Mid-frequency reactive sputtering of dielectrics: Al2O3

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 88-93

  Belkind, A ^a   Freilich, A ^a   Song, G ^a   Zhao, Z ^a   Scholl, R ^b   Bixon, E ^c  

^a STEVENS INSTITUTE OF TECHNOLOGY   (United States)

^b Advanced Energy Industries Incorporated   (United States)

^c U S ARMY   (United States)

Author keywords

Biasing; Dielectrics; Reactive sputtering

Indexed keywords

ALUMINA; DIELECTRIC MATERIALS; FREQUENCIES; SUBSTRATES;

DUAL-MAGNETRON SYSTEM (DMS);

SPUTTERING;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18544411652     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00369-4     Document Type: Article

References (32)

1. Scholl, R., in 36th Annual Technical Conference Proceedings. 1993. Dallas: Society of Vacuum Coaters, p. 405
2. Kelly P.J. Abe-Zeid O.A. Arnell R.D. Tong J. Surf. Coat. Technol. 86-87 1996 28
3. Kirchoff, V., Kopte, T. in 39th Annual Technical Conference Proceedings. 1996. Philadelphia, PA: Society of Vacuum Coaters, p. 117
4. Schiller, S., Kirchoff, V., Goedicke, K., Frach, P., in 40th Annual Technical Conference Proceedings. 1997. New Orlean, LA: Society of Vacuum Coaters, p. 129
5. Hoetzch, G., Zywitzki, O., Sahm, H., in 40th Annual Technical Conference Proceedings. 1997. New Orlean, LA: Society of Vacuum Coaters, p. 77
6. Schneider J.M. Sproul W.D. Glocker D.A. Ihah S.I. Handbook of Thin Film Process Technology: 98/1 Reactive Sputtering 1998 A5.1:1E-A5.2:12 Institute of Physics Publishing Bristol, Philadelphia
7. Belkind, A., Freilich, A., Scholl, R., in 41st Annual Technical Conference of the Society of Vacuum Coaters. 1998. Boston, April 20-23, p. 321
8. Este G.O. Westwood W.D. J. Vac. Sci. Technol. A 6 1988 1845
9. Scherer M. Schmitt J. Latz R. Schatz M. J. Vac. Sci. Technol. A 10 1992 1772
10. Beiswenger S. Brauer F.G. Dicken W. Szcayrbowski J. Surf. Coat. Technol. 60 1993 624
11. Sieck, P.A., Hill, R.J., Vossen, J.L., Schulz, S.C., Patent EPB 99-14 0632142
12. Brauer G. Dicken W. Szczyrbowski J. Surf. Coat. Technol. 94-95 1997 658
13. Heister, U., Bruch, J., Willms, T., Braatz, C., Kastner, A., Brauer, G., in 42nd Annual Technical Conference Proceedings of SVC 1999. Chicago. IL, p. 34
14. Rettich, T., Weidemuth, P. in 42nd Annual technical Conference Proceedings of SVC 1999. p. 147
15. Ruske M. Brauer G. Pistner J. Pfafflin U. Szczyrbowski J. Thin Solid Films 351 1999 146
16. Glocker, D.A. in 43rd Annual technical Conference Proceedings of the SVC. 2000, p. 81
17. Scholl, R., Belkind, A., Zhao, Z. in 42nd Annual Technical Conference Proceedings. 1999. Chicago: Society of Vacuum Coaters, p. 169
18. Belkind, A., Zhao, Z., Carter, D., McDonough, G., Roche, G., Scholl, R. in 44th Annual Technical Conference of the Society of Vacuum Coaters. 2001. Philadelphia, p. 130
19. Reversz A.G. Fehlner F.P. Oxid. Met. 15 1981 297
20. Knotek O. Loffler F. Vincenzini P. High Performance Ceramic Films and Coatings 1991 645 Elsevier Science Publishers
21. Prengel H.G. Heinrich W. Roder G. Wendt K.H. Surf. Coat. Technol. 68/69 1994 217
22. DeMasi-Marcin J.T. Gupta D.K. Surf. Coat. Technol. 68/69 1994 1
23. Leushake U. Krell T. Schulz U. Peters M. Kaysser W.A. Rabin B.H. Surf. Coat. Technol. 94/95 1997 131
24. Kennedy C.E. Smilgys R.V. Kirkpatrics D.A. Ross J.S. Thin Solid Films 304 1997 303
25. Higashi G.S. Fleming C.G. Appl. Phys. Lett. 55 1989 1963
26. Belkind, A., Song, W., McDonough, G., Scholl, R., in 45th Annual Technical Conference of the Society of Vacuum Coaters, 2002: p. 184
27. Pulker H.K. Coatings on Glass 1999 401 Elsevier New York
28. Wang J. Yu Y.-H. Lee S.C. Chung Y.-W. Surf. Coat. Technol. 146-147 2001 189
29. Li Q. Yu Y.-H. Bathia C.S. Marks L.D. Lee S.C. Chung Y.W. J. Vac. Sci. Technol. A 18 2000 2333
30. Frieser R.G. J. Electrochem. Soc. 113 1966 357
31. Iida K. Tsujida T. Jpn. J. Appl. Phys. 11 1972 840
32. Belkind A. Zhao Z. Scholl. R. Surf. Coat. Technol. 163-164 2003 695