Dual-anode magnetron sputtering

Surface and Coatings Technology

Volumn 163-164, Issue , 2003, Pages 695-702

  Belkind, A ^a   Zhao, Z ^a   Scholl, R ^b  

^a STEVENS INSTITUTE OF TECHNOLOGY   (United States)

^b Advanced Energy Industries Incorporated   (United States)

Author keywords

A12O3; Anode; Dielectrics; Magnetron; Reactive sputtering

Indexed keywords

ANODES; CLOSED LOOP CONTROL SYSTEMS; DIELECTRIC MATERIALS; ELECTRIC TRANSFORMERS;

REACTIVE SPUTTERING;

MAGNETRON SPUTTERING;

ANODE; DIELECTRIC PROPERTY; SPUTTERING;

EID: 0037472588     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00659-X     Document Type: Article

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