Transport of vacuum arc plasma through an off-plane double bend filtering duct

Thin Solid Films

Volumn 345, Issue 1, 1999, Pages 1-6

  Shi, X ^a   Tay, B K ^a   Tan, H S ^a   Liu, E ^a   Shi, J ^a   Cheah, L K ^a   Jin, X ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; COMPUTER SIMULATION; DEPOSITION; DIAMOND FILMS; ELECTRIC FIELD EFFECTS; FILM PREPARATION; MAGNETIC FILTERS; MATHEMATICAL MODELS; PROBES; TRANSPORT PROPERTIES;

DRIFT APPROXIMATION MODEL; LANGMUIR PROBES; OFF-PLANE DOUBLE ARC FILTERING DUCT; VACUUM ARC PLASMA;

PLASMAS;

EID: 0033531836     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00095-4     Document Type: Article

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