Electric probe measurements in pulsed magnetron plasmas

Surface Engineering

Volumn 20, Issue 3, 2004, Pages 186-188

  Bradley, J W ^a   Karkari, S ^a   Vetushka, A ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

Magnetron pulsing; Reactive sputter deposition; Spatial maps; Time resolved emissive probing

Indexed keywords

DIELECTRIC FILMS; ELECTRIC FIELD EFFECTS; ELECTRIC INSULATORS; ELECTRIC POTENTIAL; MAGNETRONS; THIN FILMS; WAVEFORM ANALYSIS;

MAGNETRON PULSING; REACTIVE SPUTTER DEPOSITION; SPATIAL MAPS; TIME RESOLVED EMISSIVE PROBING;

SPUTTER DEPOSITION;

EID: 3142736384     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/026708404225016355     Document Type: Conference Paper

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