Recent aspects concerning DC reactive magnetron sputtering of thin films: A review

Surface and Coatings Technology

Volumn 127, Issue 2-3, 2000, Pages 203-218

  Safi, I ^a  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

Arcing; Hysteresis effect; Magnetron; Plasma emission monitoring; Pulsed magnetron; Reactive gas control; Reactive sputtering; Thin film; Voltage control

Indexed keywords

MAGNETIC HYSTERESIS; PLASMA APPLICATIONS; SPUTTER DEPOSITION; THIN FILMS; VOLTAGE CONTROL;

PLASMA EMISSION MONITORING; PULSED MAGNETRON; REACTIVE GAS CONTROL; REACTIVE SPUTTERING;

MAGNETRON SPUTTERING;

EID: 0033703601     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0257-8972(00)00566-1     Document Type: Article

References (86)

1. M.E. Graham, W.D. Sproul, Society Of Vacuum Coaters, 37th Annual Technical Conference Proceedings, 1994, pp. 275-279.
2. J. Musil, V. Valvoda, S. Kadlec, J. Vyskocil, IPAT 87, Proceeds of the 6th International Conference on Ion and Plasma Assisted Techniques, Brighton UK, 1987, pp. 184-189.
3. Larsson T., Blom H.O., Nender C., Berg S. J. Vac. Sci. Technol. A. 6(3):1988;1832-1836.
4. Schiller S., Heisig U., Steinfelder K., Strumpfel J., Sieber W. Vakuumtechnik. 30:1981;1-21.
5. Rizk A., Youssef S.B., Habib S.K. Vacuum. 38(2):1988;93-95.
6. Vossen J.L., Krommenhoek S., Koss A.V. J. Vac. Sci. Technol. A. 9(3):1991;600-603.
7. Okamoto A., Serikawa T. Thin Solid Films. 137:1986;143-151.
8. Maniv S., Westwood W.D. J. Appl. Phys. 51(1):1980;718-725.
9. Tsiogas C.D., Avaritsiotis J.N. J. Appl. Phys. 71(10):1992;5173-5182.
10. Kadlec S., Musil J., Vyskocil H. J. Phys. D: Appl. Phys. 19:1986;L187-L190.
11. Schiller S., Heisig U., Goedicke K., Schade K., Teschner G., Henneberger J. Thin Solid Films. 64:1979;455-467.
12. Maniv S., Westwood W.D. J. Vac. Sci. Technol. 17(3):1980;743-751.
13. Aronson A.J., Chen D., Class W.H. Thin Solid Films. 72:1980;535-540.
14. McMahon R., Affinito J., Parsons R.R. J. Vac. Sci. Technol. 20(3):1982;376-378.
15. Spencer A.G., Howson R.P., Lewin R.W. Thin Solid Films. 158:1988;141-149.
16. Blom H.O., Berg S., Larsson T. Thin Solid Films. 130:1985;307-313.
17. Berg S., Larsson T., Blom H.O. J. Vac. Sci. Technol. A. 4(3):1986;594-597.
18. Kusano E., Goulart D.M. Thin Solid Films. 193-94:1990;84-91.
19. Smith J.F., Aronson A.J., Chen D., Class W.H. Thin Solid Films. 72:1980;469-474.
20. Berg S., Moradi M., Nender C., Blom H.O. Surface Coatings Technol. 39/40:1989;465-474.
21. A.S. Penfold, American Society of Vacuum Coaters' 29th Annual Technical Conference Proceedings, 1986, pp. 381-403.
22. Danroc J., Aubert A., Gillet R. Surface Coatings Technol. 33:1987;83-90.
23. Kadlec S., Musil J., Vyskocil J. Vacuum. 37(10):1987;729-738.
24. Musil J., Kadlec S., Vyskocil J., Poulek V. Surface Coatings Technol. 39/40:1989;301-314.
25. A.J. Aronson, Microelectronic Manufacturing and Testing, January 1988, pp. 25-26.
26. Berg S., Blom H.O., Larsson T., Nender C. J. Vac. Sci. Technol. A. 5(2):1987;202-207.
27. Schiller S., Beister G., Sieber W. Thin Solid Films. 111:1984;259-268.
28. Maniv S., Miner C., Westwood W.D. J. Vac. Sci. Technol. 18(2):1981;195-198.
29. Maniv S., Miner C.J., Westwood W.D. J. Vac. Sci. Technol. A. 1(3):1983;1370-1375.
30. Scherer M., Wirz P. Thin Solid Films. 119:1984;203-209.
31. Este G., Westwood W.D. J. Vac. Sci. Technol. A. 2(3):1984;1238-1247.
32. Este G., Westwood W.D. J. Vac. Sci. Technol. A. 5(4):1987;1892-1897.
33. Czternastek H., Brudnik A., Jachimowski M., Kolawa E. J. Phys. D: Appl. Phys. 25:1992;865-870.
34. Brett M.J., McMahon R.W., Affinito J., Parsons R.R. J. Vac. Sci. Technol. A. 1(2):1983;352-355.
35. Brett M.J., Parsons R.R. Can. J. Phys. 63:1985;819-825.
36. U.S. Patents 4,428,811 and 4,428,812.
37. Sproul W.D. Surface Coatings Technol. 33:1987;73-81.
38. Howson R.P., Suzuki K., Bishop C.A., Ridge M.I. Vacuum. 34:1984;291-294.
39. S. Schiller, U. Heisig, C. Korndorfer, G. Beister, J. Reschke, K. Steinfelder, J. Strumpfel, Proceedings of the International Conference on Metallurgical Coatings, March 23-27, San Diego, CA, USA, 1987, pp. 124-142.
40. Hmiel A.F. J. Vac. Sci. Technol. A. 3(3):1985;592-595.
41. Sproul W.D., Rudnik P.J., Gogol C.A., Mueller R.A. Surface Coatings Technol. 39-40:1989;499-506.
42. Bhushan M. J. Vac. Sci. Technol. A. 5(5):1987;2829-2835.
43. Enjouji K., Murata K., Nishikawa S. Thin Solid Films. 108:1983;1-7.
44. S. Schiller, U. Heisig, K. Steinfelder, J. Strumpfel, A. Friedrich, R. Fricke, Proceedings of the 6th International Conference on Ion and Plasma Assisted Techniques, Brighton, UK, 1987, pp. 23-31.
45. Spencer A.G., Howson R.P. Thin Solid Films. 186:1990;129-136.
46. Howson R.P., Ja'Fer H.A., Spencer A.G. Vacuum. 44:1993;191-195.
47. Howson R.P., Spencer A.G., Oka K., Lewin R.W. J. Vac. Sci. Technol. A. 7(3):1989;1230-1234.
48. R.W. Lewin, R.P. Howson, Proceedings of the 6th International Conference on Ion and Plasma Assisted Techniques, Brighton, UK, 1987, pp. 464-469.
49. Affinito J., Parsons R.R. J. Vac. Sci. Technol. A. 2(3):1984;1275-1284.
50. Von Hippel A. Ann. Phys. 80:1926;672-706.
51. Stuart R.V., Wehner G.K. J. Appl. Phys. 33(7):1962;2345-2352.
52. Sawatzky E., Kay E. Rev. Sci. Instrum. 37(10):1966;1324-1329.
53. Stirling A.J., Westwood W.D. J. Appl. Phys. 41(2):1970;742-748.
54. B. Barney, G. Viloria, E. Lopata, Society of Vacuum Coaters, 35th Annual Technical Conference Proceedings, Baltimore, March 1992, pp. 319-324.
55. J. Chapin, C.R. Condon, U.S. Patent 4,166,784, 1979, pp. 1-10.
56. Schiller S., Heisig U., Steinfelder K., Strumpfel J., Voigt R., Fendler R., Teschner G. Thin Solid Films. 96:1982;235-240.
57. Greene J.E., Sequeda-Osorio F. J. Vac. Sci. Technol. 10(6):1973;1144-1149.
58. Rossnagel S.M., Saenger K.L. J. Vac. Sci. Technol. A. 7(3):1989;968-971.
59. Pech T., Chabrerie J.P., Ricard A. J. Vac. Sci. Technol. A. 6(5):1988;2987-2991.
60. Salmenoja K., Korhonen A.S. Vacuum. 36:1986;33-35.
61. R.P. Howson, A.G. Spencer, S.A. Kazandjiev, E.M. Stenlake, Proceedings of IPAT'89, Edinburgh, 1989, pp. 56-63.
62. Schiller S., Heisig U., Beister G., Steinfelder K., Strumpfel J., Korndorfer C., Sieber W. Thin Solid Films. 118:1984;255-270.
63. Howson R.P. Nuclear Instrum. Methods Phys. 121:1997;65-72.
64. Weissmantel C. Thin Solid Films. 32:1976;11-18.
65. Hartsough L.D., McLeod P.S. J. Vac. Sci. Technol. 14(1):1977;123-126.
66. Nowicki R.S. J. Vac. Sci. Technol. 14(1):1977;127-133.
67. Shih K.K., Dove D.B. J. Vac. Sci. Technol. A. 12(2):1994;321-322.
68. Rosenberg H.M. The Solid State. 1984;Oxford University Press, Oxford, UK.
69. R.A. Scholl, Society of Vacuum Coaters, 37th Annual Technical Conference Proceedings, 1994, pp. 312-316.
70. Hawley R., Zaky A.A., Zein Eldine M.E. Proc. IEE. 112(6):1965;1237-1248.
71. Cranberg L. J. Appl. Phys. 23(5):1952;518-522.
72. R.L. Cormia, T.A. Trumbly, S. Andresen, U.S. Patent 4,046,659, 1977, pp. 1-5.
73. Szczyrbowski J., Braatz C. SPIE. 1727:1992;122-136.
74. Schiller S., Goedicke K., Reschke J., Kirchhoff V., Schneider S., Milde F. Surface Coatings Technol. 61:1993;331-337.
75. Glocker D.A. J. Vac. Sci. Technol. A. 11(6):1993;2989-2993.
76. Frach P., Heisig U., Gottfried C., Walde H. Surface Coatings Technol. 59:1993;177-183.
77. Scherer M., Schmitt J., Latz R., Schanz M. J. Vac. Sci. Technol. A. 10(4):1992;1772-1776.
78. Thornton J.A. Thin Solid Films. 80:1981;1-11.
79. F.L. Williams, H.D. Nusbaum, B.J. Pond, Proceedings of the Optical Society of America Annual Meeting, September 1992, pp. 37-50.
80. B.J. Pond, T. Du, J. Sobczak, C.K. Carniglia, Proceedings of the Optical Society of America Annual Meeting, September 1992, pp. 1-36.
81. J. Sellers, ENI, Technical Note USA, 1995, pp. 1-3.
82. Este G., Westwood W.D. J. Vac. Sci. Technol. A. 6(3):1988;1845-1848.
83. L. Anderson, Society of Vacuum Coaters, 35th Annual Technical Conference Proceedings, Baltimore, March 1992, pp. 325-329.
84. D. Hofmann, P. Ballhause, A. Feuerstein, J. Snyder, Society of Vacuum Coaters, 35th Annual Technical Conference Proceedings, Baltimore, March 1992, pp. 218-226.
85. S. Schiller, K. Goedicke, V. Kirchhoff, Paper Presented at the 7th International Conference on Vacuum Web Coating, Miami, FL, USA, November 1993, pp. 2-18.
86. R.A. Scholl, Society of Vacuum Coaters, 35th Annual Technical Conference Proceedings, Baltimore, March 1992, pp. 391-394.