Imaging of unbalanced magnetron DC discharge

IEEE Transactions on Plasma Science

Volumn 33, Issue 2 I, 2005, Pages 364-365

  Kvasnica, Samuel ^a   Adámek, Petr ^b   Spatenka P ^c  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b UNIVERSITY OF SOUTH BOHEMIA   (Czech Republic)

^c TECHNICAL UNIVERSITY OF LIBEREC   (Czech Republic)

Author keywords

Hot energy tail; Langmuir probe diagnostics; Plasma imaging; Presheath; Unbalanced magnetron

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; FINITE ELEMENT METHOD; GLOW DISCHARGES; IMAGING TECHNIQUES; MAGNETIC FIELD EFFECTS; MAGNETRONS; PROBES;

HOT ENERGY TAIL; LANGMUIR PROBE DIAGNOSTICS; PLASMA IMAGING; PRESHEATH; UNBALANCED MAGNETRON;

PLASMA SHEATHS;

EID: 18844453164     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.845375     Document Type: Article

References (9)

1. B. Window and N. Savvides, "Unbalanced DC magnetrons as sources of high ion fluxes," J. Vac. Sci. Technol. A, vol. 4, no. 3, pp. 453-456, May/Jun. 1986.
2. P. Spatenka, J. VlČek, and J. Blažek, "Langmuir probe measurements of plasma parameters in a planar magnetron with additional plasma confinement," Vacuum, vol. 55, pp. 165-170, 1999.
3. J. Bradley, S. Thompson, and Y. Gonzalvo, "Measurement of the plasma potential in a magnetron discharge and the prediction of the electron drift speeds," Plasma Sources Sci. Technol., vol. 10, pp. 490-501, 2001.
4. J. P. Verboncour, A. B. Langdon, and N. T. Gladd. (1995, May) An object-oriented electromagnetic PIC code. Comp. Phys. Comm. [Online]. Available: http://langmuir.eecs.berkeley.edu
5. S. Kvasnica, R. Fasching, and F. Kohl, "Modeling of unbalanced planar magnetron DC discharge," presented at the 15th ISPC, Orléans, France, Jul. 2001.
6. Open source version of IBM's Visualization Data Explorer [Online]. Available: http://www.opendx.org
7. P. Dular and C. Geuzaine. (1999) GetDP, A general environment for the treatment of discrete problems. [Online]. Available: http://www.geuz.org/ getdp
8. P. Adámek, "Measuring system for the Langmuir probe diagnostics of the plasma," in Proc. CO-MAT-TECH, vol. I, Trnava, Slovakia, 2001, pp. 11-16.
9. D. H. Munro. Yorick - An Interpreted Programming Language v1.5. [Online]. Available: ftp://ftp-icf.llnl.gov/pub/Yorick