Effect of substrate angle on properties of ITO films deposited by cathodic arc ion plating with In-Sn alloy target

Surface and Coatings Technology

Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 362-366

  Wen, Alex Jyh Chung ^a   Chen, Kai Lin ^a   Yang, Ming Huei ^a   Hsiao, Wei Tien ^a   Chao, Lin Gen ^a   Leu, Ming Sheng ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

B Scanning electron microscopy; C Ion plating; D Oxygen; X Cathodic arc ion plating; Indium tin oxide

Indexed keywords

ABSORPTION; CARRIER MOBILITY; HEATING; INDIUM ALLOYS; MORPHOLOGY; SURFACES;

CATHODIC ARC ION PLATING (CAIP); FILM STRUCTURES; FILTERING TECHNIQUES; INDIUM TIN OXIDE (ITO) FILMS;

THIN FILMS;

ELECTROPLATING;

EID: 20744433841     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.10.082     Document Type: Article

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