S-shaped magnetic macroparticle filter for cathodic arc deposition

IEEE Transactions on Plasma Science

Volumn 25, Issue 4, 1997, Pages 670-674

  Anders, Simone ^a   Anders, André ^a   Dickinson, Michael R ^a   MacGill, Robert A ^a   Brown, Ian G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Films; Filtering; Plasma generation; Vacuum arcs

Indexed keywords

AMORPHOUS FILMS; LANGMUIR BLODGETT FILMS; MAGNETIC THIN FILMS; PLASMA APPLICATIONS; SPUTTER DEPOSITION; VACUUM APPLICATIONS;

CATHODIC ARC DEPOSITION; VACUUM ARCS;

MAGNETIC FILTERS;

EID: 0031206910     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.640683     Document Type: Article

References (18)

1. I. I. Aksenov, S. I. Vakula, V. G. Padalka, V. E. Strel'nitskii, and V. M. Khoroshikh, "High-efficient source of pure carbon plasma, " Sov. Phys. Tech. Phys., vol. 25, pp. 1164-1166, 1980.
2. D. R. McKenzie, D. Muller, B. A. Pailthorpe, Z. H. Wang, E. Kravtchinskaia, D. Segal, P. B. Lukins, P. J. Martin, G. Amaratunga, P. H. Gaskell, and A. Saeed, "Properties of tetrahedral amorphous carbon prepared by vacuum arc deposition," Diamond Rel. Mater., vol. 1, pp. 51-59, 1991.
3. V. N. Zhitomirsky, L. Kaplan, R. L. Boxman, and S. Goldsmith, "Ion current distribution in a filtered vacuum arc deposition system," Surf. Coatings Technol., vol. 76, pp. 190-196, 1995.
4. A. Anders, S. Anders, and I. G. Brown, "Transport of vacuum arc plasmas through magnetic macroparticle filters," Plasma Sources Sci. Technol., vol. 4, pp. 1-12, 1995.
5. B. F. Coll, P. Sathrum, R. Aharonov, and M. A. Tamor, "Diamond-like carbon films synthesized by cathodic arc evaporation," Thin Solid Films, vol. 209, pp. 165-173, 1992.
6. R. Lossy, D. L. Pappas, R. A. Roy, J. J. Cuomo, and V. M. Sura, "Filtered arc deposition of amorphous diamond," Appl. Phys. Lett., vol. 61, pp. 171-173, 1992.
7. S. Falabella and D. M. Sanders, "Comparison of 2 filtered cathodic arc sources," J. Vac. Sci. Technol. A, vol. 10, pp. 394-397, 1992.
8. A. Anders, S. Anders, I. G. Brown, and I. V. Ivanov, "Low energy ion implantation/deposition as a film synthesis and bonding tool," Mater. Res. Soc. Proc., vol. 316, p. 833, 1994.
9. S. Anders, A. Anders, and I. G. Brown, "Macroparticle-free thin films produced by an efficient vacuum arc deposition technique," J. Appl. Phys., vol. 74, pp. 4239-4241, 1993.
10. T. Schülke, A. Anders, and P. Siemroth, "Macroparticle filtering of high-current vacuum arc plasmas," in Proc. 17th Int. Symp. Discharges Electr. Insul., Berkeley, CA, 1997, pp. 914-917.
11. S. Anders, A. Anders, and I. G. Brown, "Focused injection of vacuum arc plasmas into curved magnetic filters," J. Appl. Phys., vol. 75, pp. 4895-1899, 1994.
12. C. W. Kimblin, "A review of arcing phenomena in vacuum and in the transition to atmospheric pressure arcs," IEEE Trans. Plasma Sci., vol. PS-15, pp. 322-330, 1982.
13. V. N. Zhitomirsky, R. L. Boxman, and S. Goldsmith, "Unstable arc operation and cathode spot motion in a magnetically filtered vacuum-arc deposition system," J. Vac. Sci. Technol. A, vol. 13, pp. 2233-2240, 1995.
14. I. I. Aksenov, V. A. Belous, V. G. Padalka, and V. M. Khoroshikh, "Apparatus to rid the plasma of a vacuum arc of macroparticles," Instrum. Exp. Tech., vol. 21, pp. 1416-1418, 1978.
15. A. Anders, S. Anders, and I. G. Brown, "Effect of duct bias on transport of vacuum arc plasmas through curved magnetic filters," J. Appl. Phys., vol. 75, pp. 4900-4905, 1994.
16. P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amaratunga, W. I. Milne, and J. Koskinen, "Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy," Phys. Rev. B, vol. 48, pp. 4777-4782, 1993.
17. S. Anders, A. Anders, I. G. Brown, B. Wei, K. Komvopoulos, J. W. Ager, III, and K. M. Yu, "Effect of vacuum are deposition parameters on the properties of amorphous carbon thin films," Surf. Coatings Technol., vol. 68/69, pp. 388-393, 1994.
18. G. M. Pharr, D. L. Callahan, S. D. McAdams, T. Y. Tsui, S. Anders, A. Anders, J. W. Ager, III, I. G. Brown, C. S. Bhatia, S. R. P. Silva, and J. Robertson, "Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing," J. Appl. Phys., vol. 68, pp. 779-781, 1996.