Temporal evolution of electron energy distribution function and plasma parameters in the afterglow of drifting magnetron plasma

Plasma Sources Science and Technology

Volumn 14, Issue 3, 2005, Pages 576-580

  Seo, Sang Hun ^a   In, Jung Hwan ^a   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CATHODES; DIELECTRIC FILMS; FREQUENCIES; MAXWELL EQUATIONS; SUBSTRATES;

BULK PLASMA; ELECTRON DISTRIBUTION FUNCTION; ELECTRON GROUPS; ELECTRON TRANSPORT;

PLASMAS;

EID: 23844446658     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/3/021     Document Type: Article

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