Time-resolved Langmuir probe measurements at the substrate position in a pulsed mid-frequency DC magnetron plasma

Surface and Coatings Technology

Volumn 135, Issue 2-3, 2001, Pages 221-228

  Bradley, J W ^a   Backer H ^a   Kelly, P J ^b   Arnell, R D ^b  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COOLING; PLASMAS; SUBSTRATES; VOLTAGE MEASUREMENT;

PULSED MID-FREQUENCY DIRECT CURRENT MAGNETRON PLASMAS; TIM-RESOLVED LANGMUIR PROBE MEASUREMENT;

MAGNETRONS;

EID: 0342468746     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00990-7     Document Type: Article

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