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Volumn 126, Issue 1, 2000, Pages 81-88

Comparison of filtered high-current pulsed arc deposition (φ-HCA) with conventional vacuum arc methods

Author keywords

Hard coatings; Metallic films; Optical films; Plasma filter; Vacuum arc

Indexed keywords

DEPOSITION; HARDNESS; METALLIC FILMS; OPTICAL FILMS; VACUUM APPLICATIONS;

EID: 0034599699     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00544-2     Document Type: Article
Times cited : (49)

References (19)
  • 15
    • 11744363632 scopus 로고    scopus 로고
    • Advanced metallization and interconnect systems for ULSI application
    • in: R. Haveman, J. Schmitz, H. Komiyama, K. Tsubouchi (Eds.), Pittsburgh
    • A. Kobayashi, Advanced metallization and interconnect systems for ULSI application, in: R. Haveman, J. Schmitz, H. Komiyama, K. Tsubouchi (Eds.), Mater. Res. Soc. Proceed., Pittsburgh, 1996, pp. 177-183.
    • (1996) Mater. Res. Soc. Proceed. , pp. 177-183
    • Kobayashi, A.1
  • 18
    • 0342823483 scopus 로고    scopus 로고
    • Advanced metallization and interconnect systems for ULSI application
    • in: R. Havemann, J. Schmitz, H. Komiyama, K. Tsubouchi (Eds.), Pittsburgh
    • C. Wenzel, N. Urbansky, P. Siemroth, T. Schülke, Advanced metallization and interconnect systems for ULSI application, in: R. Havemann, J. Schmitz, H. Komiyama, K. Tsubouchi (Eds.), Mater. Res. Soc. Proceed., Pittsburgh, 1996, pp. 185-190.
    • (1996) Mater. Res. Soc. Proceed. , pp. 185-190
    • Wenzel, C.1    Urbansky, N.2    Siemroth, P.3    Schülke, T.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.