Review on the modeling of electrostatic MEMS

Sensors

Volumn 10, Issue 6, 2010, Pages 6149-6171

  Chuang, Wan Chun ^a   Lee, Hsin Li ^b   Chang, Pei Zen ^a   Hu, Yuh Chung ^c  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL ILAN UNIVERSITY   (Taiwan)

Author keywords

Electromechanics; Electrostatics; MEMS; Pull in voltage

Indexed keywords

DYNAMIC CHARACTERISTIC ANALYSIS; ELECTRO-MECHANICS; ELECTROSTATIC MEMS; ENERGY DOMAIN; NUMERICAL MODELING METHOD; PHYSICAL MODEL; PULL-IN VOLTAGE; WORKING STATE;

ELECTROMECHANICAL DEVICES; ELECTROSTATICS; MEMS;

ELECTROSTATIC DEVICES;

BIOLOGICAL MODEL; EQUIPMENT DESIGN; HUMAN; INSTRUMENTATION; METHODOLOGY; MICROELECTROMECHANICAL SYSTEM; MICROTECHNOLOGY; REVIEW; STATIC ELECTRICITY; THEORETICAL MODEL;

EQUIPMENT DESIGN; HUMANS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MICROTECHNOLOGY; MODELS, BIOLOGICAL; MODELS, THEORETICAL; STATIC ELECTRICITY;

EID: 77954773877     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s100606149     Document Type: Review

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