A time-resolved Langmuir double-probe method for the investigation of pulsed magnetron discharges

Journal of Applied Physics

Volumn 96, Issue 12, 2004, Pages 6994-7001

  Welzel, Th ^a   Dunger, Th ^a   Kupfer, H ^a   Richter, F ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC CHARGE; ELECTRIC DISCHARGES; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; SPECTROSCOPIC ANALYSIS; SWITCHING;

LANGMUIR DOUBLE-PROBE METHOD; PULSED MAGNETRON DISCHARGES; PULSED PLASMAS; SWITCHING POINT;

MAGNETRONS;

EID: 11144239640     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1808481     Document Type: Article

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