Two-dimensional spatial survey of the plasma potential and electric field in a pulsed bipolar magnetron discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 6, 2004, Pages 2459-2468

  Vetushka, A ^a   Karkari, S K ^a   Bradley, J W ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ELECTRIC FIELDS; ELECTRIC POTENTIAL; EQUIVALENT CIRCUITS; FREQUENCIES; MAGNETIC FIELDS; MAGNETRONS; MATHEMATICAL MODELS; PERTURBATION TECHNIQUES; PLASMA SHEATHS; PRESSURE EFFECTS;

PLASMA POTENTIAL; SPATIAL EVOLUTION; SPATIAL MAPS; TEMPORAL EVOLUTION;

PLASMA SOURCES;

EID: 10244244999     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1810167     Document Type: Article

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