Two-dimensional double probe study of the temporal evolution of the charge carrier density in a pulsed magnetron

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Welzel, Thomas ^a   Dunger, Thoralf ^a   Richter, Frank ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Charge carrier density; Langmuir probes; Magnetron; Pulsed discharges; Sputtering; Structure

Indexed keywords

CHARGE CARRIER DENSITY; DOUBLE PROBE; LANGMUIRS; PEAK DISTRIBUTION; PEAK STRUCTURE; PLASMA TORUS; PULSED DISCHARGES; PULSED MAGNETRON DISCHARGES; SIMPLE MODEL; STRUCTURE; TEMPORAL EVOLUTION; TIME-RESOLVED; TORUS REGION; TWO-DIMENSION;

CARRIER CONCENTRATION; LANGMUIR PROBES; PROBES;

MAGNETRONS;

EID: 59249102727     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200732302     Document Type: Conference Paper

References (28)

1. S. Schiller, K. Goedicke, J. Reschke, V. Kirchhoff, S. Schneider, F. Milde, Surf. Coat. Technol. 1993, 61, 331.
2. A. Belkind, A. Freilich, R. Scholl, J. Vac. Sci. Technol. A 1999, 17, 1934.
3. P. J. Kelly, R. D. Arnell, Vacuum 2000, 56, 159.
4. P. J. Kelly, P. S. Henderson, R. D. Arnell, G. A. Roche, D. Carter, J. Vac. Sci. Technol. A 2000, 6, 2890.
5. H. Bartzsch, P. Frach, K. Goedicke, C. Gottfried, Surf. Coat. Technol. 1999, 120-121, 723.
6. J. W. Bradley, H. Bäcker, P. J. Kelly, R. D. Arnell, Surf. Coat. Technol. 2001, 135, 221.
7. J. W. Bradley, H. Bäcker, P. J. Kelly, R. D. Arnell,, Surf. Coat. Technol. 2001, 142-144, 337.
8. Th. Welzel, Th. Dunger, H. Kupfer, F. Richter, J. Appl. Phys. 2004, 96, 6994.
9. F. Richter, Th. Welzel, Th. Dunger, H. Kupfer, Surf. Coat. Technol. 2004, 188-189, 384.
10. S.-H. Seo, J.-H. In, H.-Y. Chang, J.-G. Han, Appl. Phys. Lett. 2005, 86, 262103.
11. A. Belkind, A. Freilich, J. Lopez, Z. Zhao, W. Zhu, K. Becker, New J. Phys. 2005, 7, 90.
12. J. Lopez, W. Zhu, A. Freilich, A. Belkind, K. Becker, J. Phys. D: Appl. Phys. 2005, 38, 1769.
13. I. Swindells, P. J. Kelly, J. W. Bradley, New J. Phys. 2006, 8, 47.
14. Th. Dunger, Th. Welzel, St. Welzel, F. Richter, Surf. Coat. Technol. 2005, 200, 1676.
15. Th. Welzel, Th. Dunger, St. Welzel, H. Kupfer, F. Richter, Surf. Coat. Technol. 2005, 200, 630.
16. S. K. Karkari, H. Bäcker, D. Forder, J. W. Bradley, Meas. Sci. Technol. 2002, 13, 1431.
17. M. Misina, J. W. Bradley, H. Bäcker, Y. Aranda-Gonzalvo, S. K. Karkari, D. Forder, Vacuum 2003, 68, 171.
18. S.-H. Seo, J.-H. In, H.-Y. Chang, Plasma Sources Sci. Technol. 2006, 15, 256.
19. J. W. Bradley, G. C. B. Clarke, N. St. J. Braithwaite, P.M. Bryant, P. J. Kelly, Plasma Sources Sci. Technol. 2006, 15, S44.
20. J. Lopez, W. D. Zhu, A. Freilich, A. Belkind, K. Becker, IEEE Trans. Plasma Sci. 2005, 33, 348.
21. A. Vetushka, S. K. Karkari, J. W. Bradley, J. Vac. Sci. Technol. A 2004, 22, 2459.
22. J. W. Bradley, S. Karkari, A. Vetsuhka, Surf. Eng. 2004, 20, 186.
23. R. Pintaske, Th. Welzel, N. Kahl, M. Schaller, J. Hahn, F. Richter, Surf. Coat. Technol. 1997, 90, 275.
24. S. Klagge, M. Tichy, Czech. J. Phys. 1985, B35, 988.
25. A. A. Sonin, AIAA J. 1966, 4, 1588.
26. F. Richter, Th. Welzel, Th. Dunger, H. Kupfer, Surf. Eng. 2004, 20, 163.
27. B. Window, N. Savvides, J. Vac. Sci. Technol. 1986, A4, 196.
28. E. Shidoji, E. Ando, T. Makabe, Plasma Sources Sci. Technol. 2001, 8, 621.