Time-resolved optical emission spectroscopy of pulsed DC magnetron sputtering plasmas

Journal of Physics D: Applied Physics

Volumn 38, Issue 11, 2005, Pages 1769-1780

  Lopez, J ^a   Zhu, W ^a   Freilich, A ^a   Belkind, A ^a   Becker, K ^a  

^a Stevens Institute of Technology   (United States)

Author keywords

Alumina; Dielectrics; Optical Emission Spectroscopy; Pulsed Power; Reactive sputtering; Time resolved

Indexed keywords

CHARGE COUPLED DEVICES; CLOSED LOOP CONTROL SYSTEMS; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; FREQUENCIES; LIGHT EMISSION; SPECTROSCOPIC ANALYSIS; THIN FILMS;

DECAY TIMES; PULSED MODULATION; REACTIVE MAGNETRON SPUTTERING; TIME-RESOLVED OPTICAL EMISSION SPECTROSCOPY;

MAGNETRON SPUTTERING;

EID: 21144454434     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/38/11/018     Document Type: Conference Paper

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