Influence of substrate conditions on the temporal behaviour of plasma parameters in a pulsed dc magnetron discharge

New Journal of Physics

Volumn 8, Issue , 2006, Pages

  Swindells, I ^a   Kelly, P J ^b   Bradley, J W ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (PROCESS); DC MACHINERY; ELECTRIC DISCHARGES; ELECTRIC PROPERTIES; ELECTRONS; EMISSION SPECTROSCOPY; ION BOMBARDMENT; MAGNETRONS; OPTICAL DEVICES; PARAMETER ESTIMATION; PLASMA PROBES; SUBSTRATES;

PLASMA PARAMETERS; PULSED DC MAGNETRON DISCHARGE; SUBSTRATE CONDITIONS; TIME-RESOLVED OPTICAL EMISSION SPECTROSCOPY;

PLASMAS;

EID: 33646358258     PISSN: 13672630     EISSN: 13672630     Source Type: Journal    
DOI: 10.1088/1367-2630/8/4/047     Document Type: Article

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