Using pulsed direct current power for reactive sputtering of Al 2O3

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1934-1940

  Belkind, A ^a   Freilich, A ^a   Scholl, R ^b  

^a STEVENS INSTITUTE OF TECHNOLOGY   (United States)

^b Advanced Energy Industries Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATING CURRENT; DC REACTIVE SPUTTERING; DIRECT CURRENT POWER; DUAL CATHODES; DUTY CYCLES; POWER CONSUMED; POWER EFFICIENCY; PULSED DC POWER; PULSED DIRECT CURRENT; PULSED-POWER;

ELECTRIC DISCHARGES; PLASMA DENSITY; REACTIVE SPUTTERING;

DC POWER TRANSMISSION;

EID: 0000985829     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581706     Document Type: Conference Paper

References (33)

1. S. Maniv and W. D. Westwood, J. Vac. Sci. Technol. 17, 743 (1980).
2. G. O. Este and W. D. Westwood, in 98/1 Reactive Sputtering, edited by W. D. Westwood (Institute of Physics Publishing, Bristol and Philadelphia, 1998), p. A5.2:1.
3. W. D. Westwood, in Handbook of Plasma Processing Technology, edited by S. M. Rossnagel, J. J. Cuomo, and W. D. Westwood (Noyes Publications, Park Ridge, NJ, 1990), p. 233.
4. M. Wright and T. Beardow, J. Vac. Sci. Technol. A 4, 388 (1986).
5. Cormia, U.S. Patent No. 4,046,659 (6 September, 1977) (Aireo, Inc.).
6. G. Este and W. D. Westwood, J. Vac. Sci. Technol. A 6, 1845 (1988).
7. D. A. Glocker, J. Vac. Sci. Technol. A 11, 2989 (1993).
8. R. Scholl, 36th Annual Technical Conference Proceedings, Dallas (Society of Vacuum Coaters, 1993), p. 405.
9. S. Schiller, K. Goedicke, J. Reschke, V. Kirchke, S. Schneider, and F. Milde, Surf. Coat. Technol. 61, 331 (1993).
10. R. Scholl, 37th Annual Technical Conference Proceedings, Boston (Society of Vacuum Coaters, 1994), p. 312.
11. W. D. Sproul, M. E. Graham, M. S. Wong, S. Lopez, D. Li, and R. A. Scholl, J. Vac. Sci. Technol. A 13, 1188 (1995).
12. B. Stauder, F. Perry, and C. Frantz, Surf. Coat. Technol. 74/75, 320 (1995).
13. F. Fietzke, K. Goedicke, and W. Hempel, Surf. Coat. Technol. 86-87, 657 (1996).
14. P. J. Kelly, O. A. Abu-Zeid, R. D. Arnell, and J. Tong, Surf. Coat. Technol. 86-87, 28 (1996).
15. V. Kirchoff and T. Kopte, 39th Annual Technical Conference Proceedings, Philadelphia, PA (Society of Vacuum Coaters, 1996), p. 117.
16. J. M. Schneider, W. D. Sproul, A. R. T. Lefkow, A. Matthews, and J. Rechner, 39th Annual Technical Conference Proceedings, Philadelphia, PA (Society of Vacuum Coaters, 1996), p. 168.
17. J. C Sellers, 39th Annual Technical Conference Proceedings, Philadelphia, PA (Society of Vacuum Coaters, 1996), p. 123.
18. O. Zywitzki, G. Hoetzsch, F. Fietzke, and K. Goedicke, Surf. Coat. Technol. 82, 169 (1996).
19. G. Hoetzch, O. Zywitzki, and H. Sahm, 40th Annual Technical Conference Proceedings, New Orleans, LA (Society of Vacuum Coaters, 1997), p. 77.
20. S. Schiller, V. Kirchoff, K. Goedicke, and P. Frach, 40th Annual Technical Conference Proceedings, New Orleans, LA (Society of Vacuum Coaters, 1997), p. 129.
21. J. M. Schneider and W. D. Sproul, 40th Annual Technical Conference Proceedings, New Orleans, LA (Society of Vacuum Coaters, 1997), p. 301.
22. P. Yashar, J. Rechner, M. S. Wong, W. D. Sproul, and S. A. Bamett, Surf. Coat. Technol. 94-95, 333 (1997).
23. O. Zywitzki and G. Hoetzsch, Surf. Coat. Technol. 94-95, 303 (1997).
24. A. Belkind, A. Freilich, and R. Scholl, 41 th Annual Technical Conference Proceedings, Boston, 1998 (Society of Vacuum Coaters, 1998), p. 321.
25. J. M. Schneider and W. D. Sproul, in 98/1 Reactive Sputtering, edited by W. D. Westwood (Institute of Physics Publishing, Bristol and Philadelphia, 1998), p. A5.1:1.
26. A. Belkind, A. Freilich, and R. Scholl, Surf. Coat. Technol. (to be published).
27. A. Belkind and Z. Orban, J. Vac. Sci. Technol. A 11, 642 (1993).
28. J. P. Booth and N. Sadeghi, J. Appl. Phys. 70, 611 (1991).
29. M. A. Lieberman, Plasma Sources Sci. Technol. 5, 145 (1996).
30. H. Ohsaki, Y. Yashibana, J. Shimizu, and T. Oyama, Thin Solid Films 281-282, 213 (1996).
31. H. Bingsen and C. Zhou, Surf. Coat. Technol. 50, 111 (1992).
32. K. Wasa and S. Hayakawa, Handbook of Sputter Deposition Technology (Noyes Publications, Park Ridge, NJ, 1991).
33. J. Szczyrbowski and G. Teschner, 38th Annual Technical Conference Proceedings, Chicago (SVC, 1995), p. 389.