Squeeze-film damping of flexible microcantilevers at low ambient pressures: Theory and experiment

Journal of Micromechanics and Microengineering

Volumn 19, Issue 10, 2009, Pages

  Lee, Jin Woo ^a   Tung, Ryan ^b   Raman, Arvind ^b   Sumali, Hartono ^c   Sullivan, John P ^c  

^a Ajou University   (South Korea)

^b PURDUE UNIVERSITY   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT PRESSURES; BENDING MODES; DYNAMIC BEHAVIORS; EXTERNAL FORCING; FREQUENCY RESPONSE FUNCTIONS; GAS DAMPING; GAS PRESSURES; HIGHER ORDER; KNUDSEN NUMBERS; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-CANTILEVERS; MICROCANTILEVER BEAMS; OSCILLATING PLATES; RELATIVE IMPORTANCE; REYNOLDS; SQUEEZE-FILM DAMPING; THEORETICAL APPROACH;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; FREQUENCY RESPONSE; MEMS; MICROELECTROMECHANICAL DEVICES;

DAMPING;

EID: 70350635681     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/10/105029     Document Type: Article

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