Experimental investigation of plasma dynamics in dc and short-pulse magnetron discharges

Plasma Sources Science and Technology

Volumn 15, Issue 2, 2006, Pages 256-265

  Seo, Sang Hun ^a   In, Jung Hwan ^a   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; DC MACHINERY; ELECTRIC DISCHARGES; ELECTRON ENERGY ANALYZERS; ENERGY TRANSFER; MAGNETRONS; MAXWELL EQUATIONS; THERMAL EFFECTS;

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); MAGNETRON DISCHARGES; PLASMA DYNAMICS; SHORT-PULSE MAGNETRONS;

PLASMA DENSITY;

EID: 33646339393     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/2/011     Document Type: Conference Paper

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