Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Journal of Applied Physics

Volumn 98, Issue 4, 2005, Pages

  Seo, Sang Hun ^a   In, Jung Hwan ^a   Chang, Hong Young ^a   Han, Jeon Geon ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY; LOW-ENERGY ELECTRONS; PLASMA PARAMETERS; TIME-RESOLVED PROBE MEASUREMENTS;

APPROXIMATION THEORY; CARRIER CONCENTRATION; ELECTRIC POTENTIAL; ELECTRON TRANSITIONS; HEATING; MAXWELL EQUATIONS; POTENTIAL ENERGY;

ARGON;

EID: 25144456148     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1990264     Document Type: Article

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