Process Diagnostics

Springer Series in Materials Science

Volumn 109, Issue , 2008, Pages 255-300

  Bradley, James W ^a   Welzel, Thomas ^b  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Charge Carrier Density; Duty Cycle; Electron Energy Distribution Function; Plasma Potential; Reactive Magnetron

Indexed keywords

EID: 79957722976     PISSN: 0933033X     EISSN: 21962812     Source Type: Book Series    
DOI: 10.1007/978-3-540-76664-3_8     Document Type: Chapter

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