b  

^a Korea Institute of Machine and Materials   (South Korea)

^b Samgsung SDI   (South Korea)

Author keywords

Arc deposition; MgO; Moisture effect; Packing density; PDP

Indexed keywords

ATMOSPHERIC HUMIDITY; ELECTRIC POTENTIAL; ELECTRON EMISSION; EROSION; GLASS; LIGHT TRANSMISSION; PLASMA DISPLAY DEVICES; SURFACES; X RAY DIFFRACTION;

MOISTURE EFFECTS; PACKING DENSITY; VACUUM ARC DEPOSITION;

MAGNESIA;

EID: 1342302497     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.09.029     Document Type: Conference Paper

References (11)

1. Byrum B.W. Jr. IEEE Trans. Electron Dev. 22:1975;685.
2. Ugrade T., Iemori T., Osawa M., Nakayama N., Morita I. IEEE Trans. Electron Dev. 23:1976;313.
3. Rho S.J., Jeong S.M., Baik H.K., Song K.M. Thin Solid Films. 355-356:1999;55.
4. Harris M., Macleod H.A., Ogura S., Pelletier E., Vidal B. Thin Solid Films. 57:1979;173.
5. Kim R.H., Kim Y.H., Park J.W. Vacuum. 61:2001;37.
6. Aspnes D.E. Thin Solid Films. 89:1982;249.
7. Kim R.H., Kim Y.H., Park J.W. Thin Solid Films. 376:2000;183.
8. Uchiike H., Harada S. SID 91 Dig. 1991;444.
9. Machda K., Uchiike H., Sadaki H. SID 92 Dig. 1992;531.
10. Son C.Y., Cho J.H., Park J.W. J. Vac. Sci. Technol. A. 17:(5):1999;2619.
11. Lee J.H., Eun J.H., Park S.Y., Kim S.G., Kim H.J. IMID 02 Dig. 2002;228.