Observations of the long-term plasma evolution in a pulsed dc magnetron discharge

Plasma Sources Science and Technology

Volumn 14, Issue 3, 2005, Pages 419-431

  Backer H ^a   Bradley, J W ^b  

^a Pilkington Group Limited   (United Kingdom)

^b UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHARACTERIZATION; ELECTRIC FIELD EFFECTS; FREQUENCIES; MAGNETIC PROPERTIES; PLASMA DENSITY; PRESSURE EFFECTS; PROBES; TITANIUM;

ELECTRON TEMPERATURE; MAGNETIC FIELD LINES; MAGNETRON DISCHARGE; PLASMA EVOLUTION;

PLASMAS;

EID: 23844513462     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/3/003     Document Type: Article

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