Plasma emission redistribution in a single cycle of a pulsed de magnetron

New Journal of Physics

Volumn 8, Issue , 2006, Pages

  Zhu, W ^a   Buyle, G ^b,e   Lopez, J ^c   Shanmugmurthy, S ^d   Belkind, A ^d   Becker, K ^d   De Gryse, R ^b  

^a OLD DOMINION UNIVERSITY   (United States)

^b GHENT UNIVERSITY   (Belgium)

^c SAINT PETER'S UNIVERSITY   (United States)

^d STEVENS INSTITUTE OF TECHNOLOGY   (United States)

^e CENTEXBEL   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; COMPUTER SIMULATION; LIGHT EMISSION; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; MONTE CARLO METHODS; PLASMA THEORY;

MAGNETRON PLASMA; MAGNETRON RACE TRACK; PLASMA EMISSIONS; SPATIAL DISTRIBUTIONS;

MAGNETRONS;

EID: 33747881142     PISSN: 13672630     EISSN: 13672630     Source Type: Journal    
DOI: 10.1088/1367-2630/8/8/146     Document Type: Article

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