SCOPUS 정보 검색 플랫폼

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 299-306

Plasma enhanced surface treatments using electron beam-generated plasmas

Author keywords

E beam Generated Plasma; Magnetron; Nitriding; PACVD; Pulsed; Reactive Sputtering

Indexed keywords

ELECTRON BEAMS; MAGNETRON SPUTTERING; MASS SPECTROMETRY; PLASMAS; STAINLESS STEEL; TITANIUM NITRIDE;

ALUMINUM FILM ADHESION; LARGE AREA PLASMA PROCESSING SYSTEM (LAPPS); PLASMA ENHANCED SURFACE TREATMENTS; SURFACE PRETREATMENTS;

SURFACE TREATMENT;

PLASMA TREATMENT;

EID: 14644397964 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.08.195 Document Type: Article

Times cited : (26)

References (27)

1
- 0032070182
- R.F. Fernsler W.M. Manheimer R.A. Meger J. Mathew D.P. Murphy R.E. Pechacek J.A. Gregor Phys. Plasmas 5 1998 2137
- (1998) Phys. Plasmas , vol.5 , pp. 2137
- Fernsler, R.F.¹ Manheimer, W.M.² Meger, R.A.³ Mathew, J.⁴ Murphy, D.P.⁵ Pechacek, R.E.⁶ Gregor, J.A.⁷

2
- 0034250338
- W.M. Manheimer R.F. Fernsler M. Lampe R.A. Meger Plasma Sources Sci. Technol. 9 2000 370
- (2000) Plasma Sources Sci. Technol. , vol.9 , pp. 370
- Manheimer, W.M.¹ Fernsler, R.F.² Lampe, M.³ Meger, R.A.⁴

3
- 0035393964
- D. Leonhardt S.G. Walton D.D. Blackwell W.E. Amatucci D.P. Murphy R.F. Fernsler R.A. Meger J. Vac. Sci. Technol., A, Vac. Surf. Films 19 2001 1367
- (2001) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.19 , pp. 1367
- Leonhardt, D.¹ Walton, S.G.² Blackwell, D.D.³ Amatucci, W.E.⁴ Murphy, D.P.⁵ Fernsler, R.F.⁶ Meger, R.A.⁷

4
- 0035394659
- S.G. Walton D. Leonhardt D.D. Blackwell D.P. Murphy R.F. Fernsler R.A. Meger J. Vac. Sci. Technol., A, Vac. Surf. Films 19 2001 1325
- (2001) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.19 , pp. 1325
- Walton, S.G.¹ Leonhardt, D.² Blackwell, D.D.³ Murphy, D.P.⁴ Fernsler, R.F.⁵ Meger, R.A.⁶

5
- 14644398311
- (November)
- D. Leonhardt Vac. Technol. Coat. 2001 (November) 24
- (2001) Vac. Technol. Coat. , pp. 24
- Leonhardt, D.¹

6
- 1342268116
- D. Leonhardt C. Muratore S.G. Walton D.D. Blackwell R.F. Fernsler R.A. Meger Surf. Coat. Technol. 177-178 2004 682
- (2004) Surf. Coat. Technol. , vol.177-178 , pp. 682
- Leonhardt, D.¹ Muratore, C.² Walton, S.G.³ Blackwell, D.D.⁴ Fernsler, R.F.⁵ Meger, R.A.⁶

7
- 17644395281
- C. Muratore D. Leonhardt S.G. Walton D.D. Blackwell R.F. Fernsler R.A. Meger Surf. Coat. Technol. 186 2004 40
- (2004) Surf. Coat. Technol. , vol.186 , pp. 40
- Muratore, C.¹ Leonhardt, D.² Walton, S.G.³ Blackwell, D.D.⁴ Fernsler, R.F.⁵ Meger, R.A.⁶

8
- 4344684125
- C. Muratore S.G. Walton R.F. Fernsler D. Leonhardt D.D. Blackwell R.A. Meger J. Vac. Sci. Technol. A 22 2004 1530
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 1530
- Muratore, C.¹ Walton, S.G.² Fernsler, R.F.³ Leonhardt, D.⁴ Blackwell, D.D.⁵ Meger, R.A.⁶

9
- 14644390646
- AIMCAL procedure for qualitatively determining metal adhesion, TP-104-87
- Eldridge M. Mount II (Ed.), 3rd ed. (August)
- AIMCAL procedure for qualitatively determining metal adhesion, TP-104-87 in: Eldridge M. Mount II (Ed.), Association of Industrial Metallizers, Coaters and Laminators (AIMCAL) Metallizing Technical Reference 3rd ed. 2001 (August)
- (2001) Association of Industrial Metallizers, Coaters and Laminators (AIMCAL) Metallizing Technical Reference

10
- 14644409484
- (submitted for publication)
- D. Leonhardt, et al., Plasma Sources Technol., (submitted for publication).
- Plasma Sources Technol.
- Leonhardt, D.¹

11
- 0003804605
- New York: Wiley Interscience
- L. Christophorou Atomic and Molecular Radiation Physics 1971 Wiley Interscience New York
- (1971) Atomic and Molecular Radiation Physics
- Christophorou, L.¹

12
- 0003730831
- Wiley Interscience New York
- M.A. Lieberman A.J. Lichtenberg Principles of Plasma Discharges and Materials Processing 1994 Wiley Interscience New York 81
- (1994) Principles of Plasma Discharges and Materials Processing , pp. 81
- Lieberman, M.A.¹ Lichtenberg, A.J.²

13
- 0033531815
- J.M. Priest M.J. Baldwin M.P. Fewell S.C. Haydon G.A. Collins K.T. Short J. Tendys Thin Solid Films 354 1999 113
- (1999) Thin Solid Films , vol.354 , pp. 113
- Priest, J.M.¹ Baldwin, M.J.² Fewell, M.P.³ Haydon, S.C.⁴ Collins, G.A.⁵ Short, K.T.⁶ Tendys, J.⁷

14
- 0037081045
- E.I. Meletis Surf. Coat. Technol. 149 2002 95
- (2002) Surf. Coat. Technol. , vol.149 , pp. 95
- Meletis, E.I.¹

15
- 36549099540
- J. Hirovonen A. Anttila Appl. Phys. Lett. 46 1985 835
- (1985) Appl. Phys. Lett. , vol.46 , pp. 835
- Hirovonen, J.¹ Anttila, A.²

16
- 14644389135
- a is the experimentally determined activation energy
- a is the experimentally determined activation energy

17
- 4243939160
- A. Kuhl D. Bergner H.-J. Ullrich M. Schlaubitz P. Karduck Mikrochim. Acta 107 1992 295
- (1992) Mikrochim. Acta , vol.107 , pp. 295
- Kuhl, A.¹ Bergner, D.² Ullrich, H.-J.³ Schlaubitz, M.⁴ Karduck, P.⁵

18
- 0028465754
- D.L. Williamson O. Ozturk R. Wei P.J. Wilbur Surf. Coat. Technol. 65 1994 15
- (1994) Surf. Coat. Technol. , vol.65 , pp. 15
- Williamson, D.L.¹ Ozturk, O.² Wei, R.³ Wilbur, P.J.⁴

19
- 84902437525
- -2
- -2 J. Phys. Chem. Ref. Data 20 1991 557
- (1991) J. Phys. Chem. Ref. Data , vol.20 , pp. 557
- Phelps, A.V.¹

20
- 0037472664
- K. De Bruyn M. Van Stappen H. De Deurwaerder L. Rouxhet J.P. Celis Surf. Coat. Technol. 163-164 2003 710
- (2003) Surf. Coat. Technol. , vol.163-164 , pp. 710
- De Bruyn, K.¹ Van Stappen, M.² De Deurwaerder, H.³ Rouxhet, L.⁴ Celis, J.P.⁵

21
- 0041739075
- J.M. Grace L.J. Gerenser J. Dispers. Sci. Technol. 24 2003 305
- (2003) J. Dispers. Sci. Technol. , vol.24 , pp. 305
- Grace, J.M.¹ Gerenser, L.J.²

22
- 0010999160
- C.-A. Chang Appl. Phys. Lett. 51 1987 1236
- (1987) Appl. Phys. Lett. , vol.51 , pp. 1236
- Chang, C.-A.¹

23
- 0003961683
- K.L. Mittal (Ed.) Marcel Dekker New York
- C.-A. Chang Y.-K. Kim S.S. Lee in: K.L. Mittal (Ed.) Metallized Plastics 1998 Marcel Dekker New York
- (1998) Metallized Plastics
- Chang, C.-A.¹ Kim, Y.-K.² Lee, S.S.³

24
- 0038650933
- D. Gall S. Kodambaka M.A. Wall I. Petrov J.E. Greene J. Appl. Phys. 93 2003 9086
- (2003) J. Appl. Phys. , vol.93 , pp. 9086
- Gall, D.¹ Kodambaka, S.² Wall, M.A.³ Petrov, I.⁴ Greene, J.E.⁵

25
- 0942288926
- C.-S. Shin S. Rudenja D. Gall N. Hellgren T.-Y. Lee I. Petrov J.E. Greene J. Appl. Phys. 95 2004 356
- (2004) J. Appl. Phys. , vol.95 , pp. 356
- Shin, C.-S.¹ Rudenja, S.² Gall, D.³ Hellgren, N.⁴ Lee, T.-Y.⁵ Petrov, I.⁶ Greene, J.E.⁷

26
- 0000978538
- J.-S. Chun I. Petrov J.E. Greene J. Appl. Phys. 86 1999 3633
- (1999) J. Appl. Phys. , vol.86 , pp. 3633
- Chun, J.-S.¹ Petrov, I.² Greene, J.E.³

27
- 14644413244
- (September)
- L. Bárdoš H. Baránková Vac. Technol. Coat. (2001 September) 47
- (2001) Vac. Technol. Coat. , pp. 47
- Bárdoš, L.¹ Baránková, H.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.