Molecular-dynamics study of the fundamental processes involved in subplantation of diamondlike carbon

Physical Review Letters

Volumn 81, Issue 3, 1998, Pages 641-644

  Uhlmann, S ^a,c   Frauenheim, T H ^a,d   Lifshitz, Y ^b  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b SOREQ NUCLEAR RESEARCH CENTER   (Israel)

^c UNIVERSITY OF UTAH   (United States)

^d UNIVERSITY OF PADERBORN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002537944     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.81.641     Document Type: Article

References (43)

1. S. Aisenberg and R. Chabot, J. Appl. Phys., 42, 2953 (1971).
2. D. R. McKenzie, Y. Yin, N. A. Marks, C. A. Davis, B. A. Pailthorpe, G. A. Amaratunga, and V. S. Veerasamy, Diam. Relat. Mater., 3, 353 (1994).
3. Y. Lifshitz, Diam. Relat. Mater., 5, 388 (1996).
4. S. Xu, I. K. Tay, H. S. Tan, L. Zhong, Y. Q. Tu, S. R. P. Silva, and W. I. Milne, J. Appl. Phys., 79, 7234 (1996).
5. H. J. Steffen, C. D. Roux, D. Marton, and J. W. Rabalais, Phys. Rev. B, 44, 3981 (1991).
6. Y. Lifshitz, G. D. Lempert, S. Rotter, I. Avigal, C. Uzan-Saguy, and R. Kalish, Diam. Relat. Mater., 2, 285 (1993).
7. Y. Lifshitz, G. D. Lempert, and E. Grossman, Phys. Rev. Lett., 72, 2753 (1994).
8. J. Kulik, G. D. Lempert, E. Grossmann, D. Marton, J. W. Rabalais, and Y. Lifshitz, Phys. Rev. B, 52, 15 812 (1995).
9. Y. Lifshitz, G. D. Lempert, E. Grossmann, I. Avigal, C. Uzan-Saguy, R. Kalish, J. Kulik, D. Marton, and J. W. Rabalais, Diam. Relat. Mater., 4, 318 (1995).
10. E. Grossman, G. D. Lempert, J. Kulik, D. Marton, J. W. Rabalais, and Y. Lifshitz, Appl. Phys. Lett., 68, 1214 (1996).
11. Y. Lifshitz, G. D. Lempert, E. Grossman, I. Avigal, C. Uzan-Saguy, R. Kalish, J. Kulik, D. Marton, and J. W. Rabalais, Diam. Relat. Mater., 3, 542 (1994).
12. J. Ishikawa, Y. Takeiri, K. Ogawa, and T. Takagi, J. Appl. Phys., 61, 2509 (1987).
13. J. P. Hirvonen, J. Koskinen, R. Lappalainen, and A. Antilla, Mater. Sci. Forum, 52/53, 197 (1990).
14. Y. Lifshitz, S. R. Kasi, and J. W. Rabalais, Mater. Sci. Forum, 52/53, 237 (1990).
15. D. R. McKenzie, D. Muller, and B. A. Pailthorpe, Phys. Rev. Lett., 67, 773 (1991).
16. P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. Amaratunga, W. I. Milne, and J. Koskinen, Phys. Rev. B, 48, 4872 (1993).
17. M. Hakorvita, J. Salo, R. Lappalainen, and A. Antilla, Phys. Lett. A, 205, 287 (1995).
18. Y. Lifshitz, S. R. Kasi, J. W. Rabalais, and W. Eckstein, Phys. Rev. B, 41, 10 468 (1990).
19. C. A. Davis, Thin Solid Films, 226, 30 (1993).
20. J. Robertson, Diam. Relat. Mater., 2, 984 (1993).
21. J. Robertson, Diam. Relat. Mater., 3, 361 (1994).
22. I. Koponen, M. Hakorvita, and R. Lappalainen, J. Appl. Phys., 78, 5837 (1995).
23. Y. Lifshitz, C. Roux, K. J. Boyd, W. Eckstein, and J. W. Rabalais, Nucl. Instrum. Meth. Phys. Res., Sect. B, 83, 351 (1993).
24. D. Marton, K. J. Boyd, J. W. Rabalais, and Y. Lifshitz, J. Vac. Sci. Technol. A, 16, 455 (1998).
25. P. C. Kelires, Phys. Rev. Lett., 68, 1855 (1992).
26. P. C. Kelires Phys. Rev. B, 47, 1829 (1993).
27. H.-P. Kaukonen and R. M. Nieminen, Phys. Rev. Lett., 68, 620 (1992).
28. N. A. Marks, D. R. McKenzie, and B. A. Pailthorpe, Phys. Rev. B, 53, 4117 (1996).
29. H. Hofsaess and C. Ronning, ASM Proceedings of the International Conference on Beams, Cleveland, Ohio, 1995 (to be published).
30. D. R. McKenzie, Rep. Prog. Phys., 59, 1611 (1996).
31. Y. Lifshitz, in The Physics of Diamond, A. Paoletti and A. Tucciarone, International School of Physics Enrico Fermi Vol. 135 (IOS Press, Amsterdam, 1997), p. 209.
32. J. Robertson, Surf. Coat. Technol., 50, 185 (1992).
33. D. Porezag, Th. Frauenheim, Th. Koehler, G. Seifert, and R. Kaschner, Phys. Rev. B, 51, 12 947 (1995).
34. Th. Koehler, Th. Frauenheim, and G. Jungnickel, Phys. Rev. B, 52, 11 837 (1995).
35. Th. Frauenheim, G. Jungnickel, Th. Koehler, and U. Stephan, J. Non-Cryst. Solids, 182, 186 (1995).
36. G. Jungnickel, D. Porezag, Th. Frauenheim, M. Heggie, and W. Lambrecht, Phys. Status Solidi (a), 154, 109 (1996).
37. G. Jungnickel, D. Porezag, Th. Frauenheim, M. Heggie, W. Lambrecht Appl. Phys. A, 64, 321 (1997).
38. C. A. Davis, K. M. Knowles, and G. A. J. Amaratunga, Surf. Coat. Technol., 76-77, 316 (1995).
39. B. W. Dodson, Mater. Res. Soc. Symp. Proc., 128, 137 (1989).
40. C. A. Davis, G. A. J. Amaratunga, and K. M. Knowles, Phys. Rev. Lett., 80, 3280 (1998).
41. Y. Lifshitz et al., presented at the 7th European Conference on Diamond and Related Materials, 1996, Tours, France (unpublished).
42. S. Uhlmann, dissertation, Technische Universitaet Chemnitz, 1997, http://archiv.tu-chemnitz.de/pub/1997/0031
43. S. Uhlmann, Th. Frauenheim, and Y. Lifshitz (to be published).